10

Position (Standard type) Auto switch model D-Y59l D-Y69l D-Y7P D-Y7PV D-Y7H D-Y7lW D-Y7lWV D-Z7l D-Z8l D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-F5l D-J59 D-F59F D-F5NT D-A5l D-A6l D-A59W D-G39 D-K39 D-A3l D-A44 D-A9l D-A9lV D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3

VQ7-6/7-8

(20) (port B) 16 (20) (port A) 16 (20) (port B) Manual override A B A B B PB B PB 75 (86) 62 (72) 108.5 (121.5) 141 (154) 153 (166) 75 (86) 62 (72) 50 38 50 38 Indicator light PA PA R2 R1 P R2 R1 P Indicator light 49 (64) 49 (64) 2-7.5 Mounting hole 2-7.5 Mounting hole 49 (64) 49 (64) G1/2 (cable 6.8 to 10) G1/2 (cable 6.8 to 10) 153 (166) 141 (154) 108.5 (121.5) 50 (63) 5 3 38 (53) 32 (42

15

1.0 M3 x 8 0.63 M4 x 10 1.5 8 7.5 19 M4 x 0.7 7.5 46 30 3.7 11 42 NY M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 8 7.5 19 M3 x 0.5 5.5 45 30 5 11 38 NX M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 8 4.5 19 M4 x 0.7 7.5 46 30 3.7 11 42 NM1 M3 x 5 0.63 M3 x 8 0.63 M4 x 10 1.5 5 11.8 19 3.4 7.0 31 28 3.5 8.5 42 NM2 M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 6 48 19 3.4 7.0 31 28 3.5 8.5 42 25 NZ M3 x 12 1.5

MGP

object: m (kg) 30 16 20 10 When selecting a model with a longer l dimension, be sure to choose a bore size which is sufficiently large. 4 5 3 Caution 2 Handling precautions Note 1) When using as a stopper, select a model with a stroke of 25mm or less. 1 5 10 20 30 40 50 Note 2) Model MGPL (ball bushing) cannot be used as a stopper.

CY1

Impact at the stroke end is absorbed by inclusion of a shock absorber. The use of a linear guide makes possible a large load, large moment and high precision. Series CY1H Size: 10, 15, 20, 25, 32 To ensure a permanent path. When a larger load, larger moment or higher precision are required.

VQ7-6/7-8

2-3/8 P port 1/4, 3/8 VFN 2 position double : VQ7-6-FG-D-SC double (Reverse pressure): VQ7-6-YZ-D-SC 3 position closed center : VQ7-6-FHG-D-SC exhaust center : VQ7-6-FJG-D-SC pressure center: VQ7-6-FIG-D-SC 145 155 76.5 68.5 68.5 86.5 50 50 50 50 Manual override Manual override 13 (A port) 13 (B port) 13 (A port) 13 (B port) A B A B 38 50 62 38 50 62 B A B A R1 (L 500) Cable with connector

VQ7-6/7-8

center : VQ7-6-FHG-D exhaust center : VQ7-6-FJG-D pressure center: VQ7-6-FIG-D 155 145 68.5 86.5 76.5 68.5 50 50 50 50 13 (A port) 13 (B port) 13 (A port) 13 (B port) Manual override Manual override A B A B B B 62 50 38 62 50 38 R2 R1 P R1 R2 P Indicator light Indicator light Mounting hole 2-6.5 42.5 42.5 2-6.5 42.5 42.5 Mounting hole G1/2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 137.5 137.5

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

P QB W WB E GB A (mm) Circumscribed circle I O QA 14 depth 5 Stroke A B CD CT CZ D E FT FX FZ GA GB H L N 212.5 LANote 5) Model RS2H50 RS2H63 RS2H80 30 84.5 20 8 36 32 64 20 73 93 16 16 128 85 44 26 9 10 30 234.5 90 20 10 45 40 77 25 90 114 24 24 144.5 103 53 31 11 18 depth 6 12.5 40 292.5 121 25 10 45 50 98 25 110 138 24 35 171.5 132 54.5 38 13 20 depth 6 12.5 P (Piping port) Model Stroke

MGP

24 110 110 120 120 M5 X 0.8 10 10 12 12 40 44 44 44 300 300 3 3 3 4 5 5 17 17 56 62 81 91 15 17 29 29 3.5 3.5 3.5 4.5 25 27 39 39 41 46 54 64 50 56 72 82 12 16 20 25 37 38 44 50 CY1 16 M5 X 0.8 18 167 167 M6 X 1.0 MY1 26 M6 X 1.0 MGPM(Slide Bearing)/Dimensions A, DB, E MGPL(Ball Bushing Bearing)/Dimensions A, DB, E A E DB A E DB Bore (mm) 100st< 50st< 100st 50st< 100st Bore (mm) 100st< 30st

CNG

GR GQ H1 I 18 13 38 93 1/8 56.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 20 to 200 15.5 to 200 22 17 45 103 1/8 66 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 20 to 300 19.5 to 300 22 17 45 104 1/8 67.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 19.5 to 300 30 19 52 112 1/8 75 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 20 to 300 301 to 500 301 to 500 27 to 300 (mm) Bore size (mm) 20 25 32 40 P

AS

(32.8) 36.6 35 31.1 29.5 (17.5) AS22;1F-02-08(S)A 8 13.2 23.9 33 (33.3) 14.2 19 (20) AS22;1F-02-10(S)A 10 15.9 26.9 36 (36.3) 15.6 20 (21) AS32;1F-03-06(S)A 6 10.4 21.8 32.1 13.3 28.7 31 (32) AS32;1F-03-08(S)A 8 13.2 22.7 33 14.2 19 3/8 15.6 42.3 40.7 37.1 35.5 AS32;1F-03-10(S)A 28 10 15.9 26.7 37 15.6 32 (33) AS32;1F-03-12(S)A 26.8 12 18.5 29.7 40 17 34 (35) AS42;1F-04-10(S)A 36.2 10 15.9

C95

Position D-F5, D-F5W D-J5, D-J59W D-F59F, D-F5BAL D-Z7, D-Y59, D-Y7BAL D-Z80, D-Y69, D-Y7W(V) D-Y7P(V) D-A5 D-A6 D-A59W D-F5NTL D-A3, D-G39 D-A44, D-K39 D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 0 10.5 1.5 14 9.5 22 4.5 17 2 14.5 0 10.5 1 13.5 40 0 21.5 1.5 25 9.5 33 4.5 28 2 25.5 0 21.5 1 24.5 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5

V

S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 F I T T I N G B L A N K P L U G DIMENSIONS FITTING BLANK PLUG KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 PART A L D APPLICABLE NUMBER FITTING SIZE D 16 KQP-23-X19 31.5 3.2 3.2 16 KQP-04-X19 32 6 4 18 KQP-06-X19 35 8 6 20.5 KQP-08-X19 39 10 8 COLOR: WHITE 22 KQP-10-X19 43 12 10 M A N I F O L D O P T I O N M A N I F O L D O P T I O N S E R I

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

C95

B A B A B A B A B A B A B MB1 32 0 10.5 1.5 14 9.5 22 4.5 17 2 14.5 0 10.5 1 13.5 40 0 21.5 1.5 25 9.5 33 4.5 28 2 25.5 0 21.5 1 24.5 CA2 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5 32 0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5

LEC-OM071xx

Note: When using parameters that are enabled after restarting the DRIVER, a CONFIG command must be input or the power must be turned OFF and then ON again. 10-38 10 List of Parameters (contd) Parameter Setting Range Units Factory When ClassificaSize Name No.

Table of Contents

, IDF6E-10 IDF8E-10, IDF11E-10 Type 100 V 10 A IDU3E-10, IDU4E-10 IDU6E-10 30 mA IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

Cylinder with Lock Series CNG

GR GQ H1 I 18 13 38 93 1/8 56.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 20 to 200 15.5 to 200 22 17 45 103 1/8 66 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 20 to 300 19.5 to 300 22 17 45 104 1/8 67.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 19.5 to 300 30 19 52 112 1/8 75 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 301 to 500 20 to 300 301 to 500 27 to 300 (mm) Bore size (mm) 20 25 32 40 P

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

10 10 10 40 40 40 40 5 6.4 5 10 6.4 13 90 12 5 15 7 90 (mm) M 4 6 K 15 21 J 38 52 G 63 84 15 18 FZ 10 12 FX 59 74 FY 54 68 CA 18 23.5 EC 28 30 EO 40 46 DC 66 82 DO 78 98 B 134 166 AC 6 8 AA 96 122 AB 90 114 NA 34 40 L NB Model MHS3-100D MHS3-125D CB 30.6 38 +0.036 0 +0.036 0 0 -0.043 0 -0.052 8H9 18h9 10H9 22h9 SC 21 34 SB 14 17.5 SA 9 11 P R 118 148 UA M8 x 1.25 O 7.5 10.5 VA Q 23 31 TA