562 MHKL2-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.
562 MHKL2-12S 90 105 20 9 11 12 9 Normally open Normally closed MHKL2-16S 165 28.6 14.6 14 16 17 MHKL2-20S 314 34 16 18 20 32 MHKL2-25S 565 41 19 22 25 53 L1 Single acting MHKL2-12C 105 20 9 11 12 11 L2 MHKL2-16C 166 28.6 14.6 14 16 22 MHKL2-20C 314 34 16 18 20 40 MHKL2-25C 565 41 19 22 25 63 Note) At the pressure of 0.5MPa , when holding point L is 20mm.
34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.
(Tolerance 30%) OUT() Blue(Black) 5.3-41 2 Color Indication Style Solid State Switch/Band Mounting D-H7NW/D-H7PW/D-H7BW Applicable Actuator Series Grommet Series Bore size (mm) The suitable operating point can be indicated with a green light.
of MXQ20-50 12 6.5 NA x M6 x 1 thread depth 6 12 36 48 25 K 12 6.5 41.5 0.5 6.5 46 Z ZZ (NN-1) x H G H 26 10.5 26 10.5 A B 5.1 5.1 9.5 9.5 11 11 29 6 B A NN x M6 x 1 thread depth 12 5H9 depth 5 HA GA 5H9 depth 5 +0.030 0 Section AA Section BB +0.030 0 (mm) ZZ 108 108 108 118 136 169 226 254 282 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5 K 31 41
Auto switch model D-P3DWm B 41 Hs 35 Ht A Bore size 50 63 80 14.5 6.5 16.5 10 47 44 30.5 17 55 54 Note) Adjust the auto switch after confirming the operating conditions in the actual setting. Operating Range Auto Switch Mounting Bracket/Part No. (mm) Bracket part no.
20 40 18 16 34 314 MHKL2-20C Dust cover adhesion (Finger part only) 25 63 22 19 41 565 MHKL2-25C Dust cover caulking Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.
37.5 34.5 25.5 38.5 40 33 35.5 26.5 36 32 28.5 29.5 31 24 27 80 46 42.5 39.5 29.5 43.5 45 38 40.5 30.5 41 36 32.5 33.5 35 28 31 100 50 46.5 43.5 31.5 47.5 49 42 44.5 32.5 45 38 34.5 35.5 37 30 33 41 Compact Hydraulic Cylinder Double Acting/Double Rod: 3.5MPa Series CHQWB B 32 to 100 D-A9 D-F9 D-F9W A B Approx.
19.8 MHKL2-12S 90 12 2.0 (9) 11 9 20 3.7 Normally open Normally closed MHKL2-16S 16 3.8 (17) 14 14.6 28.6 5.8 MHKL2-20S 20 7.2 (32) 18 16 34 11.1 MHKL2-25S Single acting 25 11.9 (53) 22 19 41 19.9 MHKL2-12C 12 2.5 (11) 11 9 20 3.7 MHKL2-16C 16 4.9 (22) 14 14.6 28.6 5.9 L1 MHKL2-20C 20 9.0 (40) 18 16 34 11.1 L2 MHKL2-25C 25 14.2 (63) 22 19 41 19.9 Note) At the pressure of 72.5 psi (0.5MPa
Double acting spring type Single acting RSH20T-PS RSH32T-PS RSH50T-PS RSH63T-PS RSH80T-PS Double acting RSH20D-PS RSH32D-PS RSH50D-PS RSH63D-PS RSH80D-PS RSH-R20 RSH-R32 RS1H-R50 RS1H-R63 RS1H-R80 Set of items 37 to 41 in above table Set of items 37 to 41 in above table (not including 39) The seal kits for 20 to 32 consist of items 37 to 41 and those for 50 to 80 consist of items 37 to 41
B [Tightening torque] L[]ZB[]3 M30 x 1.5 [1820Nm] L[]ZB[]5 M45 x 1.5 [2426Nm] *Use locking m echanism when m ounting Caution L[]ZB[]3 4 Across flat 26 L[]ZB[]5 5 Across flat 41 42 Direct m ounting on the m otor the motor Model no.
Model Weight [kg]*1 Dimensions [mm] HRR010-A 43 Height 485 x Width 610 x Depth 820 HRR010-W 41 Selection HRR012-A HRR018-A 54 Warning Height 575 x Width 610 x Depth 820 HRR012-W HRR018-W 55 1. Model selection When selecting a thermo-chiller model, the amount of heat generation from the users equipment must be known.
Weight (g) Model D-A90 6 30 D-A90V 6 30 D-A93 6 11 30 47 D-A93V 6 30 47 D-A96 8 41 D-A96V 8 41 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-A90/D-A93/D-A96 D-A90V/D-A93V/D-A96V 2 2.8 4.5 2.7 Slotted set screw M2.5 x 4 L 4 24.5 (22) 22 2 6 Slotted set screw M2.5 x 4 L D-A90 without indicator light Indicator light 2.7 D-A90V without indicator light Indicator
34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.
34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.
PSE3 Applicable pressure sensor For compound For vacuum For low pressure For positive For low differential Rated pressure range -100 to 100 kPa 0 to -101 kPa 0 to 100 kPa 0 to 1 MPa 0 to 500 kPa 0 to 2 kPa Set pressure range 1 -101 to 101 kPa 10 to -101 kPa -10 to 100 kPa -0.1 to 1 MPa -50 to 500 kPa -0.2 to 2 kPa Set pressure resolution 0.2 kPa 0.1 kPa 0.1 kPa 0.001 MPa 1 kPa 0.01 kPa
(Refer to page 403 for details of the MK2T series.) 12, 16 20, 25 103 101 MK 102 (MK2T) Allowable moment of inertia [kgm2] Allowable moment of inertia [kgm2] 104 MK 103 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 (MK2T) MK (MK2T) Allowable
IP65 -1060 -2070 () 3585RH() AC250 V1 50 M(DC50 V) 2F.S.(050 25)3F.S.(-1060 25) CEUL/CSARoHS 01 02 C01 N01 N02 A2 B2 R1/8 M50.8 Rc1/8 NPT1/8 R1/4 NPT1/4 M50.8 URJ1/4 TSJ1/4 M50.8 M50.8 C3604SUS316L PSE563 5.1 3 m 2 0.2 mm 1.12 mm PSE56--28: 2 5.1 3 m 2 0.2 mm 1.12 mm 193 g 200 g 194 g 201 g 187 g 203 g 193 g 101 g 108 g 102 g 109 g 95 g 111 g 101 g -12No.PS-OMG0005CN-E [mA]
ON-OFF 1 L/min ,10 11 12 1 L/min () SI SI PF3W ON-OFF () ON 0 PVC -15No.PF-OMM0004-D IN IN (75 ) 9022545 -16No.PF-OMM0004-D (PF3W704/720/740 ) (M44 ) 8 1.5 mm (81 ) (PF3W711 ) (M54 ) 2 mm (81 ) -17No.PF-OMM0004-D (PF3W704/720/740 ) 3.04 8 0.50.7 Nm (81 ) ,, (4 ) (PF3W711/721 ) ,(4.0,4 ) 1.01.2 Nm (81 ) (4 ) -18No.PF-OMM0004-D () M8 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41
Specifications 41 Specifications 41 Dimensions 42 Output Unit Summary of Product Parts 43 Mounting and Installation 44 Installation 44 Wiring 45 Specifications 48 Specifications 48 Dimensions 48 -1No.EX-OMI0032-G Input Unit Summary of Product Parts 49 Mounting and Installation 50 Installation 50 Wiring 52 Specifications 56 Specifications 56 Dimensions 56 Maintenance 57 Troubleshooting 58