HRX-OM-T002

2-2 Names of the parts (This drawing shows HRS090-A-20.)

HRX-OM-R026

. 2-2 Names of each part Table 2-1 Accessory list 2pcs. 1 Alarm cord list label (English 1pc.

Process Valve Series VNA

VNH1 VNH2 VNH3 VNH4 VNH1-16 VNH2-16 VNH3-16 VNH4-16 Description 3 Note 2) 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Bracket (With bolt and washer) B 4 Note 2) How to Order Pilot Solenoid Valves 5 24 VDC 7 Note 2) 6 Note 2) 12 VDC CE compliant VO307 Q 240 VAC 50/60 Hz Note) Electrical entry: D or DZ only Other 9 Note 2) Note 1) Electrical entry: D or DZ only Note

HRX-OM-W060

130 16 180 16 Maximum lifting height m 50 49 55 49 68 49 0.10 0.10 0.10 0.10 0.10 0.10 Settable pressure range 5 MPa to to to to to to 0.50 0.49 0.55 0.49 0.68 0.49 Circulating fluid system Minimum operating flow rate 6 L/min 20 2 25 2 40 2 Tank capacity L 42 7 42 7 60 7 By-pass (With valve) built-in Electric conductivity setting range S/ cm 0.5 to 45 0.5 to 45 0.5 to 45 Particle filter

HRX-OM-Z002

14.5 to 18.5 Rc1/2 Communication cable entry Electric wire diameter 6.5 to 10.5 Facility water outlet port Rc1/2 Circulating fluid outlet port(CH1) Rc1/2 Facility water inlet port Rc1/2 Drain port Rc1/4 Caster with stopper Fig. 2-2 Name of each part Table 2-2 Accessories Operation Manual 2 copy (English 1 pc. / Japanese 1 pc.)

JXCx-OMY0008

Red 4 Lock (+) B-1 Black 5 Lock (-) A-1 Brown 1 Sensor (+) B-3 Blue 2 Sensor (-) A-3 Actuator side Controller side 2 1 (5.5) (6.3) (1) (14) (18) B1 A1 6 (2) 5 (17.7) (14.2) A6 B6 (3) 2 (10.2) 1 B1 A1 B3 A3 15 16 -56No.

ASR

Note 2) Not used for 6 and 8. Note 3) Not used for 10 and 12. 15-16-8 Air Saving Valve Pressure Valve/Flow Valve Series ASR/ASQ Flow Valve: Series ASQ Variable type Fixed type @2 @5 @6 @4 @3 @2 @5 @6 @4 @3 y u i ASQ430F-02 type ASQ530F-03 type ASQ630F-04 type ASQ430F-02 type ASQ530F-03 type ASQ630F-04 type o !5 !3 !5 !2 !4 !1 !7 !7 !4 !1 !6 !6 !8 !8 AS w q w q ASP @0 e @0 e ASN @1 !0 !

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

wire, 3 wire) Solid state switches (2 wire, 3 wire) 2 color indication solid state switches (2 wire, 3 wire) Auto switches +1 0 mm Stroke length tolerance Theoretical Output MXP16 (N) Operating pressure (MPa) Cylinder bore size (mm) 6 10 12 16 Piston area (mm) 0.2 6 16 23 40 0.5 14 40 57 101 0.7 20 55 79 141 0.4 11 32 45 80 0.3 8 24 34 60 0.6 17 47 68 121 28 79 113 201 Weights Standard Strokes

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

R

1.42 5/16-18UNC Depth0.31 0.2 9/16 0.79 0.59 5.67 (6.97) 3.86 4.65 0.62 1/8 2.44 1 7/8 1.81 9/16 1 0.1 NCRA1BW50-__ 1/2 1.61 3/8-16UNC Depth0.47 0.2 5/8 0.87 0.67 6.42 (7.93) 4.61 5.47 0.70 1/8 2.99 2 3/8 2.24 5/8 1 1/8 0.1 NCRA1BW63-__ 5/8 1.97 1/2-13UNC Depth0.51 0.2 3/4 0.98 0.79 7.32 (9.06) 5.59 6.57 0.83 1/4 3.62 2 7/8 2.76 3/4 1 3/8 0.12 NCRA1BW80-__ 3/4 2.36 1/2-13UNC Depth0.55 0.2

Manifold Specifications

U side D side U side (Pitch) (Pitch) (Station n)(Station 1) (Station n)(Station 1) VV4Z1-25FD VV4Z1-25FU (mm) (mm) 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 Stations 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5

Electric Actuator / Slider Type 《 AC Servo Motor 》

Refer to "LECSB2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. 2700 for LEFB 15 - LECSC-T LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. No.

Plug-in/Plug Lead: Single Unit

2 4 T 5 1 3 SQ 16 16 13 A 40 53 66 53 66 B A VQ5000 VQ0 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 VQ4 3-Rc 1/2 (P), 4 (A), 2 (B) port VQ5 Bottom ported drawing VQZ 16 M5 ground screw VQD SMC 4(A), 2(B) port 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position

CE

1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

Non-locking push type Slotted locking type, Knob locking type Note 2) Manual override 2 to 10 stations: W = 26n + 172 11 to 16 stations: W = 26n + 199 2 to 10 stations: W = 54n + 227 11 to 16 stations: W = 54n + 264 Note 3) SY3000 Weight W (g) n: Stations (D-sub connector) Main valve/pilot valve common exhaust type Internal pilot External pilot Pilot exhaust type Pilot valve individual exhaust

Rotary Actuator/Vane Style Series CRB2

Stopper ring Block CRJ CRA1 CRQ2 Stopper ring Block Block Block MSQ Counterclockwise Counterclockwise 2> 2-2> MSZ The maximum rotation range of the shaft with single flat in Fig. 2-2 is 195, from end of rotation q to end of rotation w.

EXxx-OMN0027CN

8 ) 1 0 8DI 10h EX600-DXC1 (8 ) () 1 0 8DI 10h EX600-DXD (16 ) 2 0 16DI 11h EX600-DXE (16 ) 2 0 16DI 11h EX600-DXF (16 ) 2 0 16DI 11h EX600-DYB (8 ) 0 1 8DO 20h EX600-DYE (16 ) 0 2 16DO 21h EX600-DYE1 (24 ) 0 3 24DO 22h EX600-DYF (16 ) 0 2 16DO 21h EX600-DME (8/8 ) 1 1 8DX 30h EX600-DMF (8/8 ) 1 1 8DX 30h EX600-AXA 4 (2 byte/1 ) 0 2AI 51h (2 ) (2 ) 0 4 EX600-AYA (2 byte/1 ) 2AO 61h

MHx-OMY0005

MHF2-8D MHF2-12D MHF2-16D MHF2-20D mm 8 12 16 20 MPa 0.150.7 0.10.7 oC -1060 mm 1) 0.05 120 c.p.m. 120 60 2) 1 N 19 48 90 141 8 12 16 20 () mm 16 24 32 40 32 48 64 80 65 155 350 645 85 190 445 850 3) g 120 275 650 1,225 1) 0.15mm 2) 0.5MPaL=20mm 3) 4 2 2-1 1. ( ) 2. 3. 4. 2-2. 1. 2. (1) (2) (3) 5 3. 4. 5. 6. (1) (2) ,2 , 7.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Center pusher assembly Through hole MHSH3 Dust cover Spring type Pushing out work piece with external cylinder Cylinder type Air blowing 2 Finger Air Gripper Parallel Type Series MHS2 16, 20, 25, 32, 40, 50, 63 How to Order Cylinder Bore Size MHS 2 D 20 16 to 25 F9N Number of auto switches Number of fingers Nil S 2 pcs. 1 pc. 2 2 fingers Auto switch type Nil Without auto switch (built-in

VQC

In case of branch type C12 (for 12) N13 (1/2") N3 (5/32") N7 (1/4") N9 (5/16") VQC201 3.2 2.2 C8 (For 8) C10 (For 10) C12 (For 12) ^{Metal seal Rubber seal VQC400 Rc 1/2 6.9 6.3 N7 (1/4") N9 (5/16") N11 (3/8") (NPT, NPTF, G) Series VQC4000 to 140 Rc 1/4 Rc 3/8 Rc 1/4 (Bottom ported) VQC401 7.3 6.4 Rc 3/4 (NPT, NPTF, G) (NPT, NPTF, G) 2-2-8 2-2-9 9 Cylinder Average Speed}