Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Besides, be certain that a snap ring is placed firmly into the groove of rod cover before supplying air at the time of installment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50, 63 80, 100 32, 40 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50,

15

Motorless Motorless 400 500 200 LAT 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LZ Work load [kg] Work load [kg] 2000 1000 LC3F2 800 1500 L5 [mm] L5 [mm] Bottom m Me 600 1000 Y 400 L5 500 200 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] 2000 1000 800 1500 L6 [mm] L6 [mm] 600 1000 Z L6 400 m Me 500 200 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work

Table of Contents

) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated

Made to Order

10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22 24 30 34 40 46 58 7 7 9 9 9 9 10 10 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 13 15 18 21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16

Dual Rod Cylinder Series CXSJ/CXS

15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction flow rate of vacuum suction type (Reference

Air Cylinder Series CM2

19 8 13 8 41 28 5 6 30 15 24 9 62 14 13 5 20 M8 x 1.25 M20 x 1.5 133 142 15.5 10.5 8 1 25 22 9 30 25 10 19 10 13 8 45 8 30 15 30 9 62 14 17 6 26 5.5 M26 x 1.5 137 146 M10 x 1.25 19.5 10.5 33.5 8 1 32 22 9 30 25 10 19 12 13 8 45 10 30 15 9 64 14 17 6 26 5.5 M26 x 1.5 139 148 M10 x 1.25 19.5 10.5 37.5 34.5 4 1 40 24 10 11 11 38 15 30 14 16 50 12 39 88 18 22 8 21 7 M32 x 2 32 M14 x 1.5 177

CRBU

18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except basic type.

Air Cylinder Series MB

(1) 40 50 64 80 80 14 19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 12 16 19 24 34 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 10 11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 + 0.058 0.0 Y-04M (1) 12.5 CS1 + 0.30 + 0.10 + 0.30 +

ZP

R 10 39.5 23.4 12.5 10 G2 2 M10 04 06 A10 14 3 10 10 2 6 10 85 51 x 1 23 20 123 61 51 30 133 71 40 169 81 77 50 179 91 30 (Rotating angle) 13 16 40 23.9 13 10.5 10 to 32 10 126.5 58.5 S N S U F GN GS 20 123.5 68.5 30 133.5 78.5 50 178.5 98.5 75 50 20 25 46.5 29.3 15.5 12.5 J K Mounting Bracket Assembly Thin Flat Type with Ribs ZP R F Width across flats Q 2 12 3 10 127 59 47 29.8 16 13 50

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [

Table of Contents

(7) 10 (6.5) 12 (6) (13) 10 (6.5) 12 (6) (12) 12 (6) (13) ZPT10 10 (6.5) 12 (6) (13) ZPT13 11 (7) 15 (7) 15 (13) ZPT16 ZPT20 (8.5) 15 (8) 16 (17) (16) (8.5) 15 (8) 26 (17) (16) (8.5) 15 (8) 26 (17) (16) (10) 15 (10) 15 (18) (17) ZPT25 ZPT32 28 (26) 30 (25) (23) 28 (26) 30 (25) (16) 28 (26) 30 (25) (23) 30 (29) 32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Mechanically Jointed Rodless Cylinder Series MY1

20 MY3M 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed mm/s Piston speed mm/s Piston speed mm/s MY1HT/m1 MY1HT/m2 MY1HT/m3 1000 1000 1000 500 500 500 300 300 300 MY1HT63 MY1HT63 Load mass kg Load mass kg Load mass kg MY1HT63 100 100 100 MY1HT50 MY1HT50 50 50 50 MY1HT50 40 40 40 30 30 30 D20 20 20 -X 10 10 10 Individual -X 100 200 300 400

Air Cylinder Series CA2

27 60 22 44 16 32 10 15 M8 x 1.25 6 M14 x 1.5 27 1/4 84 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 M8 x 1.25 7 M18 x 1.5 30 3/8 90 Up to 600 20 to 600 35 32 85 27 64 20 40 10 17 M10 x 1.25 7 M18 x 1.5 31 3/8 98 Up to 750 20 to 750 40 37 102 32 78 25 52 14 21 10 M22 x 1.5 37 1/2 116 M12 x 1.75 Up to 750 20 to 750 40 37 116 41 92 30 52 14 21 M12 x 1.75 10 M26 x 1.5 40 1/2 126 (Both sides

Environment

30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load

Possible to transfer a workpiece at low-speed.

Size 10/15 Standard Size 20/30/40 CRB2 !

LJ1H

S W X10 Guide type Slider guide S X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 Nil W None B contact specification 2 pcs.

Electric Actuator

to 300 30 to 400 30 to 500 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 200 30 to 300 30 to 300 Stroke 30 to 400 30 to 500 Stroke 30 to 400 30 to 500 Size 16 25 32 Size 16 25 32 Size 16 25 32 Size 25 32 Size 25 32 Stroke 30 to 200 30 to 300 30 to 300 Size 16 25 32 CAT.NAS100-83 Slider Type Step Motor (Servo/24 VDC) Servo Motor (24 VDC) AC Servo Motor (100/200/400 W) Ball Screw Drive

V100

V100-31-1A V100-74-1 Material FKM, Steel Aluminum die-casted Number 10 11 Note Gasket, 2 screws Gasket assembly Sub-plate VFN R A P 2 4 8 6 11 10 1 How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A SY100 30 A Lead wire length Without lead wire: (With connector and 2 sockets) Nil 6 10 15 20 25 30 50