Vacuum Pad

across flat 6 5 Width across flat 8 Width across flat 10 Width across flat 8 Width across flat 10 Vertical 2 2 2 2 3 13 A D B 3 13 A D B With Adapter: Vacuum Inlet 2 2 2 2 13 A D B B D A M6 x 0.75 M6 x 0.75 M3 x 0.5 7 0.3 M3 x 0.5 7 0.3 M8 x 0.75 M8 x 0.75 M3 x 0.5 M3 x 0.5 7 Vertical 3 3 13 With Buffer: Vacuum Inlet 3 3 7 0.3 0.8 2 1.5 0.8 3 3 2 2.5 0.8 2 2.5 0.8 1.5 2 0.3 Lateral With

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

U D 5 3 U D 5 3 Individual EXH block assembly Individual SUP block assembly X U side D side U side D side X X 1(P) 1(P) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 1(P) 3/5(R) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) [When a different supply pressure is required for only a middle valve.]

Series SV

U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Series SV2000 ... ... 20 For 20 stations Stations 2 stations Symbol 02 Note Note 1) Double wiring specification ... ... ... ...

CG5-S

10 -04 R 1/2 R 3/8 -03 KGU12-02 R 1/4 R 1/2 -04 12 -03 R 3/8 R 1/4 KGT12-02 -04 R 1/2 12 R 3/8 -03 Male Delta KGD R 1/2 -04 R 3/8 KGT16-03 16 Applicable tubing O.D.

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) 1/4 VF5;2;-;;1-02 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF5;2;-;;1-03 1(P), 5(EA), 3(EB) 3/8 4(A), 2(B) 1/4 VF5;44-;;1-02 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF5;44-;;1-03 VF5000 1(P), 5(EA), 3(EB) 3/8 4(A), 2(B) 1/2 VF5;44-;;1-04 1(P), 5(EA), 3(EB) 1/2 1(P), 5(R), 3(R) 3/8 Type 20 manifold base 1(P), 5(R), 3(R) 1/2 Type 21

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R Valve stations Series 10-SV1000 Series 10-SV2000 P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins 02 02 02 02 2 stations 2 stations 2 stations 2 stations Double wiring

CG5-S

10 -04 R 1/2 R 3/8 -03 KGU12-02 R 1/4 R 1/2 -04 12 -03 R 3/8 R 1/4 KGT12-02 -04 R 1/2 12 R 3/8 -03 Male Delta KGD R 1/2 -04 R 3/8 KGT16-03 16 Applicable tubing O.D.

2/3 Port Valve

Solenoid valve (Port size) D, T G, C S S L, Z S L, Z T 1 (2mm) 2 (3mm) 3 (4.5mm) 4 (6mm) 5 (8mm) 6 (10mm) VX21 VX22 VX23 (1) 01( ) 02( ) 02( ) 03( ) 04( ) 02( ) 03( ) 04( ) 1 8 1 4 1 4 1 4 3 8 1 2 AC 3 8 1 2 Ordering Example (Example) Series VX21, Orifice size 2 mm, Rc(PT)1/8, 100V AC Grommet. With surge voltage suppressor.

SV

Valve stations Stations 2 stations Symbol 02 Note P, E port location (1) U D B Double wiring specifications U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 16 02 16 stations 2 stations (2) Specified layout (up to 32 solenoids possible.)

VZS

M plug connector 2 position double: VZS3250-M(Z)-01 02 3 position closed center: VZS3350-M(Z)-01 02 3 position exhaust center: VZS3450-M(Z)-01 02 3 position pressure center: VZS3550-M(Z)-01 02 DIN terminal 2 position double: VZS3250-D(Z)-01 02 3 position closed center: VZS3350-D(Z)-01 02 3 position exhaust center: VZS3450-D(Z)-01 02 3 position pressure center: VZS3550-D(Z)-01 02 164 (3 position

Table of Contents

Adapter connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 2 10 to 16 3 A14 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [q Adaptor] S ZP 06 B5 R [w Type R adaptor] Buffer connection thread B5 Symbol S Pad dia. 02 to 16 Pad dia.

5 Port Solenoid Valve Series VQZ1000/2000/3000

VQ VV5QZ25C C C4 05 D VQ4 CE compliant Series 2 VQZ2000 VQ5 Option Nil Q CE marked Port size [4(A), 2(B) port] C3 C4 C6 01 Nil None DIN rail mounting (With standard DIN rail length) VQC 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting Rc 1/8 Compact body D Stations 02 VQZ Manifold type 5 Base mounted DIN rail mounting (Without DIN rail) 2 stations D0 Note) Note 1) The one-touch

KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm2 Note 1) D Model L TPH TPS A H (width across flats) P Connection thread R Applicable tubing O.D. mm Weight g 2-Applicable tubing M P D KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 45.4 49.4 49.6 52.4 56.7 61.3 64.5 67.5 69.7 72.7 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5

Compact 5-Port Solenoid Valve

B SUP/EXH SUP EXH blocking disk label blocking disk label blocking disk label 3/5 E 3/5 E D D D B 2 B 2 B 2 B 2 B 2 1 P P 1 Series Part no.

Valve Single Unit

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

5 Port Solenoid Valve

-FPG-C6M5-D 2 pcs.

0.4

1 2 3 U D B In the case of the 32-output SI unit SV1000 SV2000 SV3000 U side (2 to 10 stations) D side (2 to 10 stations) Symbol 02 Stations Note 2 stations Both sides (2 to 20 stations) Double wiring Note 1) w SI unit specifications 16 02 16 stations 2 stations y SUP/EXH block assembly Symbol Communication connector Number of outputs Specified layout Note 2) (Available up to 32 solenoids

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Value in the initial state) Base mounted Solenoid specifications JIS Symbol Grommet (G), (H) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W) Base mounted Body ported 2 position single solenoid 2 position single (A) 4 (B) 2 (A) 4 (B) 2 Electrical entry G, H, L, M, W D 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) 24, 12, 6, 5, 3 24, 12 DC AC 50/60Hz Coil rated voltage

KR

Connection thread 17 15.2 1 4 KGU08-02 18.5 8 15.2 3 8 KGU08-03 2-applicable tubing 1 4 KGU10-02 40 28.4 30 40 65 61 62 65 19 18.5 3 8 KGU10-03 21 10 18.5 1 2 KGU10-04 22 1 4 KGU12-02 64.5 65.5 68.5 57.4 45.4 32 40 65 3 8 KGU12-03 20.9 22 20.9 12 22 1 2 KGU12-04 Note) D: Max. diameter Reference dimensions after R thread installation.