Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 r q e !2 !1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

ITV

Station 3 Station 4 Station 5 Station 6 Station 7 Station 8 Station 2 3 1/4 (1000, 2000) 3/8 (2000, 3000) 1 3 5 0.1 MPa 0.5 MPa 0.9 MPa Thread Type Nil N F Rc(PT) NPT NPTF Porting Protocol SEN SMB Ethernet I/P Modbus TCP Supply: 1/2 Out: 1/4 or 3/8 (per order) Thread Type: Rc, NPT NPTF (per order) Dimensions ETHERNET ITV ETHERNET ITV Length (mm) 52 (N-1) + 88 L PWR NS MS PWR NS MS E/P REGULATOR

Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

High Vacuum Angle Valve

Heater: Indicator: 12 XLF/XLFV Series Dimensions XLF: Air operated (b) C E E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11

4/5 Port Solenoid Valve

Please be sure to fill in the blank referring to back page 10. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P)

JA/JAH/JB/JS

52 52 56 56 70 80 80 88 116 19 25 25 30 30 30 38 38 47 58 58 69 89 1000 2000 2000 4400 4400 4400 9000 9000 14000 22000 22000 22000 55000 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 21

JA/JAH/JB/JS

52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152

Electric Grippers

2 !4 q u w e r t !7 Component Parts No.

C95

2 r!4 i yq !3t!8!1!7w !6ui e!5 !

Table of Contents

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

CQS

2, !3, !4.

Rotary Actuator/Vane Type

2 (Long shaft side) (Output shaft) CRQ2 e No.

Electric Actuator

Note 4) The number in brackets indicates when the direction of return to origin has changed. 200 280 6 2 206 300 380 8 3 306 400 480 10 4 406 ( ) 0.025 0 3H9 depth 3 4 x M5 x 0.8 thread depth 8.5 45 64 (102) LEFS25 Body mounting Note 1) reference plane 38 ( ) 0.025 0 3.5 50 3H9 depth 3 (L) Cable length y 250 (52) A (Table traveling distance) Note 2) 2 [4] 10 52 (115.5) (2.4) [Origin] Note

Floating Joint

2 2 3 30 42 42 52 52 52 56 56 70 80 80 88 116 8 9 9 13 13 13 15 15 18 24 24 24 42 19 25 25 30 30 30 38 38 47 58 58 69 89 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(A)4 2(B) (A)4 2(B) Number of solenoids Single 1 (P) (EA)5 3(EB) 1 (P) (EA)5 3(EB) Locked position 2(B) (A)4 2(B) (A)4 PUSH LOCK Double (EA)5 1 (P) 3(EB) (EA)51 (P) 3(EB) Caution When locking the manual override on the push-turn locking types (D, E), be sure to push the lock down before turning it.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

style: CG1FN Bore size (mm) Stroke range (mm) B E F FX FD FT H 20 25 32 40 Up to 125 6 5.5 28 2 12 40 35 Up to 200 7 5.5 32 2 14 44 40 Up to 200 7 6.6 38 2 18 53 40 Up to 200 8 6.6 46 2 25 61 50 End boss is machined on the flange for E.

CNG

Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 14 8 20 to 200 18 15.5 13 38 93 1/8 44 8 12 2 85 10 18 5.5 6 4 5 to 200 26 16.5 10 20 to 300 22 19.5 17 45 103 1/8 52.5 10 14 2 96 10 25 6.5 9 7 6 to 300 31 20 10 20 to 300 22 19.5 17 45 104 1/8 57.5 12 18 2 97 10 25 6.5 9 7 6 to 300 38 301 to 500 26 12 20 to 300 30 27 19 52 112 1/8 66 16 25 2 104 10 (

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

2 w t !1 !3 q u !0 !2 r y e !5 o !

MXQ

2 e !3 !5 MX MTS t !6 r u y w !

CQS

(2 color) D-F9PW 5.3-66 3 wire, PNP, In-line (2 color) D-F9BW 5.3-66 2 wire, In-line(2 color) Solid state switch D-F9NV 5.3-39 3 wire, NPN, Perpendicular D-F9PV 5.3-39 3 wire, Water resistant D-F9BV 5.3-39 2 wire, Perpendicular D-F9NWV 5.3-66 3 wire, NPN, Perpendicular(2 color) D-F9PWV 5.3-66 3 wire, Water resistant(2 color) D-F9BWV 5.3-66 2 wire, Perpendicular(2 color) D-F9BAL 2 wire, In-line