(Digital Pressure Switch w/Unit Selection Function), D: D

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Flow direction: Left to right Flow direction: Right to left + Nil Y Knob e Downward facing knob Upward facing knob + Nil Z Note 5) ZA Note 6) Pressure unit f Name plate and pressure gauge in imperial units: MPa Name plate and pressure gauge in imperial units: psi Digital pressure switch: With unit conversion function Note 7) Note 7) Note 7) Note 8) Note 8) Note 8) Note 1) Options B, G, H

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Series HAW Water Cooled Aftercooler 1

Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

Vacuum Pad with Ejector ZHP Series ø 63, ø 80

Weight Material: NBR, Mounting: A [g] qWeight Difference by Mounting Style [g] ZHP63BMNA-C6S 184 ZHP80BMNA-C6S 224 ZHP63UMNA-C6S 167 ZHP80UMNA-C6S 175 B C D E F G H 20 5 14 7 25 1 11 wWeight Difference by Material [g] For the ZHPA-00 (without ejector), weight shown above 12 g.

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D