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Function Function Pin no. 24 V 1 1 COM+ COM+ 24 V COM COM 0 V 2 2 0 V Pulse signal 3 3 NP+ NP+ Pulse signal NP NP Pulse signal 4 4 Pulse signal Note 1) Note 1) Pulse signal 5 5 PP+ PP+ Pulse signal PP PP Pulse signal 6 6 Pulse signal Input 7 7 SETUP SETUP Input Input 8 8 RESET RESET Input Input 9 9 SVON SVON Input Input 10 10 CLR CLR Input Input 11 11 TL TL Input Load Load Output 12 12 TLOUT

Signal name 1 24 V 1 24 V (Control and input) (Control and input) 2 24 V (Output) 2 24 V (Output) 3 0 V (Control and input) 3 0 V (Control and input) 4 0 V (Output) 4 0 V (Output) 5 Not used (4) EX600-ED5-# PWR IN: M12 4-pin Plug A-coded PWR OUT: M12 5-pin Socket A-coded Configuration Pin No. Signal name Configuration Pin No.

Analog Output Flow rate/Analog output Fluid temperature/Analog output A B B Output Output A C Voltage output 0.6 V 1 V 04/20/40 11 21 C D C Current output 2.4 mA 4 mA 1 V 1.5 V 6 mA 1.4 V 5.6 mA 1.5 V 5.9 mA 5 V Voltage output 4 mA 20 mA Current output C D The values of B vary according to the range.

(See the graph left.) 5 Sensor output voltage V Output voltage (V) 1 Pressure P 0 Rated voltage Pressure Vacuum Absolute vacuum ZSE5B/6B: 100[kPa] to 100[kPa] = 1 to 5 [V] 3.14-6 Technical Information 4 Difference between NPN and PNP output PNPN Fig.1 shows an example of an NPN switch. The solid state switch output is an open collector output.

US1 indicator Table. 6-5 US1 indicator US1 Meaning OFF US1 is not present or is below the dropout level (< approx. 17 V DC). Flash US1 is below the permissible level but above the dropout level (17 to 20.4 V DC). ON US1 is present (> approx. 21.6 V DC). 6.4.6. US2 indicator Table. 6-6 US2 indicator US2 Meaning OFF US2 is not present or is below the dropout level (< approx. 17 V DC).

20+50 2 n=2, 4, 6, 8, Same Different mounting D-B59W Different mounting n=2, 3, 4, 20+35(n-2) n=2, 4, 6, 8, 75+35(n-2) n=2, 4, 6, 8, 80+35(n-2) n=2, 4, 6, 8, 90+35(n-2) D-A44C n=2, 3, 4, 75+50(n-2) n=2, 4, 6, 8, 90+50(n-2) n=2, 4, 6, 8, 100+50(n-2) n=2, 4, 6, 8, 110+50(n-2) Same Same side n=2, 3, 4, 55+50(n-2) n=2, 4, 6, 8, 75+50(n-2) n=2, 4, 6, 8, 80+50(n-2) n=2, 4, 6, 8, 90

6 D-F9B(V) OUT(+) Brown [Red] D-F9NV, D-F9PV, D-F9BV M2.5 x 4 Slotted set screw 4.3 Main circuit of switch 2 Indicator light OUT() Blue [Black] 20 2.7 2.8 4.6 3.8 3.1 6.2 4 Most sensitive position 6 15 Solid State Switches with 2-Color Display: Direct Mounting Type D-F9NW(V), D-F9PW(V), D-F9BW(V) Specifications Grommet D-F9W, D-F9WV (with indicator light) D-F9NW D-F9NWV D-F9PW D-F9PWV D-F9BW

Parameter Definition Item Content Default setting 0: -10..10 V 1: -5..5 V 2: -20..20 mA 3: 0..10 V 5 Analog Range Set the analog input range per channel. Selects the analog input range. 0..10 V 4: 0..5 V 5: 1..5 V 6: 0..20 mA 7: 4..20 mA 0: None None 6 Analog Filter Sets analog input filtering time per channel.

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

A73C A72H A73H E76A E73A F79 F7P J79 F79W 200 V Relay, PLC 2-wire 100 V 12 V Yes 24 V Connector 3-wire (NPN equivalent) IC circuit 10 5 V Grommet 2-wire 24 V Relay, PLC 100 V 12 V F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 10 16 20 25 32 3-wire (NPN) 3-wire (PNP) 24 V IC circuit 16 20 25 32 5 V, 12 V Diagnostic

[GSDML ] PLC H.T Enable [Fault_MA] [Fault Mode] Disable 6 [Fault_MA] [Fault Value] 2 0 Enable 3 7 [Idle_MA] [] Disable 1ScaledH.T.Upr_LmtUpLm/SclLwr_LmtLwLm/Scl 2 3PLC STOP -46No.EX-OMQ0015CN . 0..10 V 0.00+10.45 V +0.05+10.50 V 0.00+10.50 V 0..5 V 0.00+5.22 V +0.03+5.25 V 0.00+5.25 V 1..5 V +0.75+5.22 V +0.78+5.25 V +0.75+5.25 V 0..20 mA 0.00+20.90 mA +0.10+21.00 mA 0.00+21.00

12 V Solid state auto switch Reed auto switch 12 V IC circuit Diagnostic indication (2-color display) 5 V,12 V Relay, PLC 24 V Yes Grommet 12 V Water-resistant (2-color display) IC circuit 5 V,12 V 12 V Magnetic field resistant (2-color display) 2-wire (Non-polar) P3DW 3-wire (NPN equivalent) 5 V A96 A96V IC circuit Yes 24 V Grommet A93 A90 A93V A90V 100 V Relay, PLC 2-wire 12 V

T1 = V/a1 = 200/3000 = 0.067 [s], T3 = V/a2 = 200/3000 = 0.067 [s] 40 0.5 200 (0.067 + 0.067) 200 T2 = = = 0.133 [s] L 0.5 V (T1 + T3) V T4 = 0.2 [s] Therefore, the cycle time can be obtained as follows.

(Range) (Lwr_Lmt) (Upr_Lmt) -10..10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..5 V 5.25 to + 5.22 V 5.22 to +5.25 V -20..20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00 mA 4..20 mA +3.00 to +20.90 mA +3.10 to +21.00 mA -52No.EX-OMN0034

Symbol/Type Compact Pad U: Flat UM: Flat with groove B: Bellows Pad diameter 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16 How to Order ZP3 015 U N Pad unit Pad diameter Symbol Pad material Material Symbol NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber Pad diameter 015 02 035 04 06 08 10 13 16 N S U F GN GS 1.5 2 3.5 4 6 8 10 13 16 Pad typePad diameter Pad diameter (

6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !4 q Component Parts Replacement Parts No. Description Material Note 1 Body Aluminum alloy Silver baking finish Model Order no. Contents IL201 KT-IL201 Set of left nos. u, i, o, !2, !3, !6, !7, !8, !9 IL211 KT-IL211 Set of left nos. u, i, o, !0, !2, !3, !6, !7, !8, !

Operating Range Bore size Auto switch model Bore size (mm) Auto switch model 5 6 8 5 6 8 D-A9 /A9 V D-M9 /M9 V D-M9 W/M9 WV D-M9 AL/M9 AVL 11.5 12.5 12 D-A9 /A9 V D-M9 /M9 V D-M9 W/M9 WV D-M9 AL/M9 AVL BS5-125 BS5-125 BS5-160 6.5 6.5 6 * Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.)

Wireless Wireless Communication channel WEB distance Protocol Base Remote select function function (F.C.S.) 1 EXW1 EXW1 Up to 100 m V.1.0/V.2.0*1 Available*2 2 EXW1 EXW1+EX600 *3 V.1.0 NA 3 EXW1 EX600 Up to 10 m V.1.0 NA 4 EX600 EXW1 Up to 10 m V.1.0 NA Available*4 5 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*4 6*5 EX600 EX600 Up to 10 m V.1.0 NA Available *1: For more details, check

D-F9BAL 5 5.5 6 6 6 6.5 D-A9(V) D-M9(V) 9 9 9 9 9 10.5 3 3.5 3.5 3.5 3.5 4 The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).