Air Cylinder

x 1.25 15 29 1/8 11 81 11 M6 x 0.75 10+0.08 0 5 1 6.5 15 123 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12+0.08 0 5.5 1 7.5 24 123 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14+0.08 0 6 1.25 8.5 24 144 50 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16+0.08 0 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18+0.08 0 11.5 3 14.5 24 167 80 10 22 M22 x 1.5 23 80

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

Rotary Actuator/Vane Type

, 6 11 to 22 X-2 3, 4, 5, 6 MSQ MSZ CRQ2X MSQX Symbol: A9 Symbol: A10 MRQ The long shaft can be further shortened by changing the length of the standard chamfer on the long shaft side.

15

Motor flange Body side hub [Built-in parts] Spider [Built-in parts] Size: 25 Hub Mounting Dimensions [mm] Size: 32 Hub Mounting Dimensions [mm] Size: 40 Hub Mounting Dimensions [mm] Motor type MM TT PD FP NZ M2.5 x 10 1.00 8 11 NY M2.5 x 10 1.00 8 11 NX M2.5 x 10 1.00 8 5.5 NM1 M3 x 4 0.63 5 11 NM2 M2.5 x 10 1.00 6 11 Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M4 x 12 2.5 11 17.5 NX

MHZ

M9B Number of auto switches Clean Series 11-: Vacuum type Auto switch Bore size Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

MHZ

M9B Number of auto switches Clean Series 11-: Vacuum type Auto switch Bore size Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

D-J79C 11-11-20 Connector 11-11-21 D-F59/F5P/J51/J59 Grommet 11-11-22 D-S991/S992/S99V1/S99V2 11-11-22 D-T991/T992/T99V1/T99V2 11-11-22 D-S9P1/S9P2/S9PV1/S9PV2 Grommet 11-11-23 D-S791/S792 11-11-23 D-T791/T792 Direct 11-11-23 D-S7P1/S7P2 11-11-23 Connector D-T791C/T792C 11-11-30 D-F8N/F8P/F8B D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-Y59A/Y7P/Y59B D-Y69A/Y7PV/Y69B 11-11-31 Grommet 11-11-24 D-F79W

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

134 11 77 99 116 53.5 73.5 53.5 43.5 M12 x 1.75 18 80 100 22 11 154 11 94 117 136 53.5 85 63 43.5 M12 x 1.75 22 100 For details about the rod end nut and accessory brackets, refer to page 7-6-20.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Pair no. of wire Insulation color Dot mark Dot color LEC Y LEC Y 1 1 Orange Red 2 Black 3 2 Light gray 11 6 Orange Red 12 Black 13 7 Light gray 21 11 Orange Red 22 Black 23 12 Light gray Motorless A side Red 4 Black 5 3 White Red 6 Black 7 4 Yellow Red 8 Black 9 5 Pink Red 10 Black Red 14 Black 15 8 White Red 16 Black 17 9 Yellow Red 18 Black 19 10 Pink Red 20 Black Red 24 Black 25 13 White

Style: Standard, Nominal Size: Ø10, Port Location: E (Axial Direction), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M

Style: Standard, Nominal Size: Ø20, Port Location: E (Axial Direction), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M

Style: Standard, Nominal Size: Ø10, Port Location: R (Body Side Direction), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M

Body Shape: Cylindrical Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 12, Gripping Force (Open Side at 0.5 Mpa)(N): 12, Environment, Applications: Standard / Cleanroom Environment, Additional Function: With Linear Guide / Bearing Support / High Accuracy, Stroke Adjustment Mechanism: Not Provided, Operating Pressure Range(MPa): 0.2～0.6, Cylinder internal diameter(mm): 10, Auto switch: M9B

Body Shape: Cylindrical Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 24, Gripping Force (Open Side at 0.5 Mpa)(N): 25, Environment, Applications: Standard / Cleanroom Environment, Additional Function: With Linear Guide / Bearing Support / High Accuracy, Stroke Adjustment Mechanism: Not Provided, Operating Pressure Range(MPa): 0.15～0.6, Cylinder internal diameter(mm): 15, Auto switch: M9B

Body Shape: Cylindrical Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 33, Gripping Force (Open Side at 0.5 Mpa)(N): 34, Environment, Applications: Standard / Cleanroom Environment, Additional Function: With Linear Guide / Bearing Support / High Accuracy, Stroke Adjustment Mechanism: Not Provided, Operating Pressure Range(MPa): 0.15～0.6, Cylinder internal diameter(mm): 20, Auto switch: M9B

Style: Standard, Nominal Size: Ø15, Port Location: Axial Direction, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -

Style: Standard, Nominal Size: Ø20, Port Location: Body Side Direction, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -

Style: Standard, Nominal Size: Ø10, Port Location: Axial Direction, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -

Style: Standard, Nominal Size: Ø15, Port Location: E (Axial Direction), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M

Style: Standard, Nominal Size: Ø15, Port Location: R (Body Side Direction), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M