Series AK1000 Hastelloy C-22 Hastelloy C-22 PCTFE 80 0.55 316 SS PCTFE (Option: Vespel) 70 0.48 Delivery pressure (MPa) Delivery pressure (psig) 60 0.41 Dimensions inch (mm) 50 0.34 AK1400T 40 0.28 30 0.21 2.12 (53.8) 20 0.14 10 0.07 Max. 5.6 (142.2) Max. 6.0 (152.4) (When selecting option code P or BP) 0 0.00 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) AK1400T 80 psig (0.55 MPa) Inlet pressure
LEC-MR-RB-032 LEC-MR-RB-032 LEC-MR-RB-032 LEC-MR-RB-032 A1 A2 B1 B2 22 Series LJ1H10 Dimensions/LJ1H10NH 10 6 Work piece mounting reference plane 80 5H10 depth 8 8 x M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane Z section detail 5H10 depth 6 100 60 50 Z section (43) Stroke + 125 (table movement range) 232 3.3 30 90 83 A section 5.8 1.7 4.8 80 Stroke + 400 A
, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)
, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)
200 1200 0 800 1200 400 1600 Inlet air flow rate (L/min [ANR]) Inlet air flow rate (L/min [ANR]) Standard dew point40oC [Symbol: L], 60oC [Symbol: S] IDG30LA IDG50LA P1 = 0.3 MPa 0.08 P1 = 0.3 MPa 0.03 Pressure drop (MPa) Pressure drop (MPa) 0.06 P1 = 0.5 MPa P1 = 0.5 MPa 0.02 0.04 P1 = 0.7 MPa 0.01 P1 = 0.7 MPa 0.02 0 100 200 300 400 500 0 200 400 600 800 Inlet air flow rate (L/min [ANR
Stroke length tolerance 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed +1.4 0 Mounting Basic/Axial foot/Flange 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Refer to page 889 for the applicable auto switch list.
Thread type Nil Rc G F N NPT Dimensions NPTF T Applicable fitting d Model A L D Gasket KQ2P-04 16 32 6 4 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 Series Round head combination screw Gasket 22 16 18 20.5 22 12 6 8.5 10 11.5 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 10 5/32" 1/4" 5/16" 3/8" 43 32 35 39 43 Caution SX3000 SX3000-22-2 (M2 x 24) M3 x 30 (Matt nickel plated) M4 x 35 (Matt nickel plated
(Valve) DXT199-22-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
/Program No. selection 3 PI1 Program input 1 5 22 5.
W) AC servo motor (100/200/400 W) AC servo motor (100/200/400 W) AC servo motor (100/200/400 W) Features 12 Series Variations Electric Rotary Table Series LER Max. speed [/s] Positioning repeatability [] Controller /Driver series Rotating torque [Nm] Reference page Type Basic High torque Basic High torque Basic High torque LER10 0.2 0.3 Series LECP6 280 420 0.05 (End: 0.01) Series LECP1
B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.
160, 200, 250, 320, 400, 500 2900 125 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 CA1 2900 160 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Intermediate strokes are available.
Rod type / LEY Series 2.1 Specification LEY63 (Top/Parallel) LEY32 LEY32D Model LEY25 (Top/Parallel) / LEY25D(in-line) (Top/Parallel) (in-line) LEY63D (in-line) 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 100, 200, 300, 400, 500, 600, 250, 250, 250, Stroke[mm] 700, 800 300, 350, 400, 500 300, 350, 400, 500 300, 350, 400 Horizontal Note 1) 18 50 50 30 60 60 30 60 60
) Lead 10 (LEPY10LJ) 0.5 1 0 400 300 0 100 Speed [mm/s] 0 400 300 0 100 Speed [mm/s] 200 200 LEPY10 (Motor size: Basic) Horizontal Vertical 7 3 Lead 5 (LEPY10K) 6 2.5 5 2 Work load [kg] Work load [kg] 4 Lead 5 (LEPY10K) 1.5 3 1 2 Lead 10 (LEPY10J) Lead 10 (LEPY10J) 0.5 1 0 400 300 0 100 Speed [mm/s] 0 400 300 0 100 Speed [mm/s] 200 200 Note) The maximum value of the work load for the positioning
, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 20100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 Data 2 axes 1500 32 Note) Please contact SMC if it is used by exceeding the maximum stroke length.
] 94.2 86.8 80.3 22 22 22 22 64.3 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5 3.2 3.2 3.2 3.2 11.5 11.5 11.5 11.5 12 12 12 12 25.5 25.5 25.5 25.5 Refer to page 1-5-79 for dimentions with connector cable. 1-5-58 59 5 Port Solenoid Valve Rubber Seal Series SYJ7000 2 Position Double [ ]: AC G H 01 02 Grommet (G), (H): SYJ724022 12 SV SZ SY G: Approx. 300 H: Approx. 600 (Lead wire length) 63
175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #4-40UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-
mm/s, 21-/22-: 50 to 400 mm/s Stroke length tolerance Piston speed 0 +1.4 Up to 300st mm Basic style / Axial foot style / Rod side flange style / Head side flange style Mounting style Grease 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease Particle generation grade (Refer to front matter pages 13 to 22 for details.) 10-: Grade 2, 21-: Grade 3 11-/22-: Grade 1 34 CG1 2122CG1/ 1011Air
18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/4 73 135 67 Up to 400 35 32 75 27 58 18 38 6 11 51 11 M8 x 1.25 7 16 11 M18 x 1.5 22 1/4 73 135 80 Up to 500 40 37 88 32 69 22 45 12 13 62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25 7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87