XLAQ/XLDQ

11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143 153 474 XLAQ/XLDQ Series Glossary of Terms 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

CE

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 10-12-16 for details on other applicable auto switches than listed above.

CE

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 10-12-16 for details on other applicable auto switches than listed above.

MXW

5 !6 !7 !8 !

Rotary Table

parts. 5.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1 NV 3.4 5.5 6.6 Model MY2H16G MY2H25G MY2H40G PF 3.5 5.5 17 Z 160 210 330 X 6 7.5 9 XX 12 14 23 Y 5 5 8 VV 10.5 15.3 29 TT 12.5 19.3 35.4 U 4 5 6 UU 3 4.4 2 SS 9.7 14 21.5 R 5 5 8 RR 5.3 8.5 11 RW 40 50 53.5 QW 40 60 57 PC 7.2 8.2 5.5 PE 3.7 2.7 5 PG 4 6 9 PP 5.3 8 16 Q 152 198 312 QQ 16.4 20.4 25.5

CE

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 10-12-16 for details on other applicable auto switches than listed above.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

10 2 pcs. 15 Operating Range (mm) Bore size Auto switch model 12 16 20 25 32 40 50 63 80 100 D-A9/A9V 7 9.5 9 9 9 9 9 10.5 10 10.5 D-M9/M9V D-M9W/M9WV 4 5.5 5 5 5.5 5 5.5 5.5 6.5 7 D-Z7/Z8 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 7.5 11 11 13 13 8.5 9.5 9.5 11 14 5 8.5 9 10 10 6 6 6.5 8.5 11.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

Compact Cylinder with Solenoid Valve/

(Page 5) Applicable Auto Switches/Refer to pages 11 to 13 for detailed auto switch specifications.

XL-OMY0002

10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD-63,XLD-80,XLD-100 S 1 SUS304+ 4 1) S S O 2) S O FKM 5 O 6 S O 2 FKM 9 S SUS304 10 11 XL-OMY0002 6. 6-1.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

, 15, 20 25, 30, 35, 40 45, 50 12, 16 20, 25 Dimensions ...10 &11 Series CQS How to Order . 1 12 16 20 25 5, 10 Construction . 12 Solid state switch D-M9N, F9NV D-M9P, F9PV D-M9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Dimensions ...13 to 16 Series CQSK How to Order . 1 12 16 5, 10, 15, 20, 25, 30 Construction . 17 20 25 5, 10, 15, 20, 25, 30 35, 40, 45, 50 Dimensions ...18 &19 Note

Environment

SpeedWork Load Graph (Guide) For Step Motor (Servo/24 VDC) LECPA Horizontal Vertical LEY16m LEY16m for acceleration/deceleration: 2000 mm/s2 10 40 LEF 35 Horizontal work load [kg] Lead 2.5: LEY16C Lead 2.5: LEY16C 8 Vertical work load [kg] 30 LEJ 25 LEL 5 15 17 20 Lead 5: LEY16B Lead 5: LEY16B 4 LEM 10 11 2 Lead 10: LEY16A Lead 10: LEY16A 6 LEY LEY 5 4 0 0 LES 0 300 200 400 100 500 600 0

Rotary Table

P391060-5 P391070-5 Seal kit No.

MXF

Lead wire length (m) 0.5 (Nil) Load voltage Indicator light Auto switch model Applicable load Pre-wire connector Special function Type Electrical entry Wiring (Output) 3 (L) 5 (Z) AC DC Perpendicular In-line IC circuit 3-wire (NPN equivalent) A96V A96 5 V Reed switch Solid state switch Yes Yes Grommet Relay, PLC 2-wire A93V A93 100 V 24 V 12 V M9NV M9N 3-wire (NPN) IC circuit 5 V,

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

58

5 D-G39/K39 10 11 11 [Mounting screws set made of stainless steel] Since this is a guideline including hysteresis, not meant to be guaranteed.

Cylinder with Lock Series CLS

5 5.5 6 6 D-G39/K39 11 11 10 10 10 [Mounting screw set made of stainless steel] Since this is a guideline including hysteresis, not meant to be guaranteed (assuming approximately 30% dispersion).

Solid State Auto Switch

D-M9N(E) D-M9N(E)V D-M9P(E) D-M9P(E)V D-M9B(E) D-M9B(E)V Wiring 3-wire 2-wire Output NPN PNP Lead wire orientation In line Perpendicular In line Perpendicular In line Perpendicular Applicable load IC circuit/Relay/PLC 24 VDC Relay/PLC Power supply voltage 5/12/24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less

Dual Rod Cylinder Series CXSJ/CXS

5 40 11 38 9 40 11 35.5 6.5 44 15 34 5 44 15 36 7 49 11.5 47 9.5 49 11.5 44.5 7 53 15.5 43 5.5 53 15.5 45 7.5 Note 1) 6: D-A90, A96, A93, F9BAL 10: D-A90, A96, A93 Only outward electrical entry (D dimension) is available.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Nil S n 2 pcs. 1 pc. n pcs. 10 11 Relief type Vacuum suction type D 12 5 D M9B 10 C Q S B 21 C Q S B D 12 5 D M9B Auto switch (With auto switch) Nil With auto switch No D With auto switch (Built-in magnet) Without auto switch (Built-in magnet cylinder) Nil For auto switch part numbers, refer to the next page.