RHC

23 15.5 26.5 19 21.5 14 13.5 27.5 21 CX 50 50 43 43.5 40.5 88 78 18 28.5 15 23.5 13.5 27 17 22 12 11.5 28 21.5 63 63 50.5 50.5 47.5 95 85 18 28.5 15 23.5 13.5 27 17 22 12 11.5 28 21.5 CY 13 80 80 59 103.5 93.5 30.5 16.5 29 15 27.5 13.5 27 15 100 100 69.5 114 104 32.5 18.5 31 17 29.5 15.5 29 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

JA/JAH/JB/JS

17 17 19 19 19 22 24 24 27 2.4 3.2 4 5 5 5 6 6 6 7 7 7 8 10 10 11 6.4 8.1 9.2 11.5 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 5.3 6.8 7.8 9.8 12.5 12.5 16.5 16.5 16.5 18 18 18 21 23 23 26 CE2 ML2B C J G5-S CV MVGQ CC RB Floating Joint Replacement Parts Dust cover Order with the following part no. if dust cover is damaged.

HRX-OM-M090

Press the [SEL] key 17 times. The set screen of drain pan set [Optional Accessories] is displayed on the digital display. PV SV 3. Select drain pan set [Optional Accessories] from the table below with [] key or [] key, and confirm by pressing SEL.

LEH_C

/LEHF .17 3.1 . 17 3.2 . 18 3.3 . 19 4.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

27.1 31.1 32.1 36.1 14.2 14.3 R 1/8 12 13.5 18.5 16 17 18.5 21.0 19 32 18.2 18.5 R 1/4 17 29.4 35.4 34.4 40.4 34 36 Reference dimensions for M5 and R threads after installation. 20.0 Inch Size A L4 Model Weight (g) M1 d D2 L2 L3 D1 L1 H T Max.

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

Cylinder with Lock Series MNB

26 37 to 750 Bore size (mm) MM J T S U V GF K L Q RR H VA W Z ZZ P GE N 32 M6 x 1.0 34 154 M10 x 1.25 13 6.5 18.3 6 23 37 10.5 47 13 6.5 224 234.5 1/8 88.5 27 40 M6 x 1.0 39.5 161 M14 x 1.5 13 8 19.5 6 23 41.5 11 51 16.5 9 235 246 1/4 96.5 27 50 M8 x 1.25 47 183 M18 x 1.5 17 9 22.4 7 30 47.5 15 58 20 10.5 271 286 1/4 111.2 31.5 63 M8 x 1.25 55.5 197 M18 x 1.5 17 8.5 20.7 7 30 55 15 58 23

MXS Series Air Slide Table

13 45.5 MXS-AS20-X11 15 37.5 I MXS-AS20-X12 25 47.5 J H MXS-AS25 5 32.5 MXS25 MXS-AS25-X11 15 42.5 25.5 M8 X 25 M8 X 25 17 6 31 19 26.5 M14 X 1.5 16 53.5 MXS-AS25-X12 25 52.5 Note: Never replace the original adjuster bolts with urethane bumpers with shock absorbers or stopper bolts.

Self-seal Fittings Series KC

33.9 35.9 40.3 43.2 10 17 38 17 18.5 24 19.5 16.5 12 40.7 20.9 20.9 22 25.5 45.7 24.8 21.3 Reference dimensions after R(PT) installation.

MU

22 27 32 38 CJ 7 10 10 14 16 DH 11 13 13 17 19 CI 17 22 27 32 38 DF 4 7 10 12 14 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 CF 4 7 10 12 14 DB 23 27 31 37 48 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Size 25 32 40 50 63 Size 25 32 40 50 63 Part No.

Best Pneumatics Vol. 14

Note 7) When N is specified in the end of part number of auto-drain, applicable tubing O.D should be 3/8". 14-2-16 17 F.R.L. Unit Series AC10A to 40A Dimensions AC10A/20A A N F E P K C G G IN OUT Q Q F.R.L.

VCL

36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class H 17-2-35 8 Series VCL How to Order Manifold How to Order Manifold Assembly VV2C L 2 02 01 Enter the mounting valve and option part numbers under the manifold base part

VCS

36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 30 50 94 41 13.5 17 36 25 23 M5 8 VCS41 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 17-2-45 8 Series VCS How to Order Manifold How to Order Manifold Assembly VV2C S D 2 02 01 Enter the mounting valve and option part numbers under the manifold base part number.

CNS

17 17 D-A59W Ht D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 12 13 7 6 6 7 D-Y7BAL D-F59F/F5/J5 D-F5W/J59W D-F5BAL/F5NTL B 5 5 5.5 Proper Auto Switch Mounting Position/ Auto Switch Mounting Height D-G39/K39 11 11 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Please consult with SMC when replacing seals and bearings (wear rings). 8-17-13

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

SVRE 17 SVRE Output ESTOP Note 2) ESTOP Note 2) Load Load Output 18 18 Output ALARM Note 2) ALARM Note 2) Load Load Output 19 19 Output Load Load Output 20 AREA AREA 20 Output FG Round terminal 0.5-5 FG Round terminal 0.5-5 Note 1) For pulse signal wiring method, refer to Pulse Signal Wiring Details.

HRX-OM-X037

(Recommended tightening torque178 to 185Nm) Gasket (1) CH1 particle filter Fig. 3-17 CH1 side Installation of particle filter HRL Series 3.3 Installation 3-33 HRX-OM-X037 Chapter 3 Transport and Setting Up 3. Attach the CH1 filter bracket.

7ND9071en

16 1 Special screw 17 1 Hexagon nut 18 2 Washer 19 2 Hexagon screw 54 2 Plug 7 ND90 71 en 53 12.9 Connection diagrams See Section 9.1.3 for additional limit switch data.

JXCx-OMT0005CN

Byte 14 *1 *2 0.01mm 15 16 17 Byte18,19 Byte 18 *1 *2 1% 19 *1 *2 21(P.85 Output 36Byte Byte12,13 Byte 12 1 *1 *2 1mm/s 2 13 Byte14,15 Byte 14 1 *1 *2 1mm/s 2 15 Byte16,17 Byte 16 *1 *2 1% 17 *1 *2 21(P.85 40 - Byte18,19 Byte 18 *1 *2 1% 19 Byte20,21 Byte 20 *1 *2 1mm/s 21 Byte22,23 Byte 22 *1 *2 1% 23 Byte24-271 Byte 24 1 -+ *2 0.01mm 25 26 27 Byte28-312 Byte 28 2 -+ *2

Magnetically Coupled Rodless Cylinder

79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130 148 M 5 5 6 7 8 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 N 6 7 6.5 8.5 11 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 18 17 20 26 34 T 19 20.5 21.5 24 26 TC 17 20 22.5 28 33 P (Piping port) Model Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3R15 CY3R20 CY3R25 CY3R32