70astamb1

Foot, Flange, Single clevis: Body mounting bolt Double clevis: Clevis pin & Cotter pin Refer to page 6-7-11. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Piston area (mm2) Bore size (mm) Piston area (mm2) Bore size (mm) 63 32 63 675 2804 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 80 40 80 1082 4568 50 100 1651 7223 25, 50, 75

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Quantity Quantity Stroke Stroke 100 2 4 600 7 14 200 3 6 700 8 16 A = (n 1) x pitch 36 300 4 8 800 9 18 400 5 10 900 10 20 500 6 12 1000 11 22 93 Series LTF Deflection Data Deflection Data Calculated values based on the bodys sectional secondary moment.

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

MB1

(Refer to Rod boot/Air cushion on page 11.)

CNG

l 0.25 ZZ H e f h ZZ 20 25 32 40 M5 x 0.8 21.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 2 65 141 (149) 11 3 12 35 30 16 55 198 (206) 11 178 (186) M6 x 0.75 26.5 5.5 8 M10 x 1.25 29 1/8 2.5 73 151 (159) 11 3 12 40 30 17 62 215 (223) M5 x 0.8 depth 7.5 11 193 (201) Stroke x M8 x 1.0 26.5 5.5 10 M10 x 1.25 35.5 1/8 2.5 73 154 (162) 11 3 12 40 35 17 62 218 (226) M5 x 0.8 depth 8 10 (11) 196 (204

Cylinder with Lock Series CNG

l 0.25 ZZ H e f h ZZ 20 25 32 40 21.5 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 2 65 141 (149) 11 3 12 35 30 16 55 198 (206) 11 178 (186) 26.5 M6 x 0.75 5.5 8 M10 x 1.25 29 1/8 2.5 73 151 (159) 11 3 12 40 30 17 62 215 (223) M5 x 0.8 depth 7.5 11 193 (201) Stroke x 26.5 M8 x 1.0 5.5 10 M10 x 1.25 35.5 1/8 2.5 73 154 (162) 11 3 12 40 35 17 62 218 (226) M5 x 0.8 depth 8 10 (11) 196 (204

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

"Sl module must be orderd separately "11 11 stations Includes 1 station 10 mount Sl unit.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note) Refer to the Specific Product Precautions 2 on page 274. 242 D-sub Connector 10-SV Manifold Electrical Wiring 10F/16F D-sub connector type (25 pins) 13 Common Common 25 12 Station 11 SOL.b SOL.a 11 24 Station 2 SOL.b 15 SOL.a 2 Station 1 SOL.b 14 SOL.a 1 This circuit is for the double wiring specification with up to 11 stations.

Series IDG

800 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet air flow rate l/min (ANR) Outlet air flow

Basic Type/Direct Mount Type

400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 12 13 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 Distance from cylinder shaft center Lo (cm) 1464 Model Selection CY3B/CY3R Series

Thermo-con/Rack Mount Type

Heat generation amount: 400 W Cooling capacity = Considering a safety factor of 20%, 400 W x 1.2 = 480 W Thermo-con/HEC Series High-precision temperature control type for semiconductor manufacturing equipment, medical equipment, etc.

JXCx-OMT0023

11 11.

CM2

SCM220A, #11, #3 SCM220A, #11, #3, #19 CM2L25SCM225A, #11 SCM225A, #11, #3 SCM225A, #11, #3, #19 CM2L32SCM232A, #11 SCM232A, #11, #3 SCM232A, #11, #3, #19 CM2L40SCM240A, #11 SCM240A, #11, #3 SCM240A, #11, #3, #19 1.4-40 Series CM2 Front Flange (F) CM2F Bore size Stroke S T (mm) Bore N NA NN P E B2 C2 D H2 I A F K AL FD Z B FT MM B1 FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8

5

11 11 D-A59W 13 13 13 14 14 15 D-A3m/A44 9 9 10 11 11 11 D-Y59m/Y69m D-Y7P/Y7mV D-Y7mW/Y7mWV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 D-F5m/J59 D-F5mW/J59W D-F5BA/F5NT D-F59F 3.5 4 4 4.5 4.5 4.5 D-G39/K39 9 9 9 10 10 11 D-P3DWA 3 4.5 4.5 5 5 5.5 D-P4DW 4 4 4 4.5 4 4.5 DValues which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately 30% dispersion) and

CG1

11 11 12 11 11 10 10 M5 M6 X 0.75 M8 X 1.0 M10 X 1.25 Note) The drawing below shows the single acting/spring return style.

Electric Rotary Table

Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.

Square Tube Type Air Cylinder Series MB1

(Refer to Rod boot/Air cushion on page 11.)

HRX-OM-W002

Facility water temp. 600 Heating capacity [W] Heating capacity [W] 600 40 40 32 32 25 400 25 400 5 5 200 200 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [] Circulating fluid temperature [] 60Hz 50Hz Fig 9-11 Heating capacity (HRR012-A/W-10,HRR018-A/W-10) 9.5.2 HRR012-A/W-20,HRR018-A/W-20 800 800 Ambient temp. Ambient temp. or or Facility water temp.

Environment

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.