Vacuum Unit

Number of Manifold Stations that can be Operated Simultaneously in page 18.

CV/MVGQ

30 32 40 40 52 52 10 10 10 14 14 30 35 35 40 40 9 9 11.5 13.5 13.5 4 4 0 0 0 12 12 15 18 18 60 70 86 102 116 80 90 105 130 150 27 32 32 37 37 71 81 101 119 133 60 70 86 102 116 42 50 59 76 92 100 110 130 160 180 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 The minimum stroke of the one with rod boot is 20 mm or more.

HRX-OM-Z002

(Note3) (1)Ambient temp. : 32, (2)Circulating fluid : Tap water, (3)Circulating fluid rated flow, (4)Power supply : 200 VAC. (Note4) (1)Ambient temp. : 32, (2)Circulating fluid : Tap water, (3)Circulating fluid temp. : CH1 : 20/CH2 : 25, (4)Circulating fluid rated flow, (5)Power supply : 200 VAC, (6)Piping length : Shortest, (7)Rated cooling load is applied.

VZ100/300/500

DXT170-34-1B Note With screw (For VZ32) Refer to pages 4-6-18 to 4-6-28 for manifold use.

CE

M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49

Compact Cylinder

) 32, 40 50, 63 10 +0.058 0 18 0.3 0.5 14 +0.070 0 22 0.3 0.5 Applicable bore size (mm) A1 E1 L1 MM RR1 U1 Part no.

Air Cylinder

Up to 300 22 19.5 42 17 31 10 24 8 9 38 6 M5 x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16

MTS

18 (33) 0 (15) 12 D-M9, D-M9V 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-A9, D-A9V 0 (15) 0 0 32 32 (47) 22 22 (37) 0 (15) 16 D-M9, D-M9V 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-A9, D-A9V 0 (15) 0 0 38 38 (53) 26 26 (41) 0 (15) 20 D-M9, D-M9V 10 (17) 0 0 38 38 (55) 26 36 (43)

HRX-OM-X037

Required facility water system (for water cooled type) Table 3-1 Heat Radiated Heat Facility water specifications Model Radiated kW HRL100-W*-40 Approx.18 Refer to 9.1 Specifications.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

35H9 10 26H9 86.7 71.4 56 22 158.1 130 12 5 3 7.5 32 28 18 11.5 72.9 20 (mm) J JA JB JC JD K NA NB NC ND P Q S SD SE SF UU WA WB WC WD WE WF YA YB YC Size 10 20 30 50 6.8 11 6.5 M8 x 1.25 12 M8 x 1 10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 8.6 14 8.5

RB/RBL/RBQ

13 34 25 52 80 M27 x 1.5 50 M12 10-18-16

RB/RBL/RBQ

type Series RBQC With bumper RHC MK(2) (mm) RS Q G Model Basic type With bumper Shock absorber h Hexagon nut G LL S B E 6 10 12 16 18 D M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 H 3.5 4 4 5 5 F C 22 27 32 41 41 MM K 4 7 8 8.5 13 RBQC1604 RBQC2007 RBQC2508 RBQC3009 RBQC3213 RBQ1604 RBQ2007 RBQ2508 RBQ3009 RBQ3213 14.2 18.2 23.2 28.2 30.2 14 18 23 28 30 7 9 10 12 13 31 44.5 52 61.5

SZ3000

Refer to pages 32 through 35 for safety instructions and common precautions.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Note 2) Only non-magnetic material is permitted as the mounting surface of a 20 cylinder. 25, 32, 40 (mm) Applicable switch model Bore size (mm) D-Z7, Z80, Y59, D-Y7P, Y7W A B C D 25 18 99 43 74 32 21.5 108.5 46.5 83.5 40 23.5 124.5 48.5 99.5 Note 1) 50mm is the minimum stroke available with 2 auto switches mounted. Note 2) The above dimensions are given as reference dimensions.

Pin Clamp Cylinders

/Mounting Method Applicable cylinder -X2321/-X2322 -X2321/-X2322 -X2321/-X2322 Applicable auto switches D-P3DWAl D-M9lV/M9lWV D-A73/A79W Bore size [mm] 32 32 32 Auto switch mounting bracket part no.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

holes) 34 4 34 4 (Mounting hole pitch) (Mounting hole pitch) (Mounting hole pitch) (Mounting hole pitch) A A 24 24 P R P R 34.7 34.7 (Lead wire length) 300 65.5 51.9 55.9 [57.2] (Lead wire length) 44.5 62.1 [68.6] 300 21 32 38.6 44.5 49.5 [56] 48.1 48.1 32 21 8.5 8.5 6 6 42 17 9 17 9 15 3-Rc (PT)1/8 15 (Piping port) 24 42 24 32 32 3-Rc (PT)1/8 (Piping port) [ ] for AC Other dimensions

VM

Push button VM1010-4N-32 VM1010-4NU-32 VM1110-4N-32 VM1110-4NU-32 JIS Symbol/2 port 3 port Panel mounting hole 0.5 MPa supply Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4NU-32 VM1010-4NU-32 VM1110-4N-32 VM1010-4N-32 Bottom ported 3 port 2 port 6 N F.O.F.

HRX-OM-R026

5.13.1 Temperature unit switching. 5-32 5.13.2 Temperature unit switching setting and checking . 5-32 5.14 Pressure unit switching . 5-33 5.14.1 Pressure unit switching . 5-33 5.14.2 Pressure unit switching setting and checking . 5-33 5.15 Data reset function . 5-34 5.15.1 Data reset function . 5-34 5.15.2 Method of resetting data reset function . 5-34 5.16 Accumulated time reset function

Modular F.R.L. Unit

New Old Model Reduction (mm) Old New AC1000 AC10 4 Improved visibility for lubricant drip with graduation for lubricant control AC2000 AC20 14 AC2500 AC25 14 AC3000 AC30 14 Graduation AC4000 AC40 18 AC4000-06 AC40-06 18 AC5000 AC50 18 AC5500 AC55 18 5 6 4 7 3 SMC Spacer with bracket 8 2 AC6000 AC60 18 9 1 Embedded pressure gauge is a standard feature.

Dual Speed Controller with One-touch Fitting Series ASD

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model AK 1/8" ASD230F-U10/32-01 8.4 12 10-32 UNF 12.9 8 25.5 22.2 28.6 25.8 29.4 11.7 7.8 10 9.6 28.3 17.5 25 5/32" ASD230F-U10/32-03 9.3 13 ASS 20.7 7.8 16.5 15 3/16" ASD230F-U10/32-05 10-32 UNF 8 9.6 10 11.7 28.3 25.5 28.6 25.8 25 22.2 35.2 23.3 11.4 13.5 13 1/4" ASD230F-U10/32-07 32.6 12 ASR 30 16.5 14 3/16" ASD330F-N01-05S 39.5 39.6 23.9 11.6 34.6 17