Refrigerated Air Dryers Series IDF/IDU

Power cable outlet 0.7 [17 mm] (Wire diameter 0.4 [9 to 11 mm]) IDFB6E to 15E-11 IDF-S0086 F One-touch fitting (KQ2H1002S) is not included.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

MHSL3-16D MHSL3-16D 25 25 Pressure 0.6 MPa 20 20 Pressure 0.6 MPa Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 15 15 0.4 MPa 0.4 MPa 10 10 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 5 5 F 0 0 5 5 10 10 20 20 25 25 30 30 15 15 Gripping point L (mm) Gripping point L (mm) F F MHSL3-20D MHSL3-20D 40 Pressure 0.6 MPa 35 MHZ Pressure 0.6 MPa External grip 35 30 0.5 MPa 0.5 MPa MHF 30 25 25 20 20

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

MU

Single clevis MUC25SMU25, #5 (#1+#5+#11) MUC32SMU32, #5 (#1+#5+#11) MUC40SMU40, #5 (#1+#5+#11) MUC50SMU50, #5 (#1+#5+#11) MUC63SMU63, #5 (#1+#5+#11) 2.4-5 Plate Cylinder/Double Acting Double Rod Series MUW 20, 32, 40, 50, 63 How to Order Standard MUW B 25 30 D M MDUW B 25 30 D M A73 S With auto switch Built-in magnet Number of auto switches 2 1 n Double rod S n Mounting B L F Basic Foot

CY1

of adjustment (both sides) (mm) Bore size (mm) 40 1500 6 10 15 20 25 32 40 12 11 7 Magnetic Holding Force (N) 11 1N: Approx. 0.102kgf 10 6 10 15 20 25 32 40 Bore size (mm) 11 19.6 53.9 137 231 363 588 922 H type 9 Holding force type 81.4 154 221 358 569 L type Since the cylinder is in an intermediate stop condition when stroke adjustment is performed, use caution regarding the operating

Step Motor Controller

7 6 9 8 11 10 3 Connector B terminal no.

Air Fittings & Tubing

(inch) Min. hole dia. (1) Fitting size d (inch) D1 D2 M A L2 L1 KQ2L01-03 KQ2L01-05 KQ2L03-05 KQ2L03-07 KQ2L05-07 KQ2L05-09 KQ2L07-09 KQ2L07-11 KQ2L09-11 KQ2L09-13 KQ2L11-13 5 32 3 16 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 3 7 6 3 8 11 12 17 17 30 25 17 17.5 25 13.5 2.2 2.5 3 2.5 9.6 7 10 10 8 15.5 1 8 21.5 22.5 14.5 15.5 23 24.5 23.5 33 33.5 26 26.5 35.5 36.5 39.5 40.5 41.5 43 16 18 10.4

Compact 5-Port Solenoid Valve

Note SOL.a SOL.b (+) (+) () () 24 11 Station 11 1.5 m SY30M-DS25-015 Cable 0.3 mm2 x 25 cores 3 m SY30M-DS25-030 5 m SY30M-DS25-050 1.5 m AXT100-DS25-015 Cable 0.3 mm2 x 25 cores 3 m AXT100-DS25-030 5 m AXT100-DS25-050 Station 12 SOL.b SOL.a (+) (+) () () 25 12 * Be sure to use the connector cable in the table, to satisfy enclosure IP67. * Cannot be used for movable wiring * When using

AC Servo Motor Driver (CC-Link Type ）

6.1.13 Encoder output pulse . 6 -11 6.2 Gain/filter parameters (No.

MHZ

Internal Grip MHZ2, 11-MHZ2 MHZ2-6 MHZ2-25/11-MHZ2-25 40 100 Pressure 0.2 MPa Pressure 0.2 MPa 30 Overhang H (mm) Overhang H (mm) 80 H H 0.5 MPa 0.5 MPa Pressure 0.2 MPa Pressure 0.2 MPa 0.6 MPa 0.6 MPa 60 0.3MPa 0.3MPa 20 0.7 MPa 0.7 MPa 0.7 MPa 0.7 MPa 0.3 MPa 0.3 MPa 0.4 MPa 0.4 MPa Gripping point L 40 0.4 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.5 MPa 0.6 MPa 10 20 MHZAJ2, MHZJ2 0 20 40 60 80 100

MHZ

Internal Grip MHZ2, 11-MHZ2 MHZ2-6 MHZ2-25/11-MHZ2-25 40 100 Pressure 0.2 MPa Pressure 0.2 MPa 30 Overhang H (mm) Overhang H (mm) 80 H H 0.5 MPa 0.5 MPa Pressure 0.2 MPa Pressure 0.2 MPa 0.6 MPa 0.6 MPa 60 0.3MPa 0.3MPa 20 0.7 MPa 0.7 MPa 0.7 MPa 0.7 MPa 0.3 MPa 0.3 MPa 0.4 MPa 0.4 MPa Gripping point L 40 0.4 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.5 MPa 0.6 MPa 10 20 MHZAJ2, MHZJ2 0 20 40 60 80 100

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VZ110 can be mounted on VV4Z1-25 and VV4Z1-25F .

AC Servo Motor Driver (CC-Link Type ）

2 11.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

11 20.5 41 (P, EA, EB port) 1/8 L plug connector (L): 10-SY3240(R)-L-01 M8 connector (WO): 10-SY3240(R)-WO-01 M plug connector (M): 10-SY3240(R)-M-01 108.6 [113] Approx. 300 (Lead wire length) 38.1 53.5 [60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6 [71.6] 79 89 [93.4] 20.5 11 11 20.5 11 92 106.8 20.5 11 11 11 7.5 16.5 7.5 16.5 24.5 7.5 16.5 24.5 24.5 50 Note) Refer to page 176

42

w AXT632-25-11 (M4 x 66) 2 q AXT632-25-6 (M4 x 114) 4 For manifold * The individual EXH cannot be mounted on the top. w AXT632-25-11 (M4 x 66) 2 Valve + Restrictor (Top) (Bottom) + Individual SUP or Individual EXH (Top) (Bottom) q w Valve + SUP stop valve (Top) + Individual SUP, Individual EXH or Restrictor (Bottom) q AXT632-25-6 (M4 x 114) 4 For manifold w AXT632-25-11 (M4 x 66) 2 Valve

Base Mounted Metal Seal/Rubber Seal Series VQ

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L dimension 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L dimension No.

Table of Contents

(Refer to page 14-19-11.)

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(M): 10-SYJ5223-M-M5 DIN Terminal (D): 10-SYJ5223-D-M5 M8 connector (WO): 10-SYJ5223-WO-M5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 MAX.10 28.1[35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107[111.4] 3 3 3 3 87.4[91.8] 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note) Refer to the Specific Product Precautions 2 on page 274. 242 D-sub Connector 10-SV Manifold Electrical Wiring 10F/16F D-sub connector type (25 pins) 13 Common Common 25 12 Station 11 SOL.b SOL.a 11 24 Station 2 SOL.b 15 SOL.a 2 Station 1 SOL.b 14 SOL.a 1 This circuit is for the double wiring specification with up to 11 stations.