8 (left side) One-touch fitting 10 (left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L C8L C10L Control equipment Symbol Nil A AP M MP F G C E Air filter with auto drain 10 stations 10 Air filter with manual drain Note) When equipped with control unit, one or two stations are used for mounting.
MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.
to 50 oC Detection method Heating type sensor (branch flow type) Rated flow range 10 to 1000 L/min 20 to 2000 L/min Instantaneous flow 10 to 1050 L/min 20 to 2100 L/min Set point range Accumulated flow 0 to 999,999,999,990 L Flow specifications Instantaneous flow 1 L/min 2 L/min Minimum resolution Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.)
V) 1 0 V 0.10 V 10 V 1: The analogue output current from the connected equipment should be 20 A or less when selecting 0 to 10 V.
Material Description Part number No. 4 5 10 NBR Gasket VVQ5000-80A-1 Type 10 NBR Gasket VVQ5000-80A-2 Option A 1 station Note) Spare parts consist of sets containing 10 pcs. each.
V) 1, 2 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range Maximum value of rated flow range PFMC7501 5 L/min 500 L/min PFMC7102 10 L/min 1000 L/min PFMC7202 20 L/min 2000 L/min 1: Analogue output accuracy is within 3%F.S. 2: Set the current to the analogue output from the connected equipment to 20 A or less when selecting 0 to 10 V.
Parameter Definition Item Content Default setting 0: -10..10 V 1: -5..5 V 2: -20..20 mA 3: 0..10 V 5 Analog Range Set the analog input range per channel. Selects the analog input range. 0..10 V 4: 0..5 V 5: 1..5 V 6: 0..20 mA 7: 4..20 mA 0: None None 6 Analog Filter Sets analog input filtering time per channel.
V) 1, 2 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range Maximum value of rated flow range PF2MC7501 5 L/min 500 L/min PF2MC7102 10 L/min 1000 L/min PF2MC7202 20 L/min 2000 L/min 1: Analogue output accuracy is within 3%F.S. 2: Set the current to the analogue output from the connected equipment to 20 A or less when selecting 0 to 10 V.
Port size Symbol 01 02 02 03 03 04 Body class Port size 1/8 1/4 1/4 3/8 3/8 1/2 Pilot port thread type 2 Symbol Nil N Thread type Rc NPT 3 4 Integral fitting type/Variations Model LVH20 LVH30 LVH40 Orifice diameter 4 8 10 Tubing O.D. Metric 3, 4, 6 6, 8, 10 10, 12 Valve type Inch 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 Symbol Type Basic type N.C.
Material Description Part number No. 4 5 10 NBR Gasket VVQ5000-80A-1 Type 10 NBR Gasket VVQ5000-80A-2 Option A 1 station Note) Spare parts consist of sets containing 10 pcs. each.
Y:4.5 to 7 D: 6 to 8 Y: 146.1 Rc 1/4, 3/8 (P port) MAX.10 D: 146.6 Pg9 D: 99.4 116.4 Y: 101.4 118.4 D: 90.4 107.4 Y: 92.4 109.4 : With light/surge voltage suppressor ( ): Dimensions for external pilot 4-8-9 10 Series VP300/500/700 Dimensions: VP700/Body Ported Grommet terminal (E) Grommet (G) Applicable lead wire O.D. 2.3 to 2.8 163 162 72.4 82.4 62.9 72.9 (103.5) (External pilot port) (Rc
(Becomes close to the trapezoidal acceleration as the setting value reaches 0) Acceleration and deceleration ratio 10 10 10 10 to 100 EQFS251 to 50 EQFS321 to 70 EQFS401 to 70 Torque when held *2 50 70 70 Sets the torque when stopped after the positioning operation. (Unit: %) H 140 80 80 Sets the position loop P constant.
1100 1200 1000 1100 1200 mm/s 500 500 410 340 250 200 170 [mm/s] () 30 20 10 [mm/s] () 49 33 17 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 mm/s 400 200 400 200 400 200 [mm/s] () 20 10 20 10 20 10 [mm/s] () 25 13 27 14 30 15 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 mm/s 300 250 150 350 250 200 [mm/s] () 20 10 20 10 [mm/s] () 25 13 27 14 -109No.JXC-OMT0001CN-C
Refer to the table for each pressure specification (page 79) Display/set pressure range Display/min. setting unit Power supply voltage 12 to 24 VDC 10%, ripple max. 10% (p-p) Electric spec.
n x 10 M5 both sides common air pressure supply (P) port P P Note 1) The above dimensions are for ZZA103-00.
Material Number Description NBR VVQ4000-80A-1 10 Gasket r Option NBR VVQ4000-80A-2 10 Gasket t A C y For 1 station Nil W Standard Stainless steel VVQ4000-80A-4 10 Clip For 2 stations(3) (2) IP65 enclosure is dust Note) Spare parts consist of sets containing 10 pcs. each.
kPa 25 kPa 50 kPa Electrical Power supply voltage 12 to 24 VDC (10%), and power supply ripple (p-p) 10% at max. spec.
Air flow SW:1 10 10 Air flow SW:10 5 5 Air flow SW:10 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance mm Installation distance mm 28 Doc.