.: 10-32, Types of Screw: UNF, Applicable Tube O.D. mm(mm): 4, Applicable Tube O.D. inch size(inch): -, Body Size: 1, Sealing Method: Gasket Seal, Hex Size H (H1)(mm): 9, Indicator window direction: 0°, Made-to-order specifications: None

.: 10-32, Types of Screw: UNF, Applicable Tube O.D. mm(mm): 4, Applicable Tube O.D. inch size(inch): -, Body Size: 1, Sealing Method: Gasket Seal, Hex Size H (H1)(mm): 9, Indicator window direction: 180°, Made-to-order specifications: None

.: 10-32, Types of Screw: UNF, Applicable Tube O.D. mm(mm): 4, Applicable Tube O.D. inch size(inch): -, Body Size: 1, Sealing Method: Gasket Seal, Hex Size H (H1)(mm): 9, Indicator window direction: 0°, Made-to-order specifications: None

.: 10-32, Types of Screw: UNF, Applicable Tube O.D. mm(mm): 4, Applicable Tube O.D. inch size(inch): -, Body Size: 1, Sealing Method: Gasket Seal, Hex Size H (H1)(mm): 9, Indicator window direction: 180°, Made-to-order specifications: None

.: 10-32, Types of Screw: UNF, Applicable Tube O.D. mm(mm): 4, Applicable Tube O.D. inch size(inch): -, Body Size: 1, Sealing Method: Gasket Seal, Hex Size H (H1)(mm): 9, Indicator window direction: 180°, Made-to-order specifications: None

.: 10-32, Types of Screw: UNF, Applicable Tube O.D. mm(mm): 4, Applicable Tube O.D. inch size(inch): -, Body Size: 1, Sealing Method: No Sealant, Indicator window direction: 270°, Made-to-order specifications: None

฀AS

Bodysize Metricsize Inchsize 100 200 205 300 400 M3,M5standard 1/8standard 1/4standard 3/8standard 1/2standard Grease-free(Sealant:Fluorocoated)+ Restrictor(WithoutCheckValve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)AS2002F-04-X21 Note)Notparticle-free 4 6 8 10 12 Withone-touchfittings Restrictor(WithoutCheckValve) -X214 Use1/8"tube.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

Series IDG

IDG60S to IDG100S IDG3 to IDG50 IDG3H to IDG50H IDG30L/ IDG50L Port size With separator regulator Symbol Bore Size 3 5 10 20 30 50 60 75 100 V IDG60 to IDG100 IDG60H to IDG100H IDG60L to IDG100L 01 1/8 02 1/4 IDG60S to IDG100S Note) Note) 03 3/8 04 1/2 Note 1) Specifications with element service indicator are also available. See the order made section on page 33.

90

Note) When ordering ejector without valve, select Nil for mounting. 04 KJH C2 Port size 04 06 03 07 !

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

00 02 04 No 2 port valves used 2 pcs.

Air Cylinder Series CM2

25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 56.5 56.5 57.5 63.5 60.5 60.5 61.5 67.5 51 51 52 57 57 57 58 63 54 54 55 60 50.5 50.5 51.5 56.5 56 56 57 62 52.5 52.5 53.5 58.5 138.5 142.5 132 138 135 131.5 137 133.5 31.5 31.5 32.5 38.5 35.5 35.5 36.5 42.5 26 26 27 32 32 32 33 38 29 29 30 35 25.5 25.5 26.5 31.5 31 31 32 37 27.5 27.5 28.5 33.5 107.5 113.5 111.5 117.5

CL

ML1C 25 Bore size (mm) Auto switch model D20 20 25 32 40 32 20 D-B5/B64 D-G5/K5 BA-01 BA-02 BA-32 BA-04 25 20 -X 10 D-C7/C80 D-H7 BMA2-020 BMA2-025 BMA2-032 BMA2-040 20Mounting screws set made of stainless steel The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

CL

ML1C 25 Bore size (mm) Auto switch model D20 20 25 32 40 32 20 D-B5/B64 D-G5/K5 BA-01 BA-02 BA-32 BA-04 25 20 -X 10 D-C7/C80 D-H7 BMA2-020 BMA2-025 BMA2-032 BMA2-040 20Mounting screws set made of stainless steel The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Guide Cylinder/Compact Type Series MGC

BM1-01 BM1-02 BM1-32 BM1-04 BM1-05 Since this is a guideline including hysteresis, not meant to be guaranteed (assuming approximately 30% dispersion).

SV

EX300-T001 General purpose Each T unit has 32 control points.

HRX-OM-R039

Weight9 kg 32 For option T : 39 *1 Use the product in conditions where freezing will not occur.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL

Modular Type Air Filters Series AF

Example) AF30-03B-2R-X430 X430 X440 Low temperature High temperature Symbol 30 40 50 60 20 Body size Description 30 40 50 60 Body size Description Symbol Nil N Note 1) Rc NPT G F Note 2) Thread type Nil N Note 1) Rc NPT G + F Note 2) Thread type 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Port size Port size + + Without mounting option With bracket Nil B Note

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.