Electric Actuator / Slider Type 《 AC Servo Motor 》

Positioning repeatability [mm] Basic type:0.02/High precision type: 0.01 Lost motion [mm] Basic type:0.1 or less/High precision type: 0.05 or less Lead [mm] 20 12 6 24 16 8 30 20 10 Impact resistance/vibration Resistance [m/s2] Note 4) 50/20 Drive method Ball screw(LEFS)Ball screw + Belt(LEFSL R) Guide type Liner guide Operating temperature range [] 5 to 40 Operating humidity range [%RH]

LEJ-OM002xx

Basic type 0.02 Positioning repeatability [mm] High precision type 0.01 Basic type 0.1 or less Lost motion [mm] Note4) High precision type 0.05 or less Lead [mm] 24 16 8 30 20 10 Impact / Vibration resistance [m/s2] Note5) 50 / 20 Drive method Ball screw Guide type Liner guide Acceptable external resistance [N] 20 Operating temperature range [] 5 to 40 Operating humidity range [%RH] 90 or

Digital Flow Switches Series PF2A

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 11 Digital Flow Switch Series PF2A For Air Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

1.1

20 0.1 0.1 10 10 Return port Return port 0 0 0.0 0.0 0 10 20 0 10 20 30 Pressure [MPa] Pressure [MPa] Lifting height [m] Lifting height [m] Circulating fluid flow (l/min) Circulating fluid flow (l/min) HRG005(After mounting HRG-BP005) 0.5 50 Outlet port: 60 [Hz] 0.4 40 Outlet port: 50 [Hz] 0.3 30 Return port: 60 [Hz] 0.2 20 Return port: 50 [Hz] 0.1 10 0 0.0 0 20 10 40 30 Pressure [MPa] Lifting

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

Electric Actuator / Low profile slider type

30 40 50 Stroke[mm] Origin 50mm Motor side End side 10 20 30 40 50 60 Stroke[mm] Origin 50mm Motor side End side -50 -40 -30 -20 -10 0 Stroke[mm] Origin 50mm Motor side End side -40 -30 -20 -10 0 10 Stroke[mm] Origin 50mm Motor side End side -60 -50 -40 -30 -20 -10 Stroke[mm] -29- 4.

PC Wiring System

Refer to page 44 in CAT.E02-20 about the circuit diagram.

Water-cooledThermo-chiller

Breaker Operating Characteristics Common for all models 4 h 2 h 1 h 5 s 10 s 20 s 30 s 1 min 2 min 4 min 6 min 10 min 14 min 20 min 30 min Max.

90

Without release valve Without pressure sensor/switch for vacuum With pressure sensor 30 m/s2 Vibration resistance Note 1) Pilot operated dual 2 port Pilot operated 2 port Valve configuration 20 m/s2 0.3 to 0.6 MPa Operating pressure range With switch for vacuum Poppet seal Valve construction Without pressure sensor/switch for vacuum With pressure sensor 150 m/s2 Impact resistance Note 2)

Table of Contents

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

Auto Switch Guide

If using other screws, switch may be damaged. (3) Load current range and Maximum load current 5 to 20 mA 5 to 40 mA 20 mA MU Contact protection circuit None DD-A93 2.4 V or less (up to 20 mA)/3 V or less (up to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Auto Switch Internal Circuit Colors of lead wire inside ( ) are the ones before conformed to IEC standard.

SMC Electronic Switch Series Variations

ZS-20-A 16 NPN Open Collector 2 output w/o analog output, 3 revolution adjustment ISl IWith lead wire ZS-20-5A 17 NPN Open Collector 2 output w/o analog output, 200 revolution adjustment Note) When ordering switch with 5m long lead wire, indicate both part numbers. Ex.) ZSE1-01-15CN1 pc. ZS-20-5A-501 pc.

Electric Rotary Table

to 280 30 to 420 20 to 280 30 to 420 20 to 280 30 to 420 Step Motor (Servo/24 VDC) Pushing speed [/sec] 20 30 20 30 20 30 Max. angular acceleration/deceleration [/sec2] Note 2) 3,000 0.5 Backlash [] 0.05 Positioning repeatability [] Impact/Vibration resistance [m/s2] Note 4) 150/30 Actuation type Special worm gear + Belt drive Max. operating frequency [c.p.m] 60 Operating temp. range [C]

VFS

VVFS2000-30A-6 15 m VVZS3000-21A-6 15 m VVFS2000-30A-7 20 m VVZS3000-21A-7 30 m VVZS3000-21A-8 20 m Option Option Cable Color List of Each Terminal No.

LG1H

1 Low Profile Single Axis Electric Actuator Series LG1H Series LG1H High Rigidity Direct Acting Guide Without coupling With coupling LJ1 LG1 LC1 LX LC6D/LC6C Switches Lead screw lead mm Mounting orientation Page Model Motor/Screw connection Series Motor type Guide type Ground ball screw Rolled ball screw Slide screw 10 20 10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor

E-MY2B_E_A

load Light load Transfer acceleration set range Acceleration 0.25 to 2.45 m/s2 0.49 to 4.90 m/s2 0.98 to 9.80 m/s2 1.96 to 19.6 m/s2 Nominal size:16 4(5)kg 1.25(1.25)kg 6(10)kg 2.5(2.5)kg Maximum load weight NOTE 1) Nominal size:25 11(20)kg 4(5)kg 8(10)kg 2.5(2.5)kg Acceleration and deceleration method Trapezoidal drive Moving direction Horizontal direction Positioning points Both ends (

OMU0023

Address Description of bytes tion unit range Input Mode D0410 4 Target position [m] Note 1) 1 Note 1) No D0412 2 Positioning time [0.01s] 1 0 to 6000 No D0413 2 Speed [mm/s] 1 0 to 400 No D0414 2 Acceleration [mm/s2] 1 0 to 60 No D0415 2 Deceleration [mm/s2] 1 0 to 60 No 1 to 20, Pushing speed [mm/s] D0416 2 1 No 32768 to Note2) 32788 Thrust setting value Note 3) More than D0417 2 1 Yes [

JXCx-OMY0006

Movement Speed Position Acceleration Trigger LV Area 1 Area 2 In pos Deceleration force speed force mm/s2 mode mm/s (mm) mm/s2 % (mm) (mm) (mm) % mm/s % 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 -42No.

Support Guide/11-LEFG Series

[mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mep 1500 1500 1500 1500 L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 1000 1000 1000 1000 L3 Z 500 500 500 500 0 0 0 0 0 10 20 30 40 50 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0