Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

S, W, X, Y , Z, T, J, K Size Allowable kinetic energy [J] Adjustable range of rotation time safe in operation [s/90] Without air cushion With air cushion* 30 0.01 0.12 -X7* Heat resistant (100C) S, W, X, Y , Z, T, J, K 0.2 to 1 50 0.05 0.98 0.2 to 2 63 0.12 1.50 0.2 to 3 80 0.16 2.00 0.2 to 4 100 0.54 2.90 0.2 to 5 Cushion angle 35 -X16 Fluororubber seal S, W, X, Y , Z, T, J, K * -X7: Not

Material: Super PFA High Purity Fluoropolymer Tubing TL/TIL Series

Fluoropolymer Fittings LQ series 0.5 0.19 0.09 0.04 2.0 400 290 0.7 0.26 0.12 0.05 2.8 220 160 1.0 0.43 0.20 0.08 4.6 95 60 1.0 0.62 0.28 0.12 6.7 60 30 1.0 0.73 0.34 0.14 7.9 35 20 20C 100C 200C 260C 1.0 0.62 0.28 0.12 6.7 25 20 1.0 0.92 0.42 0.17 9.9 10 6 1.0 0.59 0.27 0.11 6.4 20 12 0.6 0.24 0.11 0.05 2.6 220 160 0.7 0.27 0.12 0.05 2.9 130 110 0.9 0.33 0.15 0.06 3.6 100 65 1.0 0.43 0.20

Floating Joint: Standard Type JA Series

How to Order JA 40 F 14-150 Option Mounting type None Nil High temperature specifications 5 to 100C Basic type Flange type Foot type Nil F L Applicable bore size (mm) X11 Symbol Applicable bore size (mm) Model 6 10 15 20 30 40 63 80 100 140 160 6 10 10, 15 20 25, 32 40 50, 63 80 100 125, 140 160 Thread nominal size (Standard) Nominal thread size Applicable cylinder nominal thread size Standard

Filter Regulator IW Series

Thread type Nil Rc N NPT* * Semi-standard Suffix Low temperature (30 to 60C) High temperature* (10 to 100C) External parts copper-free Nil T V L V S V ST V V SL V V * With pressure gauge type: Max. 80C.

How to Order Series IP8000/8100 Electro-Pneumatic Positioner

to IEC Pub.529) Exterior covering enclosure Material Weight Cable gland with flame proof packing (Option) Aluminum diecast body / epoxy resin Part name Flame proof packing connector unit Part number P368010-32 P368010-33 Suited cable outer diameter 7.0 to 10.0 10.1 to 12.0 With terminal box 2.6kg (None 2.4kg) Note 1) 1/2 Sprit range (Standard) Note 2) Stroke adjustment: 0 to 60C, 0 to 100C

MHC2-6/MHCA2-6

MHK Symbol Specifications/Description MHS -X4 -X5 -X53 -X56 -X63 -X64 -X65 -X79 Heat resistance (100C) MHC Fluororubber seal EPDM seal/Fluorine grease MHT Axial piping type Fluorine grease MHY Finger: Side Tapped Mounting Finger: Through-hole mounting MHW Grease for food -X MRHQ MA D623

MHL2

MHY MHW Symbol Specifications/Description -X4 Heat resistance (100C) -X Precautions -X5 Fluororubber seal -X28 With adjuster bolts for adjusting closing width MRHQ -X50 Without magnet Be sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions and pages 358 to 365 for Air Gripper and Auto Switch Precautions.

How to Order ø 6, ø 8, ø 12, ø 16, ø 20, ø 25 MXQ  A Series Air Slide Table Double-ported Type

-X12 Long adjustment bolt (20 mm longer adjustment range) -X28 Long adjustment nut and bolt -X33 Without built-in auto switch magnet -X39 Fluororubber seal -X42 Anti-corrosive guide unit -X45 EPDM seal -X580 Low-speed specification (15 to 50 mm/s) -X2128 Heat-resistant specification (10 to 100C) -X2192 Dual stroke specification -X2202 Extension stroke end adjuster fixed from the axial direction

MIW/MIS

type/MIS (mm) 62 10 MIS8-10D Bore size Stroke 2 3 80 20 MIS8-20D 8 12 20 25 32 10, 20 mm 10, 20, 30 mm 130 10 MIS12-10D 10, 20, 30 mm 3 5 160 20 MIS12-20D 30, 50 mm 190 30 MIS12-30D 30, 50 mm 300 10 MIS20-10D MIS D5 15 355 20 MIS20-20D Made to Order (For detailes, refer to page 2020.) 30 410 MIS20-30D -X Symbol Specifications 30 800 MIS25-30D 10 15 -X4 -X5 -X63 -X79 Heat resistant (-10 to 100C

Wide Type Parallel Style Air Gripper ø 10, ø 16, ø 20, ø 25 MHL2 Series

Symbol Specications -X4 Heat resistant (10 to 100C) -X5 Fluororubber seal L1 -X28 With bolt for adjusting the closing width L2 -X50 Without magnet -X53 Ethylene propylene rubber seal (EPDM) -X63 Fluorine grease -X79 Grease for food processing machines: Fluorine grease -X79A Grease for food processing machines: Aluminum complex soap base grease -X85 Fine-particle proof specication Specic Product

Parallel Style Air Gripper/2-Finger Type Series MHS2 ø16, ø20, ø25, ø32, ø40, ø50, ø63 How to Order Bore size 20 MHS2 D M9BW ø16 to ø25 Number of fingers Number of auto switches 2 Nil 2 pcs. 2 fingers Auto switch Bore size S 1 pc. Nil Without auto switch

Symbol Specifications/Description MHR -X4 -X5 -X50 -X53 -X56 -X63 -X79 Heat resistance (100C) Auto switch installation examples and mounting positions Auto switch hysteresis Auto switch mounting Protrusion of auto switch from edge of body Fluororubber seal MHK Without magnet MHS EPDM seal/Fluorine grease Axial ported MHC Fluorine grease Grease for food MHT MHY MHW -X MRHQ MA D545

MHZA2-6/MHZAJ2-6

MHC Symbol Specifications/Description Heat resistance (100C) Fluororubber seal Opening direction spring assist EPDM seal/Fluorine grease Axial ported type Fluorine grease Finger: Side tapped mounting Finger: Through-hole mounting Dust cover adhesion Dust cover adhesion (Finger part only) Dust cover caulking Dust cover caulking (Finger part only) Grease for food -X4 -X5 -X12 -X53 -X56 -X63

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

t Auto switch type Symbol Temperature Heater Nil 5 to 60C Symbol Model Remarks Nil Without auto switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C

High purity chemical valve, 3 port, Operating pressure: 0 ~ 0.5 MPa , Fluid temperature: 0 to 100C , Port sizes: 1/4, Threads: Rc, NPT, FLUOROPOLYMER, VALVE, VALVE, FLUOROPOLYMER VALVES and REG, 2I, FLUOROPOLYMER, 0.44268 lb

High purity chemical valve, single type, Threaded ports, air operated type, Operating pressure: 0.3 ~ 0.5 MPa, Fluid temperature: 0 to 100C, Port sizes: 1/8, 1/4, 3/8, 1/2, 3/4, 1, FLUOROPOLYMER, VALVE, VALVE, FLUOROPOLYMER VALVES and REG, 2I, FLUOROPOLYMER, 0.44092 lb

This is a legacy product, and replaced byCP96SDB63-100C, CYL, PROFILE, ISO, ACTUATOR, C95/C96 TIE-ROD CYLINDER, PE, 63MM C95/CP95 DBL-ACT AUTO-SW, 5.63404 lb

This is a legacy product, and replaced byCP96SDB32-100C, CYL, PROFILE, ISO, ACTUATOR, C95/C96 TIE-ROD CYLINDER, LE, 32MM C95/CP95 DBL-ACT AUTO-SW, 2.00867 lb

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

2.02 3.39 4.88 10.85 Double clevis 0.63 0.96 1.54 2.13 3.60 5.26 10.95 Center trunnion 0.71 1.10 1.73 2.48 4.25 5.95 9.68 Adjustable position trunnion 0.71 1.10 1.73 2.48 4.25 5.95 9.68 Additional weight per 50 mm of stroke All mounting brackets 0.11 0.16 0.24 0.26 0.40 0.44 0.71 Accessories Rod end 0.07 0.11 0.22 0.40 1.20 Rod clevis 0.09 0.15 0.34 0.69 1.84 Calculation: Example) C96SD40-100C

LVQ

Compatibility is indicated for fluid temperatures of 100C or less. The material and fluid compatibility check list provides reference values as a guide only, therefore we do not guarantee the application to our product. The data above is based on the information presented by the material manufacturers.

High purity chemical valve, 3 port, Operating pressure: 0 ~ 0.5 MPa , Fluid temperature: 0 to 100C , Port sizes: 1/4, Threads: Rc, NPT, FLUOROPOLYMER, VALVE, VALVE, FLUOROPOLYMER VALVES and REG, 2I, FLUOROPOLYMER, 0.43737 lb