Micro Mechanical Valve Series VM1000

) 1 (P) (74.1) 3 port (A) 2 52 22 13 32 12 10 1 (P) 3 (R) 16 2 x 1/4 2 x 5.5 mounting hole 40 30 25 * 0.5 MPa supply F .O.F .* 52 N T.T. 6.5 mm 17 2/3 Port Mechanical Valve Series VM200 Series VM200 Push button (Flush) VM220-02-33A VM230-02-33A Panel mounting hole 38 23 T.T. 1.5 3 1.5 16.5 R port (3 port only) Max. 6 Symbol 2 port 22.1 (A) 2 (90.6) 12 10 (74.1) 1 (P) 52 3 port 22 13 (A)

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

With Mounting Bracket Axial foot style: CG1LN Axial Foot Style Stroke range (mm) 20 25 32 40 Bore size (mm) Z Y X W LZ LX LT LH LD LC M B Up to 125 47 52 53 63.5 7 7 8 8.5 15 15 16 16.5 10 10 10 10 44 49 58 71 32 36 44 54 3 3 3 3 20 22 25 30 6 6 7 7 4 4 4 4 3 3.5 3.5 4 34 38.5 45 54.5 Up to 200 Up to 200 Up to 200 LS 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Bore size (mm) 20 25

Rotary Actuator/Vane Type

3 o r !3 w !4 r w !5 !4 !1 !1 y u i D-M9m !6 Component Parts No. Description Material No.

High Vacuum Angle Valve

XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 50 123 48 1 12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Table of Contents

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

LX

3 0.5 3 3 3 N.O.

CXWM/CXWL

3, !4, !5.

Title not found

I e zz 1.38 (35) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 00) 0.67 (17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173)

Air Cylinder CP Series Cylinder Positioner Assembly

I e zz 1.38 (35) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 00) 0.67 (17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173)

MG

4 @1 w @4 !0 y !3 !5 @3 !0 !

C95

3 to !

ZR

2 2 Series ZR Large Size Vacuum Module: Ejector System/Vacuum Pump System Modular Components Introduction System Ejector System Vacuum Pump System 13-3-4 to 13-3-33 13-3-34 to 13-3-49 Component equipment Characteristics Ejector unit ZR1-W Nozzle dia.

Proposals for Energy Saving

8 @5 @3 w !6 !5 !1 !2 !0 Actuators !3 !

MGP

4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !

CNG

Bore size (mm) 20 25 32 40 P K KA M MM NA PG PH PL S LC LD LS LH LT LX LZ X Y W XA XB 141 (149) 117 (125) 24 7 5 6 3 M8 x 1.25 1/8 21.5 2 65 4 6 25 3 50 62 15 10 3 12 151 (159) 127 (135) 29 7 5.5 8 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6 28 3 57 70 15 10 3 12 154 (162) 128 (136) 35.5 8 5.5 10 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6.6 28 3 60 74 16 10 3 12 169 (178) 142 (151) 44 8.5 6 14 4 M14 x 1.5

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

0 @0 @1 @2 @3 r !6 !1 q y e t !7 !3 w !9 i u 125 80 to 125 (No flat washer for 125) 80 to 125 !5 !4 i o Replacement Parts/Seal Kit (Single rod) Component Parts Bore size (mm) Kit no. Contents No.

42

w AXT632-17-8 (M3 x 52) 2 q AXT632-17-11 (M3 x 87) 3 For manifold The individual EXH cannot be mounted on the top. w AXT632-17-8 (M3 x 52) 2 Valve + Restrictor (Top) (Bottom) + Individual SUP or Individual EXH (Top) (Bottom) Valve + SUP stop valve (Top) + Individual SUP, Individual EXH or Restrictor (Bottom) q AXT632-17-11 (M3 x 87) 3 For manifold w AXT632-17-8 (M3 x 52) 2 q w Valve + Double

REA/REB

V V 100 80 50 40 30 REAHT32 REAH(T)25 Load weight W (kg) 20 REAH20 10 REAH15 REAH10 1 0.5 100 200 300 Maximum speed U (mm/s) 10-2-52 52 Series REAH Model Selection 3 Selection Calculation The selection calculation finds the load factors (n) of the items below, where the total (n) does not exceed 1. n = 1 + 2 + 3 1 RE A B Load factor n 1 = W/Wmax

REA/REB

V V 100 80 50 40 30 REAHT32 REAH(T)25 Load weight W (kg) 20 REAH20 10 REAH15 REAH10 1 0.5 100 200 300 Maximum speed U (mm/s) 10-2-52 52 Series REAH Model Selection 3 Selection Calculation The selection calculation finds the load factors (n) of the items below, where the total (n) does not exceed 1. n = 1 + 2 + 3 1 RE A B Load factor n 1 = W/Wmax

MNB

] W SOL.C SOL.B SOL.A W SOL.C SOL.B SOL.A 9-6-3 4 Series MNB Specific Product Precautions 3 Be sure to read before handling.