VFR

Refer to How to Order Sub-plate Assembly on page 3-5-11. !3 !4 !

Guide Cylinder Series MGG

35 54 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 75, 100 125, 150 200, 250 300 120 14 16 10 100 35 6 35 135 20 80 118 6.6 40 73 80 106 35 60 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 140 17 19 10 120 40 9 45 170 20 100 150 9 50 93 95 134 50 75 M8 x 1.25 depth 16 14 depth 10 M12 x 1.75 depth 21 170 23 21 10 150 45 9 50 194 25 120 170 11 55 103 115 152 56 90 M10 x 1.5 depth 20 M14 x

SMC Pneumatic Clean Series

3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note) Consult SMC for long stroke.

0.55

Grommet (G) DC without light/surge voltage suppressor (Station n) (Station 1) (Indicator light) + 3R 1P 80.2 Approx. 300 (Lead wire length) 97.3 57.2 50.1 37.5 11 2A 2A 1/4 2(A) port (Pitch) P = 27.5 28 80.2 51.5 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations 2 stations Station n L1 L2 83.5 111 138.5 166 193.5 221 248.5 276 303.5 331 358.5 386 413.5 441 468.5 496 523.5 551 578.5

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

-LEJS40A-200 13000 LEC S 100 600 11-LEJS40B-200 10 4 LEC SS-T 63 1200 11-LEJS63A-300 13000 600 11-LEJS63B-300 10 LEC Y * Mounting position: Horizontal Motorless Evaluation Method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes, by the laser dust monitor, is converted into the particle concentration in every 1 m3.

Mechanically Jointed Rodless Cylinders

400 300 200 100 MY3A max.

AC Servo Motor Driver (CC-Link Type ）

2 11.

Compact Hydraulic Cylinder

6.5 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 CH2F (mm) Auto switch model Bore size (mm) 32 40 50 63 80 100 D-M9m/M9mV D-M9mW/M9mWV D-M9mAL/M9mAVL D-F5m/J5m/F59F D-F5mW/J59W D-F5BAL/F5NTL D-G5m

C95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 6.6 7 8 11 10 38 51 10 21 18 26 31 32 10 40 9 10 11 12 41 54 10 24 22 28 35 36 11 6.6 50 9 11 12 15 12 50 65 12 33 30 32 45 45 12 63 11 12 15 16 52 67 14 37 35 40 50 50 15 9 80 11 12.5

Rubber seal 5 Port Solenoid Valve Series SYJ5000

3 4 5 DIN terminal (D): SYJ5 20-D-M5 3 4 5 M8 connector (W0): SYJ5 20-W0-M5 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 54.1 [56.3] 44.3 [46.5] 64.1 63.2 53.2 45.8 20 20 20 54.1 39.3 20 3 38.1 23.3 3 3 3 103.4 [107.8] 123 [127.4] 11 11 11 141.2 121.2 143 11 2-2.6

Series VQ Base Mounted Metal Seal/Rubber Seal

L1=10.5n+72 n: Station (Standrad max. 16) L n 1 82.5 137.5 148 11 187.5 250 260.5 10 177 237.5 248 16 240 300 310.5 15 229.5 287.5 298 14 219 275 285.5 13 208.5 262.5 273 12 198 262.5 273 9 166.5 225 235.5 8 156 212.5 223 7 145.5 200 210.5 6 135 200 210.5 5 124.5 187.5 198 4 114 175 185.5 3 103.5 162.5 173 2 93 150 160.5 L1 L2 L3 Dimensions/Side entry connector [-FS] (mm) L n 11 262.5 273

C95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 7 8 11 10 38 51 10 21 18 26 31 32 10 6.6 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 11 12 15 12 50 65 12 33 30 32 45 45 12 9 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 12.5 14

MGG

16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

P 13 5 10 10 14 14 5-M5 0.8 (Piping port) 15 [ ] for AC L type plug connector (L) : SYJ3140L -M5 M type plug connector (M) : SYJ3140M -M5 33.5 33.5 23.2 (Mounting holes) 22 4 23.2 (Mounting holes) 22 4 B A B A 11 2.5 17.5 11 2.5 17.5 A B A B (Lead wire length) 50.7 64.3 About 300 52.6 [59.1] About 300 54.7 [56] (Lead wire length) 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2 R1

Basic Type/Direct Mount Type

400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 12 13 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 Distance from cylinder shaft center Lo (cm) 1464 Model Selection CY3B/CY3R Series

Electric Actuators

30 to 300 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 200 30 to 300 30 to 300 Size 16 25 32 Size 16 25 32 Size 16 25 32 Size 16 25 32 CAT.NAS100-83 RodType AC Servo Motor (100/200 W) Basic type In-line motor type Series LEYmD Series LEY Stroke 30 to 400 30 to 500 Stroke 30 to 400 30 to 500 Size 25 32 Size 25 32 CAT.NAS100-83 SliderType Step Motor

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l1 d2 CK S5 K1 G1 G2 EM CA H6 R1 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.5 51 11 10 6.6 38 10 21 7 18 26 31 32 8 10 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 15 12 9 50 65 12 33 11 30 32 45 45 12 12 67 15 16 9 52 14 37 11 35 40 50 50 12 15 86 18 16 11 66 18 47 12.5 40 50 60 63 14 15 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 20 25 14 94

C95

C95-S10 1.11-9 Series C95 Accessories Floating joint JA Steel, zinc chromate plated Bore (mm) Radial deflection M A B C D E F G H P U Weight (g) Load (kn) M10 X 1.25 M12 X 1.25 M16 X 1.5 M20 X 1.5 49.5 60 71.5 101 19.5 20 22 28 31 24 31 41 59.5 5 6 7.5 11.5 8 11 14 24 8 11 13.5 16 17 22 27 32 9 13 15 18 0.5 0.75 1.0 2.0 70 160 300 1080 2.5 4.4 11 18 32 40 50/63 80/100 5 Piston rod clevis

Plate Cylinder

GY 5 5.5 7 8 10 H 36 40 45 53 56 K 5.5 5.5 6 7 7 KA 10 12 14 18 18 Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 (mm) (mm) Rod End Female Thread P TN TF Model MM N NC ND NE NS NX NY S ZZ MM M6 x 1 depth 12 ZZ 69 72 75 92 96 H 14 14 15 18 21 Model MUB25 MUB32 MUB40 MUB50 MUB63 MUB25 MUB32 MUB40 MUB50 MUB63 NPT1/8 NPT1/8 NPT1/4 NPT1/4

CG1

to 300 Up to 300 Up to 300 11 11 10 (11) 10 (12) 12 (13) 12 (13) 106 (114) 111 (119) 113 (121) 130 (139) 150 (162) 150 (162) 182 (196) 182 (196) 10 (12) 20 25 32 40 50 63 80 100 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 26 31 38 47 58 72 89 M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 12 14 18 25 30 32 40 50 14 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26