SZ3000

Type of actuation Plug Plug (A) 4 (B) (2) (A) (4) (B) 2 Single Number of solenoids Common connector assembly SX100-40-4S 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Common connector assembly (With common lead wire) SX100-40-4S Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Double SS5Z3-60-04D1 set SZ3160-5MO2 sets SZ3260-5MO2 sets SX100-40-4S1 set (with common Lead wire for single solenoid) SX100-42-4S1

5 Port Air Operated Valve SYA3000/5000/7000 Series

48 SYA320-C4 One-touch M5 x 0.8 M5 x 0.8 0.63 0.16 0.42 [0.41] 0.34 [0.37] 0.35 0.11 [0.11] 3 position fitting for 4 0.76 [0.46] 0.21 [0.12] 0.59 0.29 0.42 [0.34] 0.15 40 42 Single Double 2 position 0.76 0.19 0.65 0.39 0.30 0.17 0.76 0.24 0.60 0.33 0.55 0.16 Closed center Exhaust center Pressure center C6 44 SYA320-C6 One-touch 0.65 0.16 0.64 [0.42] 0.31 [0.36] 0.32 0.17 [0.11] 3 position

VZ100/300/500

0.8 1/8 F G 20 20 stations A port M5 x 0.8, 1/8 N NPT Z NPTE Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port. 40-1 How to Order Applicable solenoid valve VZ314VZ314MVZ324VZ324MApplicable blanking plate assembly DXT200-8-3A VV3Z3 40 05 1 C6 R port P/R port Thread type Stations A port side P port M5 01 C4 C6 B3 B7 2 stations 02 M5

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R

Table of Contents

60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics,

10

40 Note 1) Order two foots per cylinder.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

, M5 60.3 C3: One-touch fittings for 3.2 Manual override C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (C3,C4,C6) 47.5 9.5 (M5) 26.5 25.5 5.4 18.5 5 23.2 Mounting holes 10 (47.5) 3-M5 X 0.8 P, R port 9.9 9.9 5 1 3 2-PE port 22.2 Die cast hole For manifold gasket positioning L plug connector (L): VQZ122 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ122 wMwC3, C4

LEY-OM007

40 20.00 50mm 40mm 60 40% 60% 40 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 No.1 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 1 ABS 250 0.00 0 0 0.50 0mm 20mm 20 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 1 ABS 250 20.00 0 0 0.50 (6) 4.3 []P21~P29 ACT Contoroller Help/Easy 1.3. 1 -6- (2) JOG SET MENU TEST DATA MONITOR JOG SET JOG JOG ALARM JOG SETTING

Membrane air dryer, copper and zinc free series 25A-IDG is available in a single unit. 25A-IDG is suitable for use in secondary battery manufacturing applications with a dew point of -40°F (-40°C). Membrane air dryer series; Single unit style; 5 sizes available; Port sizes: Rc1/4", Rc3/8", Rc1/2"; Series 25A-IDG is compatible with secondary batteries application

Membrane air dryer, copper and zinc free series 25A-IDG is available in a single unit. 25A-IDG is suitable for use in secondary battery manufacturing applications with a dew point of -40°F (-40°C). Membrane air dryer series; Single unit style; 5 sizes available; Port sizes: Rc1/4", Rc3/8", Rc1/2"; Series 25A-IDG is compatible with secondary batteries application

240

40 40 0 0.2 0.4 0.6 0.8 1 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Horizontal/Bottom 160 160 160 160 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 120 120 120 120 Me m Y 80 80 80 80 40 40 40 40 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1

modular-press-e

Replacement Procedure is P.437 Construction AWG20 AWG30/40 Actuators Modular F.R.L.

Modular F.R.L. Pressure Control Equipment

Replacement Procedure is P.437 Construction AWG20 AWG30/40 Actuators Modular F.R.L.

PF-OMN0009_C

N M8 M8 R / ZS-40-K PF3W504/520 4 3X8 ZS-40-L PF3W540 4 3X8 ZS-40-M PF3W511 4 4X10 M8 ZS-40-A 3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -13No.PF-OMN0009CN-F FLOW POWER (OUT ) M8 1 DC+ (4 ) () 2 NC/ () () 3 DC() 4 (IN ) () M8 IN OUT POWER FLOW POWER FLOW -14No.PF-OMN0009CN-F

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VA 48 SYA320-C4 One-touch M5 x 0.8 M5 x 0.8 0.35 0.16 0.42 (0.41) 0.34 (0.37) 0.63 0.11 (0.11) 3 position fitting for 4 VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.76 (0.46) 0.42 (0.34) 0.21 (0.12) 0.59 0.29 0.15 40 42 Single Double 2 position VR 0.30 0.19

VZS

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2

Air cylinder (Series compatible with secondary batteries)

trunnion (Different surfaces and same surfaces) 15 80 85 90 75 1 D-A9-900 75 40 (n 4 85 40 (n 4 80 40 (n 4 90 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) (Different surfaces and same surfaces) 15 80 85 90 95 D-M9-900 1 D-M9W-900 80 40 (n 4 90 40 (n 4 85 40 (n 4 95 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8

Modular F.R.L. Units

-A, AFD30-A/40-A).

Electromagnetic Digital Flow Switch

Power supply/output connection lead wire ZS-40-W Lead wire length 2 m Sensor connector (e-con) ZS-28-C-5 1 pc. Lead wire with connector for copying ZS-40-Y Connect up to 10 slave units 10 LFE0 Series For the flow switch precautions, refer to the Operation Manual on the SMC website.