C95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 6.6 7 8 11 10 38 51 10 21 18 26 31 32 10 40 9 10 11 12 41 54 10 24 22 28 35 36 11 6.6 50 9 11 12 15 12 50 65 12 33 30 32 45 45 12 63 11 12 15 16 52 67 14 37 35 40 50 50 15 9 80 11 12.5

Base Mounted Metal Seal/Rubber Seal Series VQ

114 175 185.5 124.5 187.5 198 135 200 210.5 145.5 200 210.5 156 212.5 223 166.5 225 235.5 177 237.5 248 187.5 250 260.5 198 262.5 273 208.5 262.5 273 219 275 285.5 229.5 287.5 298 240 300 310.5 L1 L2 L3 Dimensions: Side Entry Connector [-FS] n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L 162.5 173 175 185.5 187.5 198 187.5 198 200 210.5 212.5 223 225 235.5 237.5 248 250 260.5 275 285.5 287.5

Air Cylinder Series CA2

M14 x 1.5 27 50 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 11 M18 x 1.5 30 CS1 63 M10 x 1.25 Up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 7 18 14 M18 x 1.5 31 80 M12 x 1.75 Up to 750 20 to 750 40 37 102 32 78 25 52 14 21 13 11 22 17 M22 x 1.5 37 CS2 100 M12 x 1.75 Up to 750 20 to 750 40 37 116 41 92 30 52 14 21 16 11 26 17 M26 x 1.5 40 Without rod boot With rod

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Lx = 250 mm, Ly = 180 mm, Lz = 1000 mm 4.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l1 d2 CK S5 K1 G1 G2 EM CA H6 R1 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.5 51 11 10 6.6 38 10 21 7 18 26 31 32 8 10 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 15 12 9 50 65 12 33 11 30 32 45 45 12 12 67 15 16 9 52 14 37 11 35 40 50 50 12 15 86 18 16 11 66 18 47 12.5 40 50 60 63 14 15 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 20 25 14 94

Series SV

SX5000-57-6 SX3000-146-2 SX5000-138-1 SV2000-55-1SV2000-55-2A SV2000-21-1 (M3 x 30) VZ1000-11-1SV1000-69A SX7000-57-5 SX3000-146-2 SV3000-65-1 SV3000-55-1SV3000-55-2A SV3000-21-1 (M4 x 35) VZ1000-11-4SV3000-69A SX3000-57-4 SX3000-146-2 SX3000-181-1 SV1000-55-1SV1000-55-2-1 SX3000-22-2 (M2 x 24) VZ1000-11-1SV1000-69A SY9000-11-2 SX3000-146-2 SV4000-65-1 SV4000-55-1SV4000-55-2A SV2000-21-2

C95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 7 8 11 10 38 51 10 21 18 26 31 32 10 6.6 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 11 12 15 12 50 65 12 33 30 32 45 45 12 9 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 12.5 14

Basic type / Direct mount type Series CY3B/CY3R

1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) 100 500 400 50 300 30 200 100 10 20 30 40 50 Usable range 5 Usable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

10

4.5 5 5 5.5 6.5 D-P4DW 4 4 4 4.5 4 4.5 4.5 D-A9l/A9lV 7 7.5 8.5 9.5 9.5 10.5 12 D-Z7l/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.

Table of Contents

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 When this signal is OFF, an alarm is being generated for the actuator/controller.

MB

11 11 NCA D-A5/A6 D-A59W D-A3/A44 13 13 13 14 14 15 D9 9 10 11 11 11 10 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 -X D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 20D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 Data D-G39/K39 D-P5DWL 9 4 9 4 9 4 10 4.5 10 4 11 11 4.5 4.5 These values are given as guidelines including the hysteresis and are not guaranteed.

Table of Contents

(Refer to page 14-19-11.)

NCA1

/32 9/32 1.43 1 1.71 3 5/8 2.36 6.44 5/8 1 15/16 2 1/4 1.81 M16x1.5 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5") 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.30 1.06 11/32 11/32 2.19 1 1.75 3 3/4 2.48 6.44 1 1/4 1 15/16 2 3/8 1.69 M16x1.5 325 (3.25") 1 3/4-16 1 1/8 3.9

NCA1

/32 9/32 1.43 1 1.71 3 5/8 2.36 6.44 5/8 1 15/16 2 1/4 1.81 M16x1.5 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5") 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.30 1.06 11/32 11/32 2.19 1 1.75 3 3/4 2.48 6.44 1 1/4 1 15/16 2 3/8 1.69 M16x1.5 325 (3.25") 1 3/4-16 1 1/8 3.9

Sine Rodless Cylinder Series REA/REB

Bore size (mm) Maximum manufacturable Maximum stroke with switch Standard stroke (mm) stroke (mm) stroke (mm) Symbol Specifications 500 500 150, 200, 250, 300 10 XC57 With floating joint 150, 200, 250, 300, 350, 400 450, 500 15 750 1000 20 1000 1500 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25 1500 2000 32 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 2000 1500 Note)

AC Servo Motor Driver (Pulse input type/Positioning type ）

OPTIONS AND PERIPHERAL EQUIPMENT . 11-2 11.1 Cable/connector sets . 11-2 11.1.1 Combinations of cable/connector sets . 11-3 11.1.2 STO cable . 11-6 11.1.3 Encoder cable/connector sets . 11-7 11.1.4 Motor cables . 11-9 11.1.5 Lock cables . 11-10 11.2 Regenerative options . 11-11 11.2.1 Combination and regenerative power . 11-11 11.2.2 Parameter setting . 11-11 11.2.3 Selection of regenerative

MGP

, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 x 0.8 M5 x 0.8 M5 x 0.8 15 10 19 53 37 10.5 M5 x 0.8 M5 x 0.8 Rc 1/8 12.5 10.5 25 53.5 37.5 11.5 M6 x 1.0 M6 x 1.0 Rc 1/8 12.5 13.5 28.5 WA WB Bore size (mm) Q R S T U VA VB X XA XB YY YL Z 30st or less Over 30st to 100st Over 300st 30st or less Over 30st to 100st 23 24 28 34 Over 100st to 200st 200

Series VQ Base Mounted Metal Seal/Rubber Seal

175 185.5 4 114 187.5 198 5 124.5 187.5 198 6 135 200 210.5 7 145.5 212.5 223 8 156 225 235.5 9 166.5 237.5 248 12 198 262.5 273 13 208.5 275 285.5 14 219 287.5 298 15 229.5 300 310.5 16 240 312.5 323 10 177 250 260.5 11 187.5 250 260.5 L1 L2 L3 1.10-181 VQ0/1000 Kit (Connector) C Standard with lead wires plug-connected to each valve individually.

Table of Contents

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 125 E5125 20 25 14 94 124