Aluminum High Vacuum Angle Valve Rc1/8 Pilot port size XLAV M5: Port 1(P), Port 3(R) Rc1/8: Port 1(P), M5: Port 3(R) XLA 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 Weight (kg) XLAV 0.29 0.49 1.14 1.64 2.96 5.06 10.7 18.6 Note 1) Conductance is the value for an elbow with the same dimensions.
P.1.10-140 P.1.10-144 VFS C C3 (3.2) C4 (4) M5 (M5 thread) VS C6 (6) kit VS7 N1 (1/8) N3 (5/32) N7 (1/4)
Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8
B Counter bore depth C CB HA 2-P (piping port) 4-J x E (depth) HT 2 x 4-MM thread depth M T T Y HP L TC F X WP GW QW PW GP D 4-LD W K WS With switch rail Plug HS G Q + Stroke CR HR Z + Stroke (Area E) for CY1RG25, 32, 40, 50, 63 2-P (piping port) 22 8 14 12.5 19.5 13 30 Plug 2-P (piping port) 12.5 CY1RG10 CY1RG15 (mm) CB CR B C D G GP GW H HA HB HC HP HR HS HT J x E K F Model CY1RG10 2 0.5
4-OA 4-OB counter bore depth OL XX section XX section L Through 4-NN WA Z X0.02 X0.02 DA DB VB VA R U X T H PW 2-P XAH7 6 depth XAH7 depth 6 GA PB Q 2-P (Plug) PA+Stroke GB J K S FB FA C+Stroke B+Stroke E A+Stroke G MGPM, MGPL/Common Dimensions Bore (mm) Standard stroke (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q 25, 50, 75,1 00 71 58 11 8 8.5 9 M5 X 0.8 12 13 15
P) IDG3/5 IDG3H/5H IDG10/20 IDG10H/20H Option specifications With fitting for purge air discharge (Option: P) i t t Plug } IN OUT OUT IN q o q Plug y Purge air for dehumidification u Plug u Purge r Purge Purge air for dehumidification Component Parts Material Description No.
12.5 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8
(Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.
T PW DB GC XAH7 depth XL XAH7 depth XL 2-P PB GB GA 2-P Q J K (Plug) PA + Stroke S G FA FB C + Stroke Refer to "Manufacture of Intermediate Strokes" on page 2 for intermediate strokes other than the standard strokes.
(Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L1 = 5. Q2 = M 6.
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VQ0 (VV5Q04)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ1000 (VV5Q14)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ2000 (VV5Q24)-Plug Lead Unit, Flip Type (F, P, T, S kit) .
Unit AC10B to 60B Dimensions A AC10B, 20B Pressure gauge port size F P E K Q N B C G G OUT IN T T K H Pressure gauge (Option) J L Square embedded type pressure gauge (Option) Port size M Min. clearance for maintenance Regulator Air filter Drain D AC25B, 30B, 40B, 50B, 55B, 60B A Pressure gauge port size F P E K N Q G G B C IN OUT K Pressure gauge (Option) J L Square embedded type pressure
MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q CV 16 20 25 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 40 10 19 16 78 1.5 62 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 37.5 10.5 25 18 25, 50, 75, 100, 125, 150
(Example) For M4: L2 = 8 Applicable shaft types: J, K, T Q1 = M L2 + (3 x P) L2 + (3 x P) L2 = L1 + (3 x P) L1 = Q2 = M Q2 = M L2 = [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Symbol: A35 Symbol: A36 Symbol: A37
(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,
r J tt r'T q;i];".0* 3:Common exhaust for main and t l pilot valve + . t i ,{:| P oonr PE oofts ([he pilot exhaust is connedeq to the main exhaust For type 31,531,32, S32 manitold. M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.
r J tt r'T q;i];".0* 3:Common exhaust for main and t l pilot valve + . t i ,{:| P oonr PE oofts ([he pilot exhaust is connedeq to the main exhaust For type 31,531,32, S32 manitold. M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.
r J tt r'T q;i];".0* 3:Common exhaust for main and t l pilot valve + . t i ,{:| P oonr PE oofts ([he pilot exhaust is connedeq to the main exhaust For type 31,531,32, S32 manitold. M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K