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With head end lock D-M9 D-M9V D-M9W D-M9WV D-Z7 D-Z80 D-Y59 D-Y69 D-M9A D-M9AV D-A9 D-A9V D-Y7P D-Y7PV D-Y7W D-Y7WV D-Y7BA Auto switch Auto Switch Proper Mounting Position [mm] *1 D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model D-Z7/Z80 D-Y59/Y7P D-Y69/Y7PV D-Y7W D-Y7WV D-Y7BA *1 D-A9 D-A9V *3, *4 D-P3DWA *2 D-P4DW Bore size A B A B A B A B A B 20 9 38 5 34 4 33 25 9.5 38 5.5 34 4.5

Table of Contents

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

JXCx-OMT0023

H T E (Note)L d W D T Max.

-- NCM seies

D -With Built in Magnet (Not available as std. on single acting models, XB6 & XB7) I XBg -Low Friction I XCO -Stainless Steel Rod LNumber of Auto-swircnes -2 pcs. S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

Air Cylinder NCM Series Stainless Steel Cylinders

D -With Built in Magnet (Not available as std. on single acting models, XB6 & XB7) I XBg -Low Friction I XCO -Stainless Steel Rod LNumber of Auto-swircnes -2 pcs. S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

AR20-B to AR60-B

J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 73 Regulator Series

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

AW20-B to AW60-B

Option Note 4) D Note 7) N.O. (Normally open) Drain port is open when pressure is not applied.

AWM20 to AWM40

Note 7) Float type auto drain: The combination between C and D is not available. Note 8) Without a valve function Note 9) Metal bowl: The combination of 2 and 8 cannot be selected. Note 1) Drain guide is NPT1/8 (applicable to the AWM20, AWD20) and NPT1/4 (applicable to the AWM30 to AWM40, AWD30 to AWD40).

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Note 3) 1 Direct Operated Precision Regulator/Modular Style Series ARP20 to ARP40 Series ARP20K to ARP40K Direct Operated Precision Regulator with Backflow Function/Modular Style ARP40/ARP40K ARP30/ARP30K ARP20/ARP20K Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Nil R Flow direction d

(Digital Pressure Switch w/Unit Selection Function), D: D

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Flow direction: Left to right Flow direction: Right to left + Nil Y Knob e Downward facing knob Upward facing knob + Nil Z Note 5) ZA Note 6) Pressure unit f Name plate and pressure gauge in imperial units: MPa Name plate and pressure gauge in imperial units: psi Digital pressure switch: With unit conversion function Note 7) Note 7) Note 7) Note 8) Note 8) Note 8) Note 1) Options B, G, H