AS-FG/ASD-FG

40.2 35.2 18.5 57 23 31.8 43.3 AS321FG-03-12 AS321FG-N03-11 61 22 32.8 44.3 20.9 12 17.9 3/8" 21 59 33.6 47.9 AS421FG-04-10 AS421FG-N04-11 100 21 33.6 47.9 18.5 10 17.9 3/8" 21 100 R(PT) 1/2 NPT 1/2 23.8 25.4 28.6 50.1 57.6 25.4 24 49.6 57.6 50.1 49.6 42.1 42.1 28.6 35.2 49.5 AS421FG-04-12 AS421FG-N04-13 101 22 34.6 48.9 20.9 12 21.7 1/2" 22 101 Reference dimensions for threads after installation

0.55

03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 Manifold Option Description Part no.

Plug-in/Plug Lead: Single Unit

03 04 VVQ5000-P-1(Plug-in type) VVQ5000-P-5(Plug lead type) 179 (Plug-in type) 133 (Plug lead type) 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: Rc 3/8 04: Rc 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug llead type Individual EXH spacer 03 04 03 04 VVQ5000-R-1(Plug-in

reduces flow setting time

, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Stainless Steel One-touch Fittings Series KG

3 8 KGE10-03 3 8 KGE12-03 37 14 92 59 12 M22 1 27 24 23 22 58.3 46.1 1 2 KGE12-04 41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.

Series KG Stainless Steel One-touch Fittings

3 8 KGE10-03 3 8 KGE12-03 37 14 92 59 12 M22 1 24 27 23 22 58.3 46.1 1 2 KGE12-04 41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.

Compact and Lightweight

Applicable model t ZH15DA-09-N03-11 ZH15DA-N02-N03-N03 2 Minimum C Factor of a Supply Valve Model C[dm3/(sbar)] ZH05A 0.12 ZH07A 0.23 ZH10A 0.47 ZH13A 0.80 ZH15A 1.06 ZH18A 1.53 ZH20A 1.88 ZH18DA-11-N03-13 ZH18DA-N03-N03-N03 1 ZH20DA-10-04-12 ZH20DA-03-04-04 ZH20DA-11-N04-13 ZH20DA-N03-N04-N04 t 2.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

CL

11 11 14 17 17 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 30 31 37 40 42 46 48.5 55 56.5 11 10 13 15 15 20 21 23 23 25 45 50 60 70 80 153 168 182 208 226 8 0 0 0 0 1/4 3/8 3/8 1/2 1/2 6 7 7 11 11 MGQ MGG MGC CLAB40SCLA40, #1 (#1+#11) CLAB50SCLA50, #1 (#1+#11) CLAB50SCLA50, #1 (#1+#11) CLAB63SCLA63, #1 (#1+#11) CLAB80SCLA80, #1 (#1+#11) CLAB100SCLA100, #1 (#1+#11) MGF CY1 MY1 3.1

Dual Speed Controller with One-touch Fitting Series ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-03-07(S)A 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 42.3 40.7 37.1 35.5 13.3 29 (30) AS32l1FG-03-09(S)A 5/16" 13.2 22.7 33 14.2 AS32l1FG-03-11(S)A 3/8" 15.5 26.7 37 28.2 15.6 30 (31) AS42l1FG-04-11(S)A 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 50.8 49.2 43.7 42.1 15.6 52 (51) AS42l1FG-04-13(S)A 1/2" 19.3 30.9 43.8 (43.7) 34.7 17 54 (53) 20.9 30.2 (30.3) 1/4 17 (17.5) 13 Note 1) Reference

Combination Cylinder

11 14 17 17 30 24 26 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M30 X 1.5 M30 X 1.5 M36 X 1.5 27 30 31 37 40 35 35 39 84 90 98 116 126 98 98 106 60 70 86 102 116 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 M8 M8 M10 X 1.25 M12 M12 M14 X 1.5 M14 X 1.5 M16 X 1.5 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 22 19 22 8 0 0 0 0 3.1-58 Lock-up

ZP

3 e r w 11 Nut Steel (Zinc chromated) M10 x 1 M14 x 1 12 Fitting q 13 Lock ring Aluminum (Clear anodized) Pad diameter: 40, 50 10 to 32 40, 50 Vacuum inlet direction Lateral R Type/ZPRmF ZPRmFm-(04/06/08)-(A10/A14) !0 Construction !1 o Component Parts i No.

Base Mounted Metal Seal/Rubber Seal Series VQ

SOL.A () () (+) (+) 15 13 6 stations SOL.B SOL.A () () (+) (+) 11 9 7 stations SOL.B Connector terminal no.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

M1 AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1 35.6 36.8

SQ1000/2000

A 23 6 () 11 Station 8 SOL.

Flow Control Equipment

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

VEX1

04 06 10 10 12 14 20 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 4 3 8 1 2 1 2 3 4 There were not many appropriate large capacity 5 port valves of a closed center.

5 Port Solenoid Valve

SGP10A x 1 m Speed controller AS420-03 Silencer AN40-04 This chart is provided as guidelines only.