Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet, Port thread type: NPT, Auto Switches: Without

Clean Series: 11 (Vacuum Suction Type), Magnet: D (Built-in), Series: A2 (Standard), Mounting: F (Front Flange), Bore Size: 63mm, Port Thread: TN (NPT), Stroke: 100mm

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet, Port thread type: NPT, Auto Switches: Without

Magnet: Built-in, Mounting: Front Flange, Tube Material: Aluminum Tube, Model Selection: Standard, Bore Size: 63mm, Thread: NPT, Stroke: 300mm, Suffix: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: D (Built-in), Series: A2 (Standard), Mounting: F (Rod Flange), Tube Material: Aluminum, Bore Size: 63mm, Port Thread: TN (NPT), Stroke: 200mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Magnet: Built-in, Series: Standard, Mounting: Rod Flange, Tube Material: Aluminum, Bore Size: 63mm, Port Thread: NPT, Stroke: 200mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -, Auto Switch: -

Magnet: Built-in, Mounting: Front Flange, Tube Material: Aluminum Tube, Model Selection: Standard, Bore Size: 63mm, Thread: NPT, Stroke: 300mm, Suffix: w/o Gaiter w/Cushion Both Sides, Auto Switch: A53--Reed, DC Volt >5<24, LED, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: Built-in, Mounting: Front Flange, Tube Material: Aluminum Tube, Model Selection: Standard, Bore Size: 63mm, Thread: NPT, Stroke: 300mm, Suffix: w/o Gaiter w/Cushion Both Sides, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

5 Port Solenoid Valve Series SY3000/5000/7000/9000

voltage suppressor) 53.5[60.5] 50 24.5 16.5 11 11 7.5 (P, EA, EB port) 1/8 20.5 41 L plug connector (L): 10-SY3240(R)-L-01 M8 connector (WO) 10-SY3240(R)-WO-01 M plug connector (M): 10-SY3240(R)-M-01 Approx. 300 (Lead wire length) 38.1 53.5[60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6[71.6] 108.6[113] 79 89[93.4] 20.5 11 11 20.5 11 92 106.8 20.5 11 11 11 7.5 16.5 7.5 16.5 24.5

CATALOG

11 M5x0.8 20 106 35 25 ~300 19.5 22 16.5 10 14 2 12 12 31 M5x0.8 Depth 7.5 5 8 M10x1.25 29 18 69 11 11 M6x0.75 25 111 40 32 ~300 19.5 22 20 12 18 2 12 11 38 M5x0.8 Depth 8 5.5 10 M10x1.25 36 18 71 11 10 M8x1.0 40 32 113 40 ~300 27 30 26 16 25 2 13 12 47 M6x1 Depth 12 6 14 M14x1.5 44 18 78 12 10 M10x1.25 50 40 130 50 ~300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13

V100

39 32.4 10.8 3.5 P , E port E P 8.9 E P 11 2-3.5 Mounting hole 26.5 27.2 34 V100 (Lead wire length) 300 (Lead wire length) SY P = 1011.5 300 300 (Lead wire length) 43.3 37.2 12.5 7.5 43.3 SYJ U side D side 1 2 3 4 5 n (Lead wire length) VK For latching and AC VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

A

11 M5x0.8 20 106 35 25 ~300 19.5 22 16.5 10 14 2 12 12 31 M5x0.8 Depth 7.5 5 8 M10x1.25 29 18 69 11 11 M6x0.75 25 111 40 32 ~300 19.5 22 20 12 18 2 12 11 38 M5x0.8 Depth 8 5.5 10 M10x1.25 36 18 71 11 10 M8x1.0 40 32 113 40 ~300 27 30 26 16 25 2 13 12 47 M6x1 Depth 12 6 14 M14x1.5 44 18 78 12 10 M10x1.25 50 40 130 50 ~300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

3 4 5 M8 connector (WO): 10-SY3 40(R)-WO-01 3 4 5 Approx. 300 (Lead wire length) 38.1 53.5 [60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6 [71.6] 66.5 34 41.4 115.3 60 97.5 [101.9] 117.1 [121.5] 42.3 [44.5] 20.5 11 11 20.5 11 20.5 11 11 11 32.5 [34.7] 27.5 7.5 16.5 7.5 16.5 24.5 7.5 16.5 24.5 24.5 50 Note) Refer to page 176 for dimensions of connector types. 63 Base Mounted 10-

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

291 15 287 274 14 270 257 13 253 240 12 236 223 11 219 206 10 202 189 9 185 172 8 168 155 7 151 138 6 134 121 5 117 104 4 100 87 L plug connector (L) DIN terminal (D) M plug connector (M) Built-in speed controllers (Lead wire length) MAX. 11 300 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 MAX. 10 : With light/surge voltage suppressor 3-3-46 46 5 Port Solenoid Valve Base Mounted

SY

SS5Y33, #5 (#5 + #8 + #9 + #11) 4 3 2 5 6 7 8 9 10 11 12 13 14 15 16 Stations n L1 L2 L3 91.5 81 102 112.5 123 133.5 144 154.5 173 160.5 185.5 198 210.5 210.5 223 235.5 148 260.5 273 285.5 298 310.5 310.5 162.5 150 175 187.5 200 200 212.5 225 137.5 250 262.5 275 287.5 300 300 234 70.5 181.5 192 202.5 213 223.5 11.5 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 For 11 or more stations, two

Table of Contents

12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

CL

6 6 8 15 15 15 15 35 40 40 50 178 193 196 221 38 41 41 41 154 169 23 25 28.5 33 30 30 35 35 11 11 11 12 16 17 17 17 11 11 M5 X 0.8 M6 X 0.75 M8 X 1 M10 X 1.25 55 62 62 70 to 200 to 300 to 300 to 300 0.25 Stroke 105.5 Long stroke/Refer to p.3.1-28 and 3.1-29 for mounting dimensions except table below.

SX

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

1

9 9 10 11 13.5 29 33 37 37.5 37.5 44 44 49 6 6 8 8 8 8 9 9 11 11 10.5 11.5 12.5 14 14 16.5 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 -X M5 x 0.8 M5 x 0.8 2-Rc 3/8 20M6 x 1.0 GC GA GB FA FB 6H7 depth XL 32 40 50 63 M8 x 1.25 PB 16 2-Rc 3/8 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Data M8 x 1.25 (Plug)

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

: 10-SYJ5 23-D-M5 3 4 5 M8 connector (WO): 10-SYJ5 23-WO-M5 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D 3.5 to 7 MAX.10 28.1[35.1] 60.9 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7 54.1[56.3] 44.3[46.5] 64.1 63.2 53.2 45.8 54.1 39.3 20 20 20 20 38.1 23.3 3 3 3 3 103.4[107.8] 123[127.4] 11 11 11 141.2 121.2 143 11 2-2.6 (For mounting) 23 2-2.6