Type: Smart Rotary Type, Pressure Gauge: 1.0 MPa, Accessories: Fork Lever-type Fitting S, External Scale Plate: w/External Scale Plate, LCD Window: None, Connection, Air - Electric: Rc1/4 - M20x1.5, ATEX Temperature: -

Type: Relay Device, Type: Smart rotary type, Specification: With Intrinsically safe explosion-proof (ATEX) + Output function + HART communication function, Pressure(MPa): 1.0, Fork lever type fitting: N/A, Lever unit: N/A, External scale plate: Available, Body cover with window for LCD: N/A, Air connection port: Rc1/4, Conduit connection port: M20 × 1.5, Explosion-proof structure: ATEX Directive

MXQ

thread depth 8 4 B A 3H9 depth 2.5 +0.025 0 12 7 7 6.5 6.5 3.2 3.2 10.5 5.5 10.5 5.5 A B H Section AA Section BB (NN 1) x H G (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 48 58 68 86 96 MXQ6L-10 MXQ6L-20 MXQ6L-30

CV/MVGQ

MQQ M RHC 3.

Vacuum Pad

61 68.5 14.3 15.1 15.5 16.6 44.5 52 61 68.5 14.3 15.1 15.5 16 .6 Lateral 8 8 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Vacuum Pad

61 68.5 14.3 15.1 15.5 16.6 44.5 52 61 68.5 14.3 15.1 15.5 16 .6 Lateral 8 8 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Vacuum Pad

61 68.5 14.3 15.1 15.5 16.6 44.5 52 61 68.5 14.3 15.1 15.5 16 .6 Lateral 8 8 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Floating Joint

JS20, 32, 40, 63 Center of sphere M M U U D J F B E G P A R H (mm) Max. thread depth P Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) Weight (kg) M A B C D E F G H J Model JS10-4-070 JS16-5-080 8.5 0.5 17 0.01 14.4 M4 x 0.7 9.5 12 4 7 4.7 80 4 1.5 26 12 0.5 23 19 0.02 M5 x 0.8 13.5 16 6 10 5.8 210 5 2 34.5 JS20-8-125 JS32-10-125 15.5 0.5 29.9

C76

: U 0.3 C 0.5 W W D 0.7 0.1 (100) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange

C76

Rod side trunnion: U 0.3 C 0.5 W W D 0.7 0.1 (100) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot

C95

50kg 63 selecta C95NDB63 or larger bore size. m from 0.4MPa Graph 3 F from 0.5MPa Graph 4 Load in direction of rod extension Load in direction of rod retraction m from 0.3MPa Graph 5 F from 0.4MPa Graph 6 m from 0.5MPa Graph 7 F 1.11-30 Series C95N Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 1000 1000 500 400 300 500 400 300 100 80 200 200 63 100 80 100 100 50 40 100 100

Stability of suction position,

Displacement NBR (N): Silicone rubber (S): Urethane rubber (U): FKM (F): Mark-free NBR (CL): ZP3E-32UM ZP3E-80UM 3 6 Displacement [mm] Displacement [mm] 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-100UM ZP3E-40UM 3 8 Displacement [mm] Displacement [mm] 6 2 N, S, U, F, CL N, S, U, F, CL 4 1 2

CQS

N With/Without auto switch A 45.5 45.5 55.5 59 F 7.5 7.5 9 11 B 32 32 41 44 L 13.5 13.5 14.5 15 A 25.5 25.5 34 37.5 B 22 22 29.5 32.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 19.5 22.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 6 8 10 12 M4 x 0.7 25 29 36 40 6 8 7 12 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M3 x 0.5 5 6 8 10 32 38 47 52 15.5 20 25.5 28 3.5 3.5 5.4 5.4 12 16 20 25 M4 x 0.7 M4

NCG/CG1

O knob M/O bolt M/O spring Stopper ring Note No.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 6-5-45 for details.

CQS

Long stroke Standard stroke Without auto switch With auto switch A Long stroke (mm) Standard stroke (mm) Bore (mm) C D E OA OB Q RA RB T H I K M N With/Without auto switch A L F 7.5 7.5 9 11 B 32 32 41 44 A L 3.5 3.5 4.5 5 B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 F 5 5 5.5 5.5 12 16 20 25 45.5 13.5 25.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 100 35 to 100 75 to 200 75 to 300 6 8 7 12

Proposals for Energy Saving

0.5 (2.9)m For EE (ZSE4E) Rc 1/2 G 1/2 1/2-14NPT 1/2-14NPTF Nil F N T NPN output Lead wire length 0.5 (2.9)m 27 26 67 Analog output Lead wire length 0.5 (2.9)m PNP output Lead wire length 0.5 (2.9)m Not required when none (Nil), vacuum adapter (GN) or vacuum pressure gauge (G) is specified for vacuum pressure sensor.

CNG

Load in direction of rod extension Load in direction of rod retraction m 0.3MPa Graph 5 F 0.4MPa Graph 6 m 0.5MPa Graph 7 F 19 Model Selection Series CNG Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 200 200 100 100 40 30 40 50 30 40 50 32 40 25 Load weight: m (kg) Load weight: m (kg) 20 20 20 32 10 10 25 20 5 4 3 5 4 3 2 2 1 1 100 500 400 300 200 100 0.5 500 400 300 200

Table of Contents

m/s 2 in X, Y, Z directions, 3 times each (De-energized) 3% F .S. or less 1000 VAC for 1 min.

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.