Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Specifications Grade 1 Note 1) Particulate generation grade Air, Nitrogen gas, Water (pure water) Note 2) Fluid 1MPa Note 3) Maximum operating pressure (20C) 100kPa Operating vacuum pressure Caution 3MPa Proof pressure (20C) 20C to 80C Ambient and fluid temperature Series KP is a line of special One-touch fittings for use in clean room blowing and washing lines.

Fluoropolymer Tubing Variations

/4" x 11/10" 11/4" 31.75 11/10" 27.95 KQB2 O.D. 3.18 1/16" 1.58 0.086" 2.18 KS KX I.D.

Plug-in Unit

B 23 () (+) Grey Red 11 () (+) White Red SOL. A Station 11 SOL. B 24 () (+) Black White 12 () (+) Yellow Red SOL. A Station 12 SOL. B 25 () (+) White None COM. 13 (+) () Orange Red Note) Negative COM. spec. Positive COM. spec. Note) When using the negative COM. specification for VQC1000/2000, use valves for negative COM.

Dual Speed Controller with One-touch Fitting Series ASD

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

SY3000 SY3000-23-4 (M2 x 21) M3 x 26 (Flat nickel plated) M4 x 31 (Flat nickel plated) SY3000-11-24 VQZ SY5000 SY5000-11-10 VQD SY7000 SY7000-11-9 Note 2) For SY9000, the SUP port is only available on the end plate side. SY9000-18-2 (M3 x 42) SY9000 SY9000-11-1 VFS Plug (white) VS Insert into unused cylinder ports and SUP/EXH ports. The minimum order quantity is 10 pieces.

Series SV

SX5000-57-6 SX3000-146-2 SX5000-138-1 SV2000-55-1SV2000-55-2A SV2000-21-1 (M3 x 30) VZ1000-11-1SV1000-69A SX7000-57-5 SX3000-146-2 SV3000-65-1 SV3000-55-1SV3000-55-2A SV3000-21-1 (M4 x 35) VZ1000-11-4SV3000-69A SX3000-57-4 SX3000-146-2 SX3000-181-1 SV1000-55-1SV1000-55-2-1 SX3000-22-2 (M2 x 24) VZ1000-11-1SV1000-69A SY9000-11-2 SX3000-146-2 SV4000-65-1 SV4000-55-1SV4000-55-2A SV2000-21-2

SX

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

Digital Flow Switches, Series PF2A, Series PF2W

Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc

Information

Note 10) Front: 1 m, height: 1 m, stable with no load, Other conditions Note 4) Note 11) Weight in the dry state without circulating fluids Note 12) Required flow rate when a load for the cooling capacity is applied at a circulating fluid temperature of 20C, and rated circulating fluid flow rate and facility water temperature of 25C.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

"Sl module must be orderd separately "11 11 stations Includes 1 station 10 mount Sl unit.

HRX-OM-Y098

Communication setting screen 35.Contact output 1 to 3 34.Contact input signal 33.Analog output 32.Serial communication setting screen detail setting screen setting screen setting screen 11. Temperature waveform 11.

HRX-OM-W060

Refer to Table 5.4-11 Offset setting for details. (1) (2) Offset setting Table 5.4-11 Offset setting No. Indication Item Explanation Setting range (1) Offset Temp.

High-Precision Digital Pressure Switch

. *2 Further reduced by approx. 60% in power-saving mode (For 20 series) The 20A, 20B, and 20C series have been added to the product lineup.

VFR

Refer to How to Order Sub-plate Assembly on page 3-5-11. !3 !4 !

energy saving effect

Lights up during remote operation. 11 Changing pressure unit Pressure unit can be changed. MPa PSI HECR t [RUN] lamp Lights up when the product is started, and goes off when it is stopped.

Flow Control Equipment

4.6 7.5 6 12 7.2 6.6 18 3.3 6.3 6.4 9.3 7.7 15.4 8.5 8.3 21 TMH-06J TMH-06 TMH-08 TMH-10 4.3 7.1 7.2 11 10 20 11 10.6 26.5 TMH-07 TMH-09 TMH-11 4.3 9.5 9.6 14 14 28 14.2 14.6 34 TMH-12 TMH-13 Note 1) Mounting bracket is not available.

Process Pump

Standard Specifications/Single Unit (Standard Dew Point 20C) Membrane Air Dryer Series IDG Model Standard dew point: 20C IDG5 IDG10 IDG20 IDG30 IDG50 Fluid Compressed air Macromolecular membrane dryers that act like filters. -20C low dew point just by installing in air pressure line.

Digital Flow Switches Series PF2A

/2 Weight Port size (Rc, NPT, G) 1.1 kg (without lead wire) 2.0 kg (without lead wire) 1 2 Note 1) Flow rate display can be switched between the basic condition of 0C, 101.3 kPa and the standard condition (ANR) of 20C, 101.3 kPa, and 65% RH.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

specifications for up to 11 stations.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note) Refer to the Specific Product Precautions 2 on page 274. 242 D-sub Connector 10-SV Manifold Electrical Wiring 10F/16F D-sub connector type (25 pins) 13 Common Common 25 12 Station 11 SOL.b SOL.a 11 24 Station 2 SOL.b 15 SOL.a 2 Station 1 SOL.b 14 SOL.a 1 This circuit is for the double wiring specification with up to 11 stations.