MNB

8 11 11 13 16 46 52 65 75 95 114 97 104 120.5 134.5 169 189 1/8 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/8 1/8 1/8 1/8 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 13 13 14 14 20 20 25 31 38.5 39.5 45.5 54 7 9 9 9 12 14 3 3 2 2 4 4 10 10 12 12 16 16 72 83 100 115 126 150 38 46 52 62 63 75 87 101 120 135 153 178 56 65 77 92 100 120 54 63 75 90 102 116 Bore size (mm) 32 40 50 63 80 100 K MM N P Q H S T V

SMC

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type Nil PNote 1) Axial piping type Note 1) The combination of axial piping type and both ends adjusters or retraction end adjusteris not

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

CNA

, n = 2, 4, 6, 8, 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 Same side 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75 + 50 (n 2) n = 2, 4, 6, 8, 80 + 50 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, Different sides D-A44C n Same side 10 75 80 90 1 2 (Different

Air Slide Table Series MXQ

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 2 Series MXQ Theoretical Output IN OUT Application of the dual rod system generates double the output of conventional cylinders.

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

CXWM/CXWL

Bore size/Stroke (mm) 10 (25), 50, 75, 100 16 (25), 50, 75, 100, 125, 150, 175, 200 20 (25), 50, 75, 100, 125, 150, 175, 200 25 (25), 50, 75, 100, 125, 150, 175, 200 (25), (50), 75, 100, 125, 150, 175, 200 End lock 32 R End lock Note1) For the strokes indicated in the parentheses of the 10, 16 and 25, shock absorbers are to be mounted on both sides of the plate.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

ZP

6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U C ZPT 10-B-A14 44.5 109.5 111 112 45.5 110.5 114.5 50 54.5 113.5 116.5 117.5 55.5 5 10 6.2 13 65.5 124.5 64.5 123.5 126.5 127.5 85.5 75 169.5 84.5 168.5 171.5 172.5 13-11-13 14 Series ZPT Connection

Air Cylinder Series MB

B TA TL TU TC TX TE TO TT TR TS TH TF TDH10 MB-S03 32 40 50 63 80 100 125 32 40 50 63 80 100 125 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.084 0 46 52 65 75 95 114 136 45 60 60 70 70 90 105 8.5 10 10 15 15 15 18.5 62 80 92 110 130 158 186 50 63 75 90 110 132 160 74 97 109 130 150 184 212 12 17 17 20 20 26 26 13 17 17 22 22 24 24 10 12 12 14 14 17 25 35 45 45 60 60 75 85 89

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Blanking plate assembly D D Connector box mounting position SX3000-75-1A 10-SS5Y3-45-AU-05D-C6 1set (Type 45, 5 stations manifold base part no.) SX3000-75-1A1set (Blanking plate assembly part no.) 10-SY3140-5LOU2sets (Single solenoid part no.) 10-SY3240-5LOU2sets (Double solenoid part no.)

Low Friction Cylinders Series MQ

79 10 10 ( 9.8) 40 12 55 52 10 7 6 8 10 28 5.4 9 25 10 to 50, 75, 100 96.5 M6 x 1.0 M6 x 1.0 84.5 12 12 (11.8) 45 13.5 Rc 1/8 NPT 1/8 G 1/8 49.5 58 60 10 7 7 4.5 10 12 34 5.5 9 30 10 to 50, 75, 100 116 M8 x 1.25 M6 x 1.0 104 13 16 (15.8) 52 17.5 Rc 1/8 NPT 1/8 G 1/8 57 71 69 10 7 10 5 14 12 40 5.5 9 40 10 to 50, 75, 100 116 M8 x 1.25 M8 x 1.25 104 13 16 (15.8) 64 17.5 Rc 1/4 NPT 1/4

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

CNA

+50(n-2) n=2, 4, 6, 8, 90+50(n-2) n=2, 4, 6, 8, 100+50(n-2) n=2, 4, 6, 8, 110+50(n-2) n=2, 3, 4, 5, 100+100(n-2) 100+100(n-2), n=2, 4, 6, 8, Same 10 90 100 110 With 1 10 75 80 90 Different 20 75 90 90 100 100 110 110 With 1 With 2 With n Same Different 20 55 75 75 80 80 90 90 With 2 With n (n-4) 90+50 2 n=4, 8, 12, 16 (n-4) 100+50 2 n=4, 8, 12, 16 (n-4) 110+50 2 n=4, 8, 12, 16 (n-2)

Air Cylinder Series CS1

10 10 10 10 CJP 17 17 17 17 17 CJ2 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-A3/A44 D-G39/K39 BS1-125 BS1-140 BS1-200 BS1-160 BS1-180 7.5 13 12 7 8 CM2 D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL CG1 D-F5/J5/F5W D-J59W/F5BAL D-F5NTL/F59F BS4-125 BS4-125 BS4-160 BS4-180 BS4-200 5 5 5.5 6 6 MB D-G39/K39 [Stainless Steel Mounting Screw Kit] 11 11 10 10 10 MB1 Since this is a guideline

ITV

Out 0.5 0.5 0.5 Set pressure (MPa) 0.4 Return 0.0 0.3 0.0 0.2 0.5 0.5 0.1 0 2 6 4 8 1.0 0 25 50 75 1.0 0.0 10 0 25 50 75 100 100 Input signal (%F.S.) Repetition Input signal (%F.S.)

Clamp Cylinder Series CK1

Width across flats 22 4 x M6 Thread depth 15 28 +0.5 +0.1 129 + Stroke 110 55 75 258 + Stroke 1334 Clamp Cylinder Series CK1 CKGA100 Built-in standard magnet type / with magnetic field resistant auto switch (D-P4DWS type) 56 + Stroke 34 56 63 Speed controller needle Top width across flats 4 MK Cushion valve Top width across flats 4 10 13 10 30 14 72.5 3 x Rc 3/8 CKQ CLKQ 3 x Rc 3/8 43 10

LJ1H

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Electric Actuator

: 75% Duty ratio: 75% 5000 5000 2500 2500 0 0 0 5 10 15 20 Work load [kg] 0 5 10 15 20 Work load [kg] LEFS25S;A LEFS25/Ball Screw Drive: Vertical LEFS25S;B 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] Duty ratio: 50% 17500 17500 Duty ratio: 50% 15000 15000 12500 12500 10 10 7500 7500 Duty ratio: 75% 5000 5000 Duty ratio: 75% 2500 2500 0 0 0 2 4 6 8 Work load [

ZP

ZPX40HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX50HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX63HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX80HBNJ25-B01-A18 ZPX 80HBNJ50-B01-A18 75-B01-A18 ZPX100HBNJ25-B01-A22 50-B01-A22 75-B01-A22 418 268 Misc. 40 50 63 80 100 125 0 +10 +1 1 441 289 0 +19 +1 2 684 312 0 +37 +2 3 723 284 0 +61 +2 6 767 305 100-B01-A22 ZPX125HBNJ25-B01-A22 50-B01-A22 75-B01-A22 1 +121