High Vacuum Angle Valve, XL Series 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.
l 0.25 ZZ H e f h ZZ 20 25 32 40 M5 x 0.8 21.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 2 65 141 (149) 11 3 12 35 30 16 55 198 (206) 11 178 (186) M6 x 0.75 26.5 5.5 8 M10 x 1.25 29 1/8 2.5 73 151 (159) 11 3 12 40 30 17 62 215 (223) M5 x 0.8 depth 7.5 11 193 (201) Stroke x M8 x 1.0 26.5 5.5 10 M10 x 1.25 35.5 1/8 2.5 73 154 (162) 11 3 12 40 35 17 62 218 (226) M5 x 0.8 depth 8 10 (11) 196 (204
l 0.25 ZZ H e f h ZZ 20 25 32 40 21.5 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 2 65 141 (149) 11 3 12 35 30 16 55 198 (206) 11 178 (186) 26.5 M6 x 0.75 5.5 8 M10 x 1.25 29 1/8 2.5 73 151 (159) 11 3 12 40 30 17 62 215 (223) M5 x 0.8 depth 7.5 11 193 (201) Stroke x 26.5 M8 x 1.0 5.5 10 M10 x 1.25 35.5 1/8 2.5 73 154 (162) 11 3 12 40 35 17 62 218 (226) M5 x 0.8 depth 8 10 (11) 196 (204
"Sl module must be orderd separately "11 11 stations Includes 1 station 10 mount Sl unit.
Note) Refer to the Specific Product Precautions 2 on page 274. 242 D-sub Connector 10-SV Manifold Electrical Wiring 10F/16F D-sub connector type (25 pins) 13 Common Common 25 12 Station 11 SOL.b SOL.a 11 24 Station 2 SOL.b 15 SOL.a 2 Station 1 SOL.b 14 SOL.a 1 This circuit is for the double wiring specification with up to 11 stations.
800 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet air flow rate l/min (ANR) Outlet air flow
400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 12 13 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 Distance from cylinder shaft center Lo (cm) 1464 Model Selection CY3B/CY3R Series
Heat generation amount: 400 W Cooling capacity = Considering a safety factor of 20%, 400 W x 1.2 = 480 W Thermo-con/HEC Series High-precision temperature control type for semiconductor manufacturing equipment, medical equipment, etc.
SCM220A, #11, #3 SCM220A, #11, #3, #19 CM2L25SCM225A, #11 SCM225A, #11, #3 SCM225A, #11, #3, #19 CM2L32SCM232A, #11 SCM232A, #11, #3 SCM232A, #11, #3, #19 CM2L40SCM240A, #11 SCM240A, #11, #3 SCM240A, #11, #3, #19 1.4-40 Series CM2 Front Flange (F) CM2F Bore size Stroke S T (mm) Bore N NA NN P E B2 C2 D H2 I A F K AL FD Z B FT MM B1 FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8
11 11 D-A59W 13 13 13 14 14 15 D-A3m/A44 9 9 10 11 11 11 D-Y59m/Y69m D-Y7P/Y7mV D-Y7mW/Y7mWV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 D-F5m/J59 D-F5mW/J59W D-F5BA/F5NT D-F59F 3.5 4 4 4.5 4.5 4.5 D-G39/K39 9 9 9 10 10 11 D-P3DWA 3 4.5 4.5 5 5 5.5 D-P4DW 4 4 4 4.5 4 4.5 DValues which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately 30% dispersion) and
11 11 12 11 11 10 10 M5 M6 X 0.75 M8 X 1.0 M10 X 1.25 Note) The drawing below shows the single acting/spring return style.
Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.
(Refer to Rod boot/Air cushion on page 11.)
Facility water temp. 600 Heating capacity [W] Heating capacity [W] 600 40 40 32 32 25 400 25 400 5 5 200 200 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [] Circulating fluid temperature [] 60Hz 50Hz Fig 9-11 Heating capacity (HRR012-A/W-10,HRR018-A/W-10) 9.5.2 HRR012-A/W-20,HRR018-A/W-20 800 800 Ambient temp. Ambient temp. or or Facility water temp.
Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.
Note 11) Only when the motor option, "with lock", is selected. -8- [Product weight] [kg] Model LEY25 (Top/Parallel) LEY25D (in-line) Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 Incremental Encoder(S2) 1.3 1.4 1.6 1.8 2.0 2.2 2.3 2.5 2.7 1.3 1.4 1.6 1.8 2.0 2.2 2.4 2.5 2.7 Motor type Absolute Encoder(S6) 1.4 1.5 1.6 1.9 2.0 2.2 2.4 2.6 2.8 1.4 1.5 1.6 1.9
900 800 700 600 C 500 400 300 200 100 0 1000 900 800 700 600 D 500 400 300 200 100 0 1000 900 800 700 600 E 500 400 300 200 100 0 1000 900 800 700 600 F 500 400 300 200 100 0 When the cylinder is extended, the speed controller is metered-out, is connected with the cylinder directly, and its needle is fully open.
50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.