Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

, 15, 20 25, 30, 35, 40 45, 50 12, 16 20, 25 Dimensions ...10 &11 Series CQS How to Order . 1 12 16 20 25 5, 10 Construction . 12 Solid state switch D-M9N, F9NV D-M9P, F9PV D-M9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Dimensions ...13 to 16 Series CQSK How to Order . 1 12 16 5, 10, 15, 20, 25, 30 Construction . 17 20 25 5, 10, 15, 20, 25, 30 35, 40, 45, 50 Dimensions ...18 &19 Note

MK

0.062 0 0.1 0.2 MKB40 1 8 65 29.5 35 9 depth 7 M10 x 1.5 94.5 52 5.5 12 8 69 14 16 40 5 Rc / 61 3 6.5 14 24 7 30 0.062 0.1 0.2 0 MKB50 1 4 0.15 0.15 11 depth 8 76.5 34 41 M12 x 1.75 112 64 6.6 15 10.5 86 19 20 50 7 Rc / 73 3.5 7.5 0.15 30 0.15 8 37 17 0.062 0 0.1 0.2 MKB63 1 4 Note 1) Above figure is for D-A73/A80.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10

Low Profile Slide Table Series MXF

Model Maximum allowable load mass Average speed Va (mm/s) A2 10 11 12 17 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 0.6 1 2 4 Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Note) 16 mm for MXF8-10 only. 0.7 Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model Stroke (mm) 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98 2.22 3.41 6.66

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

0.6 MPa Gripping force (N) Gripping force (N) 40 40 0.5 MPa 0.5 MPa 30 30 L L 0.4 MPa 0.4 MPa 20 20 0.3 MPa 0.3 MPa 10 10 0.2 MPa 0.2 MPa 0 0 10 20 30 40 50 60 10 20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) MHK2-20D MHK2-20D 80 60 70 Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) 50 60 50 40 0.5 MPa 0.5 MPa 40 30 0.4 MPa 0.4 MPa 30 0.3 MPa 20 0.3 MPa

Air Slide Table Series MXW

11 11 11 V 124 144 169 194 219 W V A 34.5 34.5 59.5 34.5 34.5 34.5 B 235.5 260.5 135.5 160.5 185.5 210.5 MXW16 W 14.5 14.5 39.5 14.5 14.5 14.5 V 225.5 280.5 155.5 180.5 205.5 230.5 A 43.5 43.5 43.5 43.5 68.5 43.5 43.5 B 293.5 318.5 243.5 268.5 168.5 193.5 218.5 MXW20 W 23.5 23.5 23.5 23.5 48.5 23.5 23.5 V 313.5 338.5 263.5 288.5 188.5 213.5 238.5 A 44.5 44.5 44.5 44.5 44.5 44.5 86.5 74.5

CE

VDC, 50 mA PNP open collector Max. 30 VDC, 50 mA NPN open collector Max. 30 VDC, 50 mA PNP open collector Max. 30 VDC, 50 mA RS Q G Output transistor mode 80 to 120 VAC 50/60 Hz 21.6 to 26.4 VDC Power supply voltage RS H A 10 VA or less 5 W or less Power consumption RZQ Between case and AC line: 1500 VAC for 1 min.

CE

VDC, 50 mA PNP open collector Max. 30 VDC, 50 mA NPN open collector Max. 30 VDC, 50 mA PNP open collector Max. 30 VDC, 50 mA RS Q G Output transistor mode 80 to 120 VAC 50/60 Hz 21.6 to 26.4 VDC Power supply voltage RS H A 10 VA or less 5 W or less Power consumption RZQ Between case and AC line: 1500 VAC for 1 min.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

4050 30 Air Cushion Stroke (mm) m3 max. m1 max. m2, m3 max.

CE

VDC, 50 mA PNP open collector Max. 30 VDC, 50 mA NPN open collector Max. 30 VDC, 50 mA PNP open collector Max. 30 VDC, 50 mA RS Q G Output transistor mode 80 to 120 VAC 50/60 Hz 21.6 to 26.4 VDC Power supply voltage RS H A 10 VA or less 5 W or less Power consumption RZQ Between case and AC line: 1500 VAC for 1 min.

Stroke Reading Cylinder and Counter

approximately 30% dispersion).

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12

CLS

25 30 30 40 164 98 30 30 30 383 40 40 40 45 45 55 30 to 1400 75 133 406 Up to 1400 98 298 383 393 433 507 532 406 416 454 525 550 M30 x 1.5 8 9 0.2 stroke 184 98 393 30 to 1400 75 133 416 98 298 Up to 1400 M30 x 1.5 0.2 stroke 204 106 433 75 141 454 106 338 30 to 1400 Up to 1400 M36 x 1.5 25 31 41 0.2 stroke 228 111 503 85 153 521 115 402 30 to 1800 Up to 1500 M40 x 1.5 M12 x 1.75 0.2

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

MHC2/MHCA2/MHCM2 F L F MHC2-6D/MHCA2-6D MHC2-6S/MHCA2-6S MHCM2-7S Pressure 0.6MPa 4 4 2 Pressure 0.6MPa 0.5 Pressure 0.6MPa Gripping force N Gripping force N Gripping force N 3 3 0.4 0.5 0.5 2 2 1 0.3 MHZ 0.4 0.4 0.2 MHF 1 1 0.3 MHL MHR 0 30 20 10 0 30 20 10 0 30 20 10 MHK Gripping point L mm Gripping point L mm Gripping point L mm MHS MHC MHT MHY MHW -X MRHQ MA D619 Series MHC2/MHCA2/MHCM2

Air Slide Table/Long Stroke Type Series MXY

70 10 40 29 M4 x 0.7 25 20.9 3.5 25 4 14 5 2.5 MXY12 40 M5 x 0.8 8.5 86 15 52 31 18 36 30.9 32 5 6 3 PH R RH RL T TB P PL PR Q QW TH W WD WE WR Z Model MXY6 4 2.9 5.1 13 7 9 11 60 12 3(depth 3) 3(depth 3) 2.5 30 5 88 25.5 20 MXY8 4 3.4 6.1 19 7 10 13 70 15 3(depth 3) 3(depth 3) 3 38 6.5 98 32 25 MXY12 5 4.5 7.8 29 7 13 18 90 21 4(depth 4) 4(depth 4) 4 50 8.5 114 42 33 n QL Model 50 100 150

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

MDHR2-20, 30 MDHR2-10, 15 H H L L Auto switches of D-M9NV, D-M9PV, D-M9BV, and D-M9AV are used. Auto switches of D-M9N, D-M9P, D-M9B, and D-M9A are used. Auto switches of D-M9NV, D-M9PV, D-M9BV, and D-M9AV are used. Max. Protrusion of Auto Switch from Edge of Body: L, H Max.

Table of Contents

46.5 30 50 60 46.5 60 50 30 30 Angle adjuster 30 203 47 90 150 203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Dual Rod Cylinder Series CXSJ/CXS

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/1283 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS15, CXSL15 10-/11221221S ZZ SS 20 10 9 2-4.3 through Z 28 counter bore depth 4.4 18 5 30 1 M6 x 1.0 x 5L (Hexagon socket

CRQ2

40 5 18 9 6 35 44 53 6 40 60 20 10 7 50 10 89 59 30 15 11 74 12 97 65 13 32 18 20 83 15 109 73 36 93 15 11-8-11 12 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern Sequencing I Shaft shape pattern is dealt with simple made-to-order system.