Actuation: 3 (3 Position Closed Center), Piping/EXH: 43 (Base Mounted, 5 Port/Common Exhaust), Coil Specification: Standard, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector, w/Lead Wire 300mm), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size: M5 (w/M5 Port Sub-plate)
Actuation: 2 Position Single Solenoid, Piping/EXH: Base Mounted, 5 Port/Common Exhaust, Coil Specification: Standard, Voltage: 24 VDC, Electrical Entry: M Plug Connector, w/Lead Wire 300mm, Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size: w/M5 Port Sub-plate, Bracket: -
Actuation: 3 Position Closed Center, Piping/EXH: Base Mounted, 5 Port/Common Exhaust, Coil Specification: Standard, Voltage: 24 VDC, Electrical Entry: M Plug Connector, w/Lead Wire 300mm, Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size: w/M5 Port Sub-plate, Bracket: -
5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported holes SY 0.8 4 8.6 SYJ 17 10 24 SMC 2 R2 25.8 Cover diameter 1.6 Cross section 0.34mm2 SX 2-C3, C4, C6, M5 16.6 23.6 60.3 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 VK Manual override C6: One-touch fittings for 6 M5: M5 thread VZ VF 25.5 (M5) 9.5 (C3, C4, C6) VFR (47.5) VP7 VP4 26.5 5.4 18.5 VQ 23.2 Mounting holes 5 2 VQ4 10 25.5 9.5 VQZ (47.5) 9.9 9.9 3-M5 x 0.8 P, R
10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22 24 30 34 40 46 58 7 7 9 9 9 9 10 10 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 13 15 18 21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16
M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 5 5 8 8 10 10 12 12 3 2 4 2.5 5 3.3 6.5 3.5 MHZ2-10-X51 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.5 0 +2.5 0 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Refer to pages 4 through 7 for the standard type dimensions, which are the same except for those shown above. 32 Series MHZ2/MHZJ2 Model Selection Method Model Selection Selection procedure Confirm gripping
l H R port lpE port M:Common exhaust for main and pilot valve M5:10-32 with Nom.
l H R port lpE port M:Common exhaust for main and pilot valve M5:10-32 with Nom.
l H R port lpE port M:Common exhaust for main and pilot valve M5:10-32 with Nom.
Heavy load Standard load Midium load Light load 1 10 50 100 1 0.25 0.49 0.98 1.96 2 20 75 200 2 0.49 0.74 1.47 2.94 3 30 100 300 3 0.74 0.98 1.96 3.92 4 40 125 400 4 0.98 1.23 2.45 4.90 5 50 150 500 5 1.23 1.47 2.94 5.88 6 75 200 600 6 1.47 1.96 3.92 7.84 7 100 250 700 7 1.72 2.45 4.90 9.80 8 300 300 800 8 1.96 2.94 5.88 11.76 9 500 500 900 9 2.21 3.92 7.84 15.68 10 1000 1000 1000 10 2.45
section 0.34mm2 Manual override 42 36 3 SX VK 69.5 (Metal seal) 67 (Rubber seal) (47.5) VZ VF SMC VFR 46.5 40.5 VP7 R1 R2 A, B port 20 14.6 12 10 10 P VP4 PE port 7.2 M5 X 0.8 (Not applicable to standard model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 13.4 13.4 1.1 M5 X 0.8 External pilot port (Only external pilot style(R)) VQ VQ4 VQZ 0 1 M plug connector (M): VQZ115 (R)lMl01 L plug connector
Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)
Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)
Nil S n No D With auto switch (Built-in magnet) Model Cushion Action Standard stroke (mm) Auto Switch Mounting Tube Bore size (mm) 6 10 16 6 10 16 Port size Lubrication Model Rubber Air 10-/21-CJ26 10-/21-CJ210 10-/21-CJ216 11-/22-CJ26 11-/22-CJ210 11-/22-CJ216 Relief type Vacuum suction type 15, 30, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 Band mounting only Except 6 M5 x 0.8 15, 30,
31.2 31.2 7 11.5 10 M5 x 0.8 2(B) port With plug connector/light 5.7 S07 5(R)-mM(O)-M5 2 A B C 8.4 18.6 19.5 M5 x 0.8 4(A) port M3 x 0.5 External pilot port (External pilot type only) 748 Base Mounted Single Unit S0700 Series Plug Lead Type Dimensions 3-Position Closed Center Grommet: S0735(R)-mG-M5 M5 x 0.8 1(P) port 21.2 SJ 11.4 5.2 7.7 M5 x 0.8 3(R) port SY 3 1 SY S0700 S0700 S0700 Manual
0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 M5 x 0.8 Female thread Male thread Rod end thread Note 1) Only 5 stroke comes with M5 x 0.8 in the case of no auto switch on 32. +1.0 0 mm Stroke tolerance Port size Vacuum port, Relief port M5 x 0.8 M5 x 0.8 1162 Series 10-, 11-CM2X Microspeed Cylinder for Clean Room 10-,11CM2X Series How to Order Clean Series 10 11 Relief
M8 X 1.25 10 8 28 25.5 Q R T* V Y N O P Bore (mm) 12 20 5.5 47 7 53.5 22 7 M4 X 0.7 M5 X 0.8 50 15 62.5 36 5 M6 X 1 M5 X 0.8 * Refer to p.4.4-8 regarding the rod end nut which is included. * Dimensions for auto switch model D-F79W. 4.4-10 Stroke Reading Cylinder Series CE1 Foot CE1L Bore size Stroke MK/MK2 RSQ/RSG RSH CE1 Front flange CE2 CE1F Bore size Stroke ML2B ML1C REA REC RHC MTS Rear
C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread U side D side Stations 1 2 3 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L1 L2 L3 31 50 60.5 53 75 85.5 64 87.5 98 75 100 110.5 86 112.5 123 97 125 135.5 108 125 135.5 119 137.5
at extension end KA 21 NA-M5 x 0.8 thread depth 5.5 10 21 5.5 K Vacuum suction port M5 x 0.8 10 5.5 5.5 9.5 12 12 J 10 Maximum 13.5 (With stroke adjuster at retraction end) I 6 5.5 12 Operating port 2-M5 x 0.8 11 3 5H9 depth 4 +0.030 0 2-M5 x 0.8 thread depth 5.5 GA HA B A 5H9 depth 4 +0.030 0 NN-M6 x 1 thread depth 12 6 10.5 10.5 1 9.5 26 5.1 B A 10.5 24 10.5 24 H G (NN1) x H Section AA