Body Size: 40, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 06 (3/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: [NPT] NPT, Supply Side, Connection Diameter: 3/4, Flow Direction: [Right] From Left to Right, Control Side Connection Type: [NPT]

VNC

Locking slotted type 3 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 4 7 1 5 6 24 VDC 12 VDC 7 240 VAC 50/60 Hz 15 (11) 2 Nil: Non-locking push type 9 Other 20 (14) 3 Option 25 (16) 4 Valve size 2 to 9 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F 40A 1 1 2 40 (28) 6 1 B 1 2 Flange 40F Electrical entry/With light/surge voltage suppressor 50A Nil Air operated 2 50 (33) 7 GS Grommet with surge

Process Valve Series VNA

Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111 -10A Operating fluid pressure Fluid (Main piping) Operation Operating fluid temperature 0 to 3.5 MPa Coolant Note 2) 0 to 7.0 MPa External pilot solenoid/Air operated 5 to 60C Note 1)/5 to 60C Note 1) (

Table of Contents

24 Series MGZR Double Power Cylinder (Without non-rotating mechanism) Double Clevis Bracket DX B Z + Stroke DB DD 4-DT B DS DH MX MTS 4-DR DA DU DU DL DC DE DO DO MY Bore size (mm) 22 22 30 30 45 45 60 CY DX DS DH Z DDH10 DC DT DU DR DO DL DE B DA DB Model 20 25 32 40 50 63 80 14 14 20 20 30 30 32 7 7 8 8 10 10 14 44 44 60 60 86 86 110 15 15 18 18 22 22 24 10 10 11.5 11.5 14 14 15 6.6 6.6

3 Port Solenoid Valve/

Thread Rc G NPT Nil None Port size 06 3/4" 10 1" A Yes 8 B 5/16" For internal pilot, the symbol is nil. Refer to Piping for External Pilot Type on page 20 for selection of the check valve. Made to Order Series Compatible with Secondary Batteries 1 For details about 25A-, refer to the WEB catalog Series Compatible with Secondary Batteries/Series 25A-.

3 Port Solenoid Valve/

Thread Rc G NPT Nil None V V V A Yes 8 V B 5/16" V Port size 06 3/4" 10 1" * For internal pilot, the symbol is nil. * Refer to Piping for External Pilot Type on page 20 for selection of the check valve. Made to Order Series Compatible with Secondary Batteries 1 For details about 25A-, refer to the WEB catalog Series Compatible with Secondary Batteries/Series 25A-.

VQ7-6/7-8

P reduced pressure A reduced pressure B reduced pressure ARB350-00-P ARB350-00-A ARB350-00-B A B A B 27 Series VQ7-8 Manifold Options Interface regulator Main EXH back pressure check plate P A B ARB350-00AXT512-25A Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 SMC SMC 238.5 (208) 221 226.5 (196) 209 193.5 181.5 135.5 (105) 118 PA B PE PE P 90.5

Dual Rod Cylinder Series CXSJ/CXS

ZZ Z Part no.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

bolt) (Hexagon nut) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com V (Opposite side: Same) 4-M5 x 0.8 thread depth 4.5 (L) (Z) (Piping port) (Opposite side: Same) 5 QQ C Q R 8 (I) (L) (Z) U N (G) NN (mm) A B C D E F G H I J L Y M N NN P Q QQ R U V X Model 2-3.4

Process Pump

B Control unit Diaphragm B Diaphragm A 1.

3

F C37 1/2 15 G Stainless steel B 100 VAC Grommet With surge voltage suppressor C 110 VAC 5 20A N.C. H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

AR10-A: Rc1/16
AR20-A to AR40-A, AR20(K)-B to AR60(K)-B, and AR20(K)-D to AR40(K)-D: Rc1/8
Old AR10: Rc1/16
Old AR20(K) to AR30(K): Rc1/8
Old AR40(K) to AR60(K): Rc1/4
Old AR1000: Rc1/16
Old AR2000 to AR3000: Rc1/8
Old AR4000 to AR6000: Rc1/4

The refreshed AR series with 2 digits and an “A” suffix (AR40-□□-A) was released in April 2012. The refreshed AR series with 2 digits and a “B” suffix (AR40-□□-B) was released in May 2012. And the new design AR series with 2 digits and a “D” suffix (AR40-□□-D) was released in October 2019.

AR10-A: Rc1/16
AR20-A to AR40-A, AR20(K)-B to AR60(K)-B, and AR20(K)-D to AR40(K)-D: Rc1/8
Old AR10: Rc1/16
Old AR20(K) to AR30(K): Rc1/8
Old AR40(K) to AR60(K): Rc1/4
Old AR1000: Rc1/16
Old AR2000 to AR3000: Rc1/8
Old AR4000 to AR6000: Rc1/4

VNB

C.O. 1 2 1 4.1 4.2 Normally closed Normally open Double acting VNB0 VNB02 VNB03 VN 1 4 7.7 7.8 40 12 (P1) 12 (P1) 10 (P2) LVC 6.3 6.4 2 Air operated LVA 2 (B) 1 (A) 2 (B) 1 (A) 2 (B) 1 (A) 11.4 11.5 50 10 (P2) Note) The flange should be JIS B 2210 10K (ordinary style) or its equivalent.

Pneumatic Purification

(N10), 3/4 NPT (N06) Model NAD402-N04 (N04 = 1/2 NPT) Minimum operating pressure 22psi. Maximum operating pressure 145psi.

VNH

240 VAC 50/60 Hz 9 Other Option Accessory Function plate (D sealing, with thread): DXT060-32-4A 17-4-32 3 Series VNH High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Specifications 3 port valve 2 port valve A B Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111

Membrane Air Dryer

Specifications 1) Units type (Unit M, Unit V) Model Specifications IDG30AM4 IDG50AM4 IDG30HAM4 IDG50HAM4 IDG30LAM4 IDG50LAM4 IDG30AV4 IDG50AV4 IDG30HAV4 IDG50HAV4 IDG30LAV4 IDG50LAV4 AFM40-A AFD40-A Mist separator Micro mist separator AR40-B Regulator (Type V only) Component equipment Spacer Y400(T)-A Compressed Air 0.31.0 Fluid Range of operating conditions Inlet air pressure MPa -550 Inlet