3 Port Solenoid Valve/

Thread Rc G NPT Nil None V V V A Yes 8 V B 5/16" V Port size 06 3/4" 10 1" * For internal pilot, the symbol is nil. * Refer to Piping for External Pilot Type on page 20 for selection of the check valve. Made to Order Series Compatible with Secondary Batteries 1 For details about 25A-, refer to the WEB catalog Series Compatible with Secondary Batteries/Series 25A-.

Steam Valve

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 3 25 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 50 7 2B Flange 634 Steam Valve: 2 Port Valve For SteamVND Series Model Port size Flow rate characteristics Weight (kg) Orifice dia.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Bore size (mm) 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

SFOD-OMT0009CN

-COM4 20 1) 9 N.C. -COM4 39 1) 29 N.C.

JXCx-OMT0001CN

1100 1200 1000 1100 1200 mm/s 500 500 410 340 250 200 170 [mm/s] () 30 20 10 [mm/s] () 49 33 17 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 mm/s 400 200 400 200 400 200 [mm/s] () 20 10 20 10 20 10 [mm/s] () 25 13 27 14 30 15 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 mm/s 300 250 150 350 250 200 [mm/s] () 20 10 20 10 [mm/s] () 25 13 27 14 -109No.JXC-OMT0001CN-C

VQ7-6/7-8

)(B port) 16(20)(A port) 16(20)(B port) 16(20)(A port) Manual override Manual override A B PB A B PB 75(86) 62(72) 75(86) 62(72) 50 38 38 50 B B PA R1 R2 P Indicator light PA Indicator light R1 R2 P 49(64) 49(64) Mounting hole 2-6.5 Mounting hole 2-6.5 49(64) 49(64) G1/2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 153(166) 153(166) 141(154) 108.5(121.5) 141(154) 108.5(121.5) 50(63) 50(63) 5 3 38

VQ7-6/7-8

1/2, 3/4 R1, R2 port 2-3/8, 1/2, 3/4 X(PE) port 1/8 P port 30(42) 30(42) 10 (11) A, B port ( ): 3/4 2 position double : VQ7-8-FG-D double (Reverse pressure): VQ7-8-YZ-D 3 position closed center : VQ7-8-FHG-D exhaust center : VQ7-8-FJG-D pressure center: VQ7-8-FIG-D 180.5 175.5 175.5 82.5 93 98 93 82.5 56(71) 56(71) 56(71) 56(71) 16(20)(B port) 16(20)(A port) 16(20)(B port) 16(20)(A port)

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40 Refer to page 38 for model selection. How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

Plug-in/Plug Lead: Single Unit

-1 (Plug-in type) VVQ5000-25A-5 (Plug lead type) Specifications Handling Precautions Intermediate stop Drop prevention VVQ5000-25A1 5 Double check spacer part no.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

Lead wire length symbols: 0.5 m Nil (Example) M9N 1 m M (Example) M9NM 3 m L (Example) M9NL 5 m Z (Example) M9NZ Note) When using the 2-color indicator type, please make the setting so that the indicator is lit in red to ensure the detection at the proper position of the air gripper. 530 MHR3/MDHR3 Series Rotary Actuated Air Gripper 3-Finger Type Model/Specifications Nominal size 15 10 Action

This is a legacy product, and replaced byCY1SG15-210BZ-M9NL, CYL, RODLESS, SLIDER, SW CAP, ACTUATOR, CY1S GUIDED CYLINDER, GM, 15MM CY1S SLIDE BEARING, 3.41844 lb

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Example) -M9NL Symbol Nil A B C Mounting position Valve open/closed Valve open Valve closed Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

CRJ

Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) F9NWZ 11-6-5

MHC2-6/MHCA2-6

Applicable load Pre-wired connector Type Special function Electrical entry 5 (Z) DC AC In-line Perpendicular M9NV M9PV M9BV M9N M9P M9B 3-wire (NPN) 3-wire (PNP) 2-wire 5 V, 12 V Solid state switch IC circuit Relay, PLC 24 V 12 V Grommet Yes Lead wire length symbols: Auto switches marked with are made to order specification. 0.5 m Nil (Example) M9N 1 m M (Example) M9NM 3 m L (Example) M9NL

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

-M9NL Du Seal material and its changed part XSA Sealmaterial Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM)

This is a legacy product, and replaced byD-M9NL

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M