Compact Manifold Regulator Series ARM5

19 20 6 6 8, 5/16 8, 5/16 3 11.5 19.5 20 23 1/4 1/4 10, 3/8 10, 3/8 7 11.5 22 22 26 1/4 1/4 19 20.5 515 Series ARM11A/B End Block Pressure Gauge ARM11E L Part no.

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

Compact Vacuum Unit

Supply from one side 8 10 10 M5 x 0.8 Supply from both sides 10 12 12 Note) These values are obtained under the standard supply pressure.

7.4

fitting assembly C4: 4 One-touch fitting assembly M5: M5 thread 2n x C3, C4, M5 C3: 3.2 One-touch fitting assembly C4: 4 One-touch fitting assembly M5: M5 thread 45.5 2.5 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum 20 stations) 21.5 n L 1 2 3 4 5 6 7 8 9 10 L1 31 42 53 64 75 86 97 108 119 130 L2 50 62.5 75 87.5 100 112.5 125 125 137.5 150 L3 60.5 73 85.5 98 110.5 123 135.5

0.

VQZ100 / How to Order Valve C4 Series VQZ 1 5 1 5 M 1 CE compliant CE marked Nil Q 1 VQZ100 body width 10 mm Note) For CE compliant models, DC type only. Type of actuation 1 N.C.

Table of Contents

2.67 27 54 270 230 1 1/2 Short 1.10 to 3.29 45 90 270 230 2 Middle 0.68 to 2.05 45 90 Component Parts IF33-10 500 420 2 1/2 Middle 0.74 to 2.30 80 160 Material No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

to 50C 10 to 50C Ambient and fluid temp.

Valve Single Unit

(One-touch fitting for 4) C6 (One-touch fitting for 6) C4 (One-touch fitting 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) A, B port SV Manifold base weight W (g) n: Stations W = 19n + 45 W = 43n + 77 W = 51n + 81 SZ Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from

Secondary Batteries

Bore size Cylinder stroke (mm) 12 16 20 25 32 40 50 63 80 100 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Built-in Magnet Cylinder Model 12, 16 20, 25 32, 40 50 to 100 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 If a built-in magnet cylinder without an auto switch is

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

C4 Type 10-SS3YJ3-S42-M5 Type 10-SS3YJ3-S42-C4 Base mounted for internal pilot 0.17 0.36 0.3 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.2 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 10-SYJ34M 1/8 C4 M5 x 0.8 C4 10-SYJ34M 1/8 Note) The values are for individually operated 2 position type manifold bases.

SV

30% 10% 30% 50% 70% SY 600 300 50% Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 70% 30% AS2201F -02-10 AS3201F -02-12 SYJ 400 200 SX 200 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50% 30% 10% 70% 50% 70% 10% 0 0 800 400 MB 80 MB 63 300 600

PFxx-OMJ0005CN

2 -70No.PF-OMJ0005CN-I A 54 +0.5 0 74 +0.5 0 1 2R R3 313.2 mm (ZS-33-M) (ZS-33-MS) -71No.PF-OMJ0005CN-I (ZS-33-D (ZS-33-F) -72No.PF-OMJ0005CN-I INOUT X693 IN OUT X694 IN OUT 10 PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 A B A B C4 4(5/32) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693

VZ3000

plug connector (M) VZ3220-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3220-D-M5 C4 C6 Built-in One-touch fittings VZ3220-MAX. 10 C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-22 5 Port Solenoid Valve Body Ported Series VZ3000 3 Position Closed

Table of Contents

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

CRB2/CRBU2/CRB1

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 CDRB2BWU40 CDRBU2WU10 CDRBU2WU15 CDRBU2WU20 CDRBU2WU30 CDRBU2WU40 CDRB1BW50 Series CRB1 Single/Double type CDRB1BW63, 80, 100 Series CRB2 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no.

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

For valve weight, refer to page 2-3-10.

7.5

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% Serial wiring: EX180 Response Time Type of actuation Response time ms (at 0.5 MPa) SJ2000 SJ3000 2 position single 2 position double 3 position 4 position dual 3 port valve 16 or less 10 or less 34 or less 30 or less 16 or less 10 or less 22 or less 30 or less Gateway system Serial transmission system