ITV

Count AF Supply pressure: 1.0 MPa Pressure Characteristics Flow Characteristics Set pressure: 0.45 MPa AR 1000 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 900 kPa 900 Output deviation factor (% F .S.) 800 kPa IR 800 0.5 700 kPa Set pressure (kPa) 700 600 kPa

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

500 Up to 600 Up to 600 Up to 700 Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22

MK

P O N M S Model With arm: MK -N 12 16 MKB12-N MKB16-N 4 20 29 8 18.5 M3 x 0.5 8 5 25 36 11 21.5 M4 x 0.7 11 20, 25 18-(0 to 10) R thread Auto switch Minimum bending radius of lead wire 10 In case of connector 2-M5 x 0.8 F (2) M8 x 1.25 Effective thread depth 11 through 2 x 2counterbore depth 7 depth 3 R + Clamp stroke Q + 2 x Clamp stroke Both ends tapped style: MKA M6 x 1.0 R + Clamp

CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size (mm) Minimum operating pressure (MPa) Minimum operating piston speed (mm/s) Compact Cylinder Series CQ2X CE2 ML2B 32, 40 0.025 0.5 50, 63, 80, 100 0.01 0.5 C J G5-S 10-3-12 CV MVGQ Compact Cylinder Series CM2X Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating pressure (MPa) CC 20, 25, 32, 40 0.025 0.5 RB 10-3-14 J Clean Series DCompact Cylinder Series 10-/11

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

m s m s Type of impact s m Kinetic energy E1 1 2 m2 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E1 + E2 Symbol : Speed of impact object (m/s) m: Weight of impact object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8 m/s2) s: Shock absorber stroke (m) Note) The speed of the impact object is measured at the moment of impact with the shock absorber. 8-12-11 12 Series

Air Cylinder Series CA2

H + Stroke S + Stroke ZZ + 2 strokes (mm) A AL B B1 C D E F G H1 J K KA M MM N P S H ZZ Bore size (mm) 40 50 63 Stroke range (mm) Up to 500 30 27 60 22 44 16 32 10 15 M8 x 1.25 6 14 11 M14 x 1.5 27 1/4 84 51 186 8 Up to 600 35 32 70 27 52 20 40 10 17 M8 x 1.25 7 18 11 M18 x 1.5 30 3/8 90 58 206 11 Up to 600 35 32 85 27 64 20 40 10 17 M10 x 1.25 7 18 14 M18 x 1.5 31 3/8 98 58 214 11 The dimensions

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

801 to 900 901 to 1000 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 133 ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod CP96 Series Dimensions Basic: CP96S (D) B C (J) W Bore size Stroke 32, 40 C85 C85W C85-S/T C75-S/T C85K-S/T C75K-S/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R

Combination Cylinder

11 11 11 11 16 16 18.5 8 11 11 13 16 M8 M8 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 M10 X 1.25 M12 M12 M14 X 1.5 M14 X 1.5 M16 X 1.5 W/o rod boot W/ rod root Bore (mm) 40 50 63 80 100 125 140 160 P M MM N R S TDe8 W TT TX TY TZ l H 51 58 58 71 72 110 110 120 Z 162 181 191 221 235 300.5 309 340 ZZ 209 232 246 286 306 e 36 45 45 60 60 75 75 75 f 16.5 16.0 16.0 18.0 18.0 40 40 40 h 59 66

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

2-M5 x 0.8, depth 8 Z 3 V K 6.5 MX Max. 15 11 M MTS Stroke: S MY MXP16-20B CY Width across flats 12 A MG M8 x 1 H Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 24.3 17.1 14.4 40.8 MA 10.5 11 CX 11 8.5 D27.3 -X 34 20Data A 19 6.5 Operating port 2-M5 x 0.8 (Plug

Integrated Controller

Speed: V [mm/s] 200 400 600 800 1000 1400 1200 0 Speed: V [mm/s] 200 400 600 800 1000 1200 EQFS40HA/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 70 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 3000 mm/s2 60 Work load: W [kg] Work load: W [kg] 50 40 3000 mm/s2 30 5000 mm/s2 20 10 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1200 0 Speed: V [mm/s] 100 200 300 400 500 600 700 800 900 EQFS40HB

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

30 to 800 mm/s 30 to 700 mm/s 30 to 600 mm/s Precautions MX Bumper is standard on both ends Cushion Port size M5 x 0.8 Rc 1/8 Be sure to read before handling.

SFOD-OMT0009CN

11 () 12 () LE 1 800 1 1

CXS

Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Max. speed (mm/s) Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 (5) (6) (7) 6 10 15 Selection graph (8) (9) (10) (11) (12) (13) (14) (15) 20 25 32 The maximum speeds for 6 to 32 are: 6, 10: Up to 800 mm/s; 15, 20: Up to 700 mm/s; 25, 32: Up to 600 mm/s Caution

CG1

1 to 50st 51 to 100st 101 to 125st 126 to 200st Bore (mm) 20 25 32 40 TA TB TC ZZ 211 213 230 ZZ 181 186 188 205 S 144 144 146 153 ZZ 156 161 163 180 S 119 119 121 128 ZZ 131 136 138 155 S 94 94 96 103 169 171 178 11 11 11 12 11 11 10 10 M5 M6 X 0.75 M8 X 1.0 M10 X 1.25 Note) The drawing below shows the single acting/spring return style.

LJ1H

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 104 Made to Order Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

SFOD-OMT0010

) Min. speed [mm/s] 17 9 33 20 10 (Speed tuning control) Model LEFS32 Lead symbol H A B Lead [mm] 24 16 8 Stroke [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 Max. speed [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 Min. speed [mm/s] (Independent and 24 16 8 interpolation) Min. speed [mm/s] 39 26 13 (Speed tuning control) 110 No.SFOD-OMT0010-B Model LEFS40 Lead symbol H A B Lead

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

MB1

(Refer to Rod boot/Air cushion on page 11.)

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

panel,s protective earth (PE).