Series: 1 (VQZ1000), Composite Symbol: 1 (2 Position Single), Seal Type: 1 (Rubber Seal), Function: B (High Speed Response 0.9W - DC Only), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: 01 (Base Mounted w/Sub-plate Rc1/8), Q: Q (CE Marked)

Series: 1 (VQZ1000), Composite Symbol: 1 (2 Position Single), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: LO (L Plug w/o Connector), Manual Override: B (Locking Slotted Style), IP65 Compliant: No, Port Size: w/o Sub-plate, Q: Q (CE Marked)

Series: 2 (VQZ2000), Composite Symbol: 1 (2 Position Single), Seal Type: 1 (Rubber Seal), Function: B (High Speed Response 0.9W - DC Only), Coil Voltage: 5 (24VDC), Lead Wire: LO (L Plug w/o Connector), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: 02 (Base Mounted w/Sub-plate Rc1/4), Q: Q (CE Marked)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 3 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 01 (1/8), Thread: T (NPTF), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 3 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 01 (1/8), Thread: T (NPTF), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 6 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 01 (1/8), Thread: T (NPTF), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Clean Room Regulator/Fluoro Resin Type Series SRF30

6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

Moisture Control Tube

Calculation method of volume ratio (Kv value) Necessary effective length = Basic condition length L x Correction factor C1 x C2 x C3 Calculate the piping volume Vt and the actuator volume Vc and substitute them into equation q below.

Series GS40 Digital Pressure Sensor

Accessory None Bracket (Available M5 type only) Nil B 14-11-17 Series GS40 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Wiring Mounting and Piping Warning Caution 1.

Series GS40 Digital Pressure Sensor 1

Accessory None Bracket (Available M5 type only) Nil B 14-11-17 2 Series GS40 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Wiring Mounting and Piping Warning Caution 1.

Speed Controller: Standard Type Series AS In-line Type 1

Description Material Note q w e r t y u i o Brass Brass Brass Brass Brass HNBR Brass NBR NBR Body B Body Needle Lock nut Handle U seal Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated AK ASS ASR Electroless nickel plated 4.5 x 3 x 0.75 2.2 x 0.8 x 0.7 Needle guide O-ring O-ring ASF Construction: AS1000-M5 Component

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

1 No. q w e r t y u i o !0 !1 !2 Material Note Description Body A Handle Body B Needle Needle guide Lock nut Panel nut U seal Spacer Cassette Packing O-ring PBT PBT Brass Brass Brass Brass Brass HNBR PBT POM, Stainless steel NBR NBR Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Note) !

Vacuum Saving Valve

Pad side q u Description Component Parts Material Surface treatment No.

CV/MVGQ

. + Plug Connector Caution q Connector installation and removal OTo install the connector, squeeze the lever and the connector body with your fingers, slide the connector straight over the pin, and lock it in place by pushing the tab of the lever into the groove in the cover.

Manifold Type: Base Mounted, Bar Manifold, Compact, Individual Wiring, Valve Stations: 2 Stations, A, B Port: ø6 One-touch Fitting G, Q: Q (CE Marked)

Manifold Type: Base Mounted, Bar Manifold, Compact, Individual Wiring, Valve Stations: 5 Stations, A, B Port: ø6 One-touch Fitting G, Q: Q (CE Marked)

Manifold Type: Base Mounted, Bar Manifold, External Pilot Capable, Individual Wiring, Valve Stations: 3 Stations, A, B Port: 1/4" One-touch Fitting, Q: Q (CE Marked)

Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 2 Stations, A, B Port: NPTF, Q: Q (CE Marked)