4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

individual SUP spacer assembly (Except VV5Z3-40 type) DXT192-40-1A Applicable interface regulator ARBZ3000-00-P How to Order Type 42 VV5Z3 05 C6 42 1 Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc

3 Port Air Operated Valve Series SYJA300

Bottom Side Top Direction 1/8 1/8 1/8 P, R port M5 x 0.8, 1/8, C4 (One-touch fitting for 4), , C6 (One-touch fitting for 6) M5 x 0.8 1/8 Port size M5 x 0.8 A port M5 x 0.8 X port Note) M5 x 0.8 M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv SYJ52

7.5

0 o 2 4 (B) (A) 2 4 (B) (A) 3 5 1 (EB) (P) (EA) 3 5 1 (EB) (P) (EA) 4(A) 2(B) i 5(EA)/3(EB) 1(P) 3 position closed center 3 position closed center/exhaust center/pressure center 3 position exhaust center 2 4 (B) (A) 2 4 (A) (B) !1 q y w e r t o !

NCM

B 1.11 0.94 1.17 1.36 1.29 1.67 A 1.08 0.92 1.14 1.37 1.27 1.72 B 1.09 0.91 1.14 1.34 1.27 1.65 A 1.12 0.96 1.18 1.41 1.31 1.75 B 1.13 0.95 1.18 1.38 1.31 1.69 A 0.94 0.78 1.00 1.23 1.13 1.58 B 0.95 0.77 1.01 1.20 1.13 1.51 A 0.88 0.72 0.94 1.17 1.07 1.52 B 0.89 0.72 0.95 1.14 1.07 1.45 Bore size 0.63 A 1.50 B 075 (3/4") 088 (7/8") 106 (1-1/16") 125 (1-1/4") 150 (1-1/2") 200 (2") Mounting

Stainless Steel One-touch Fittings Series KG

Nylon Urethane 4 KGE06-00 KGE04-00 26 33 52 70 KGE08-00 KGE10-00 5.6 13.1 18.0 29.5 5.6 13.1 26.1 41.5 14 32.5 16 17 34.5 17 19 38 18.5 24 42.5 21 M12 1 M14 1 M16 1 M20 1 M22 1 44 22 58.3 46.1 90 KGE12-00 23 13 15 17 21 6 8 10 12 27 16 32 M28 1.5 51 25 113 (96) 115 KGE16-00 29 Note) ( ): Values for soft nylon.

VQ7-6/7-8

ISO size 1 Series VQ7-6 ISO size 1 Max. 10 stations 0.43n + 0.49 (n: Stations) 1/4 3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 3-10-11 Series VQ7-6 DIN Terminal Type VV71-100 80 100 2n-1/4, 3/8 80 23 37 9 14 9 15 U side U side Manual override R4.5 R4.5 Indicator light P = 43 53.5 P = 43 53.5 B B B B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA A B

VQ7-6/7-8

ISO size 1 Series VQ7-6 ISO size 1 Max. 10 stations 0.43n + 0.49 (n: Stations) 1/4 3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 3-10-11 12 Series VQ7-6 DIN Terminal Type VV71-100 80 100 2n-1/4, 3/8 80 23 37 9 14 9 15 U side U side Manual override R4.5 R4.5 Indicator light P = 43 53.5 P = 43 53.5 B B B B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA

VQ7-6/7-8

P reduced pressure A reduced pressure B reduced pressure ARB350-00-P ARB350-00-A ARB350-00-B A B A B 27 Series VQ7-8 Manifold Options Interface regulator Main EXH back pressure check plate P A B ARB350-00AXT512-25A Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 SMC SMC 238.5 (208) 221 226.5 (196) 209 193.5 181.5 135.5 (105) 118 PA B PE PE P 90.5

Modular F.R.L. Units

Optional/Semi-standard specifications N.O.: Black N.C.: Gray B B B B B Dimensions Thread type/Rc,G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Barb fitting Applicable tubing: T0604 1/4 M5 x 0.8 Width across flats 14 Width across flats 17 1/8 Model Standard specifications Optional specifications Bracket mount With auto drain P 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 B 87.6 115.1

Large Size Vacuum Module: Series ZR

SP 18 20 ZR1 1-K1M-DZCUK For port exhaust Exhaust (EXH.) port Rc 1/4 AMJ A B AMV A B S A B AEP 75.3 HEP 7.2 1 Related Equipment A B A B S A B Digital pressure switch for vacuum 109 1 (Port exhaust) 114 1 (Built-in silencer) 109 PE A (79.8) 1 85 1 PD 60 1 PS PV 147 (2000) 957 Series ZR Ejector exhaust Vacuum V port Ejector System with Valve Pilot pressure exhaust PE port Circuit diagram Release

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

MR-J3-B LECSS (2 axis) (Note 7) SW1 CN1A (Note 8) SW2 CN1B 2 1 LE-CSS-S MR-J3-B (Note 7) LECSS (3 axis) (Note 6 ) SSCNET cable (option) SW1 CN1A SW2 (Note 8) CN1B 2 1 MR-J3-B (Note 7) LECSS (n axis) SW1 CN1A (Note 9) Cap SW2 (Note 8) CN1B 2 1 3 6 3.

VZS

Side 4(A), 2(B) D side 1 16 VS4 16 stations Max. 16 stations.

JXCx-OMY0004

S Standard cable Orange 9 B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 6 5 (3) 2 1 A6 B6 15 16 L (11) (30.7) 14.2 Actuator cable [8 to 20m] (1) (2) LE-CPSignal name Terminal number Cable color Terminal number A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 8 8m B A-2 Yellow 5 COM-A/COM B-3 Green 3 A 10m COM-B/ A-3 Blue 4 B 15m (3

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

VS7-6

-P VF VFR VP7 VQC SQ VQ Symbol VQ4 VQ5 A port regulation/ARB250-00-A B port regulation/ARB250-00-B VQZ P port regulation VQD VFS VS VS7 A port regulation VQ7 B port regulation 1.19-7 Series VS7-6 Sub-plate Sub-plate: Series VS7-1/VSA7-1 Specifications Applicable solenoid valve/air operated valve Sub-plate size Series ISO size q ISO size q Side piping 1 4 3 8 Piping Bottom piping 0.37kg 1

With Factory Installed

Example) 1NR 20 1/8 25 1/4 Port size 30 3/8 01 1/8 1/2 40 Accessory (optional) 1/4 02 03 3/8 Symbol Description Applicable model 04 1/2 B With bracket AR2001-AR4001 Optional Specifications Combination Table Optional specifications Applicable regulator model Optional specifications Symbol AR3001 1 N R AR 2001 AR2501 AR4001 O.02 ~ O.2MPa [O.2 ~ 2.0kgflcm 21 -1 Non relieving -N IN-OUT reversal

SMC Electronic Switch Series Variations

How to calculate the setting value A = Max. pressure value in auto preset mode B = Tentative min. pressure value in auto preset mode P1 = A(AB)/4 P2 = B+(AB)/4 Example: Full scale reading 100[kPa] Setpoint for output 50[kPa] Repeatability 1[%F.S.] 1[%F.S.] = 100 [kPa] X 0.01 = 1[kPa] Manual adjustment is possible after set point auto preset mode.

VP4

Model Exhaust specifications P A, B Port size E Applicable valve model Series Common Individual Common Individual VP4154-00 VP4254-00 VP4354-00 VP4454-00 1 , 1 1 3 4 1 2 3 4 3 4 , VVP450 3 4 VVP460 Option Blanking plate assembly XT038N-4A With gaskets and bolts 3-6-9 10 Series VP450/470 Dimensions: VVP450/460 Common EXH: VVP450Station 1Port size VVP460Station 1Port size Grommet Conduit terminal

VPA4

EX) Base: 6 stations, common EXH, A & B port Rc 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

EX) Base: 6 stations, common EXH, A & B port 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.