RHC

D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5

MLU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no. MU-C02 MU-C03 MU-C04 MU-C05 Part no.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Direct Operated Pilot Operated Refer to pages 7, 9, 11, 25, 35, and 39 for details. 2-Port Solenoid Valve Improved environmental resistance due to the stainless steel coil cover [IP67 enclosure] Refer to pages 46 to 50 for details.

10

If there is something you do not know, please contact SMC. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

Microspeed Cylinder

(MPa) Bore size (mm) 0.035 (0.025) 1 (0.5) 0.04 (0.03) 20, 25, 32, 40 0.025 0.5 0.035 (0.025) 1(1) 0.03 0.025 1 Figures in ( ) are for 11-CM2X. 12, 16 20, 25, 32, 40 12, 16 1(0.5) 0.5 20, 25 20, 25 Figures in ( ) are for 11-CQSX. 1MPa = 145psi 1in/s = 25.4mm/s II Microspeed Cylinder/Double Acting: Single Rod Series CJ2X 10, 16 The dimensions are the same as the standard double acting single

New

6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium Vacuum, Oil Replacement Parts DIN Connector Part No.

CUJ

Table 2 Applicable auto switch models Refer to pages 11 to 14 for detailed specifications.

OMR0031

Monitor and Test Mode of the Controller . 41 11. Operation . 44 11.1 Return to origin position . 44 11.2 Positioning operation . 46 11.3.

7

U E OUT T OUT IN M 2 x P Port size J K L F I (D) (mm) Electrical entry M Model Flat terminal Conduit terminal Conduit C37, Stainless steel body Port size P A B C E F I J K L D Aluminum body T T 1/4, 3/8 1/2 88 (93.5) 22.5 30 U 49.5 (55) V U T 55.5 (61) U 22 27 24 30 50 20 4.5 5 11 13 37.5 42.5 25 25 49.5 (55) VXD2 3 A 99.5 68.5 47.5 23 ( ): Denotes the Normally Open (N.O.) dimensions.

Angle Seat Valve

Body material/Port size/Orifice diameter Symbol Body material Port size Orifice diameter A Bronze (CAC) 3/8 11 B 1/2 14 C 3/4 18 D Stainless steel 316L equivalent Pressure type Nil Standard H High pressure 3/8 11 E 1/2 14 F 3/4 18 Other Special Options Special Entry for Pilot Port/ Insulating Adapter Type VXB215 XCA Enter standard product number.

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

Angle Seat Valve /

Fluid Nil No L Yes Thread type*1 5 Steam Nil Rc A G B NPT Body material/Port size/Orifice diameter Symbol Body material Port size Orifice diameter A Bronze (CAC) *1 The thread type for the main piping and pilot piping is the same. 3/8 11 B 1/2 14 C 3/4 18 D Stainless steel 316L equivalent Pressure type 3/8 11 E 1/2 14 F 3/4 18 Nil Standard H High pressure Other Special Options Special Entry

Clean Series: Vacuum Suction Type, Bore Size: 20mm, Thread Type: Rc: 32, 40 Bore; M Thread: 10, 16, 20, 25 Bore, Opening/Closing Stroke: -, Auto Switch: -, Lead Wire: -, Number: -

Clean Series: 11 (Vacuum Suction Type), Bore Size: 20mm, Thread Type: Rc: 32, 40 Bore; M Thread: 10, 16, 20, 25 Bore

Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X

speed (mm/s) 0.025 0.5 0.06 1 0.06 1 0.035 (0.025) 1 (0.5) 32, 40 32, 40 10, 16 10, 16 0.01 0.5 0.05 0.5 Figures in ( ) are for 11-CQ2X 20, 25, 32 50, 63, 80, 100 Air Cylinder Series CM2X Air Cylinder Series 10-/11-CM2X Compact Cylinder Series CQSX Compact Cylinder Series 10-/11-CQSX Bore sizes (mm) Min. operating pressure (MPa) Min. operating pressure (MPa) Min. piston speed (mm/s) Min.

Pilot Operated

COM. 1/8 to 1/2 1/8 to 3/8 20 to 40 3/4 to 11/2 N.C. Features 2 Solenoid Valves Flow Characteristics (How to indicate flow characteristics) 1. Indication of flow characteristics Indication of the flow characteristics in specifications for equipment such as solenoid valve, etc. is depending on Table (1).

60

O-ring 11 O-ring NBR (FKM, EPDM, PTFE) NBR (FKM, EPDM, PTFE) Note 1) The seal materials shown in ( ) are available depending on the option selected.

Direct Operated

11 O-ring O-ring (NBR) (FKM, EPDM) (NBR) (FKM, EPDM, PTFE) 12 12 Plate Stainless steel Plate Stainless steel 13 Gasket The materials in parentheses are the seal materials.

Model Selection 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 7, 11, 15, 14, 20, 16, 25, 22, 32, 28, 40, 33, 50 Low vacuum to 1 Pilot pressure: 0.1 to 0.7 Single unit 1/8 to 2 (2B) 17-4-13 VNB N.C./N.O./C.O.

CNS

/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL Auto switch model Bore size (mm) Data 125 140 160 14 D-Z7/Z80 14.5 13 Hs A D-A3/A44 D-A5/A6 10 10 10 17 17 17 D-A59W Ht D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 12 13 7 6 6 7 D-Y7BAL D-F59F/F5/J5 D-F5W/J59W D-F5BAL/F5NTL B 5 5 5.5 Proper Auto Switch Mounting Position/ Auto Switch Mounting Height D-G39/K39 11 11 10 Since this is a guideline including hysteresis