Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

3Ybore size 63 63 all types 4 x 28AW 30 10 14 6 M18 x 1.5 80 32 23 43 16 35 65 30 18.3 80 80 all types 100, 125 all types 4 x 36AW 35 10 14 7 M22 x 1.5 95 36 28 50 16 39 78 35 22.3 N M L E F 100 5 x 40AW 42 10 15 8 M27 x 2 110 40 33 59 20 46 90 43 27.5 160 160 all types 5 x 50AW 50 10 15 10 M33 x 2 120 44 37 66 22 50 100 45 34 C D Spring pin hole Drilled after assembly P A 100 Series CHA

JA/JAH/JB/JS

-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

JA/JAH/JB/JS

-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

Electric Slide Tables

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

C85

A 10 3 (3.5) 4 (4.5) 4 (5) 7 (5) 8.5 (6.5) 8 10 12 16 20 25 ( ) for air cushion type.

CQS

(mm) Stroke range (mm) A 29 29 35 39 OB H Q I RA K RB L T M N OA E D 6 8 10 12 C B 22 22 26 29 A 34 34 45 49 B 27 27 36 39 12 16 20 25 25 29 36 40 6 8 7 12 5 to 30 5 to 30 5 to 50 5 to 50 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 7.5 7.5 9 11 32 38 47 52 7 7 10 10 5 6 8 10 4 4 7 7 3.5 3.5 4.5 5 0.5 0.5 1 1 15.5 20 25.5 28 3.5 3.5 5.4 5.4 Note 1)

10

D-A59W D-G39 D-K39 D-A3l D-A44 CJ1 D-A9l D-A9lV D-P3DWA D-P4DW CJP CJ2 Bore size A B A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10

Electric Actuator with Integrated Guide

a=1000 a=2000 a=3000 L2 (mm) Mer Rolling Yawing 100 m L2 Mer 0 30 20 10 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100 L3 m Mey a 0 30 20 10 Transfer load m (kg) Refer to page 71 for deflection data. 36 40 Non-standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6EPH(X10) Scale: 20% Photo micro sensor 50 30 thread depth 8 4-M5 x 0.8 E D Proximity sensor (2

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

SB) A (3 x 3.2) Section SD SD Auto switch mounting groove dimensions (2 locations) MHSJ3-16D MHSJ3-20D MHSJ3-25D 4 4 5 4 6 5 3 6.5 5 3 3 20 20 5 5 90 90 20 20 20 20 (mm) NB 5h9 6h9 6h9 K 4 5 6 J 10 12 14 HB 36 42 50 HA 44 50 59 FX 12 15 18 EO 9.5 10 12.5 EC 7.5 8 9.5 DO 19.5 22 26.5 A 39 42 47 CB 14 14 17.5 DC 17.5 20 23.5 B 30 36 42 CA 7 7 7.5 AE 27 28 32 Q 6 7 8 AA 46 49 55 AD 16 18 20

One-touch Fittings

[mm] Weight [g] With a rib X Y Nylon Urethane M L1 Rib 3.2 1/8 KQ2L23-01mS1 10 7.1 6.7 9.5 10 14.5 16.7 17.2 13.3 3 2.5 2.5 4.6 1/4 KQ2L23-02mS1 14 7.1 6.7 9.5 10 14.5 21.2 20.1 13.3 3 2.5 2.5 14.1 D1 4 1/8 KQ2L04-01mS1 10 8.2 7.7 10 10 14.8 16.2 17.2 13.3 4.6 3.3 3 4.8 V 1/4 KQ2L04-02mS1 14 8.2 7.7 10 10 14.8 21.7 21.1 13.3 4.6 3.3 3 14.3 V D2 A L2 6 1/8 KQ2L06-01mS1 10 10.4 9.7 12 10

Stopper Cylinder

D-A9V D-A73 D-A80 D-F7NT D-A79W D-P3DWA Bore size (mm) A B A B A B A B A B A B A B 12 16 20 32 40 50 11 13 7 9 11.5 12 17 11.5 12 17 9 9 13 13 9 9 9.5 10 15 17.5 18 23 15 7 11 19 7 15 12 12.5 17.5 18 18.5 23.5 15.5 9.5 16.5 10.5 15 21 11 17 12 12.5 17.5 22.5 23 28 20 9.5 21 10.5 15 25.5 11 21.5 5.5 6 11 30.5 31 36 28 3 29 4 8.5 33.5 4.5 29.5 Note) Adjust the auto switch after confirming

KR

(mm) Connection thread R Model A M Weight (g) Note) D2 L1 L2 10 D1 KRL06-02S KRL06-01S 1 8 12 22 33 13 21 35 25 26 36 25.5 23 27 29 24.5 28.5 30.5 27 30 32 36 31 33 37 10 20 29 27.5 1 4 19 4.2 14 17 12 14 17 12.8 6 Applicable tubing 9.0 3 8 1 8 KRL06-03S 28 14.9 KRL08-01S KRL08-02S KRL08-03S KRL10-01S KRL10-02S KRL10-03S 1 4 3 8 1 8 1 4 3 8 30 31.5 32 33 34.5 15.2 12 23 8 20.5 21.6 14.9 21.6

LJ1H

Mep 2000 a = 1000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer

Basic type / Direct mount type Series CY3B/CY3R

XGT 10-10 0 5 10 CYV Time [min] e e a a l l k k w w a a 1 2 o o g g O-ring seals separate vacuum and atmosphere Employs a magnetically coupled rodless cylinder with no air leakage from moving parts L L e e Static O-ring seals are used for all the seals between vacuum and atmosphere.

Air Slide Table

Rubber Stopper (AS, AT, A) Metal Stopper (CS, CT, C) (mm) A (mm) A B B C C Model Model MXQR6 MXQR8 MXQR12 MXQR16 MXQR20 MXQR25 MXQR6 MXQR8 MXQR12 MXQR16 MXQR20 MXQR25 26.5 25.5 10 10 26 25 29.5 28 10 9.5 29 30.5 33.5 32 9 8.5 33 35 34.5 33 6.5 6 34 32.5 37.5 37 3.5 4 37 36.5 42.5 40 2.5 1 42 39.5 28 Made to Order Individual Specifications: Air Slide Table/Reversible Type Series MXQR Please

Possible to transfer a workpiece at low-speed.

17 to 30 18 to 32 18.5 to 36 Size 10 15 20 30 40 Size 10 15 20 30 40 Size 10 15 20 30 40 CRQ2X MSQX CRQ2X MSQX MRQ Symbol: A20 Symbol: A21 Symbol: A22 The long shaft can be further shortened by machining it into a stepped round shaft with a double-sided chamfer.

10

If there is something you do not know, please contact SMC. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

C95

45 50 63 75 16 20 25 25 30 35 10 10 12 12 16 16 130 145 155 170 190 205 7 9 9 9 12 14 10 12 12 16 16 20 65 75 80 90 110 140 12 15 15 20 20 25 142 160 170 190 210 230 45 52 60 70 90 110 26 28 32 40 50 60 26 28 32 40 50 60 9.5 12 12 16 16 20 32 36 45 50 63 75 10 11 12 12 14 16 4.5 4.5 5.5 5.5 6.5 6.5 144 163 175 190 215 230 142 161 170 185 210 220 32 36 45 50 63 71 7 10 10 10 12 14.5 17 22

CV/MVGQ

TX TY TZ QY S TD TT Bore size (mm) 20 25 32 40 52 36 116 62 8 10 32 32 14 120 10 40 40 60 40 14 62 9 40 60 40 122 9 10 40 16 64 44.5 154 53 53 77 16 88 10 11 10-15-24 25 Valve Mounted Cylinder Double Acting, Single Rod Series CVM5 Head Side Trunnion Style (T) Bore size Stroke CVM5T Manual override Width across flats B2 Width across flats B1 0.025 0.061 RE A B REC CX CY Width across flats