Table of Contents N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.
Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08
Without sub-plate D M5 Without sub-plate B M5 1 8 Base mounted style Without sub-plate 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol M5 01 02 02 03 04 04 06 10 10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140 02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02
N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.
Symbol 02 2 stations A, B P , EA, EB Symbol 04 06 Passage Porting specifications (A, B) EA, EB P 10 10 stations 1 2 Symbol 3 4 3 4 1 Side 2 Bottom M Mixed Common Common For bottom ported: 1/2 only.
Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10
VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.
IDF2D-1 AM150-03 AMD150-03 2.2 HAA7-06 HAW2-04 IDF3DAM150-03 AMD250-03 3.7 HAA7-06 HAW7-06 IDF4DAM250-03 AMD250-03 5.5 HAA7-06 HAW7-06 IDF6DAM250-04 AMD350-04 7.5 HAA7-06 HAW7-06 IDF8DAM350-04 AMD350-04 11 HAA15-10 HAW22-14 IDF11CAM350-06 AMD450-06 15 HAA15-10 HAW22-14 IDF15CAM450-10 AMD550-10 22 HAA22-14 HAW22-14 IDF22C1-3 AM550-10 AMD550-10 37 HAA37-14 HAW37-14 IDF37C1-3 AM650-14 AMD650
Size: 40 (1/2), Thread: M Thread, Rc(PT), Port Size: 02 (1/4), Accessory: None, Option 1: 10 (1000cm³ Tank w/Switch Lower Limit ON)
Size: 40 (1/2), Thread: M Thread, Rc(PT), Port Size: 02 (1/4), Accessory: B (Bracket), Option 1: 10 (1000cm³ Tank w/Switch Lower Limit ON)
Size: 40 (1/2), Thread: M Thread, Rc(PT), Port Size: 03 (3/8), Accessory: None, Option 1: 10 (1000cm³ Tank w/Switch Lower Limit ON)
Size: 40 (1/2), Thread: M Thread, Rc(PT), Port Size: 03 (3/8), Accessory: B (Bracket), Option 1: 10 (1000cm³ Tank w/Switch Lower Limit ON)
Size: 40 (1/2), Thread: M Thread, Rc(PT), Port Size: 04 (1/2), Accessory: B (Bracket), Option 1: 10 (1000cm³ Tank w/Switch Lower Limit ON)
Size: 40 (1/2), Thread: M Thread, Rc(PT), Port Size: 06 (3/4), Accessory: None, Option 1: 10 (1000cm³ Tank w/Switch Lower Limit ON)
Size: 40 (1/2), Thread: M Thread, Rc(PT), Port Size: 06 (3/4), Accessory: B (Bracket), Option 1: 10 (1000cm³ Tank w/Switch Lower Limit ON)
Size: 40 (1/2), Thread: F (G), Port Size: 04 (1/2), Accessory: None, Option 1: 10 (1000cm³ Tank w/Switch Lower Limit ON)
Size: 40 (1/2), Thread: F (G), Port Size: 04 (1/2), Accessory: B (Bracket), Option 1: 10 (1000cm³ Tank w/Switch Lower Limit ON)
Size: 40 (1/2), Thread: F (G), Port Size: 02 (1/4), Accessory: None, Option 1: 10 (1000cm³ Tank w/Switch Lower Limit ON)
Size: 1/2, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory: None, Option 1: 1000cm³ Tank w/Switch Lower Limit ON, Option 2: -
Size: 1/2, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory: Bracket, Option 1: 1000cm³ Tank w/Switch Lower Limit ON, Option 2: -