KFx-OMV0011

soft nylon TAU Antistatic polyurethane 1/8 KFG201-P01 5/32 KFG203-P01 4 KFG204-P01 6 KFG206-P01 1/4 KFG207-P01 8 KFG208-P01 Bulkhead nut SUS316 5/16 KFG209-P01 10 KFG210-P01 3/8 KFG211-P01 12 KFG212-P01 1/2 KFG213-P01 16 KFG216-P01 4.

IDX-OM-W022

. 6 1 6 2 Refrigerant with GWP reference . 6 3 6 3 Dimensions. 6 4 6 4 Electrical Circuit . 6 5 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 7 Chapter 7 Specification for Option C 7 1 Specifications . 7 1 7 2 Precautions for the installation and handling of the product . 7 1 Chapter 8 Specification for Option K 8 1 Safety instructions . 8 1 8 2 Specifications . 8

Refrigerated Air Dryer

AM Select accessories sold separately. 6 Refer to page 99.

AIR CYLINDER

Double acting cylinder theoretical output Operating pressure Bore size mm Pressurized area Rod diameter mm Operating direction 0.3 0.5 0.7 0.9 mm2 125 32 OUT IN 140 32 OUT IN 160 38 OUT IN 6) Kinetic energy absorbed by cushion mechanism Table 4.

VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (N.C

c

Chemical resistance 260oC 260oC 260oC 200oC Heat resistance 6 6 ? 6 Flexibility ? ? ? Ion elution 6 ? ?

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

IDX-OM-U022

150 1(ANR)[2065%] 2[32] 3 4 5R IDFA100F150F 6 1 6.1 IDX-OM-U022 6.

e

(A clearance of 40 mm or greater is required.) (60) (40) (74.7) 60 101.7 80 74.7 27 70 27 72 40 Motor 43.5 71 102 42 60 5 123 129 72.4 40 22 21.3 43 32 Controller FG terminal M3 Workpiece mounting center line 4 x M4 x 0.7 depth 7 9.8 28 5 6 4 x 6 counterbore depth 3.5 3.5 through 16.5 15.5 4 T-slot section for mounting (60.3) 87.3 5.6 (Max. 8.6) 14.4 152 + Stroke 4 I/O cable Note) Motor position

HRX-OM-W069

A signal type for contact output signal 4 to 6 can be selected by the customer. Refer to Table 2.4-3 Signal type for contact output signals 4 to 6. (1) (2) (3) Setting of contact output signal 4 to 6 Selection of signal type Table 2.4-2 Setting of contact output signal 4 to 6 No.

ZR

Arrangement (Right valve station which is looked from valve side is first station.) 06 B Both sides 6 Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 1 1 1 station only 1 station only 6 6 6 stations only 6 stations only All stations A All stations A If more than one spacer is required, specify all spacers.

Line filter

With drain With drain With drain With drain With drain gauge guide cock guide cock guide B B B B B B B B B AFF20 159. 6 159. 4 146. 1 142. 1 148. 6 AFF30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AFF40 263.3 265.1 265.1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: August 2021 Addition

Mist Separator

With drain With drain With drain With drain With drain gauge guide cock guide cock guide B B B B B B B B B AM20 159. 6 159. 4 146. 1 142. 1 148. 6 AM30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AM40 263. 3 265. 1 265. 1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: September 2020 Addition

Micro Mist Separator

With drain With drain With drain With drain With drain gauge guide cock guide cock guide B B B B B B B B B AMD20 159. 6 159. 4 146. 1 142. 1 148. 6 AMD30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AMD40 263. 3 265. 1 265. 1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: August 2021 Addition

DOC1003626

A signal type for contact output signal 4 to 6 can be selected by the customer. Refer to Table 2.4-3 Signal type for contact output signal 4 to 6. (1) (2) (3) Setting for contact output signal 4 to 6 Selection of signal type Table 2.4-2 Setting for output signal 4 to 6 No.

LEC-OM036xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 30 - 9.

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

Separate the wiring of the controller and its peripheral device from that of power line and high voltage line. (6) Verify the insulation of wiring.

CRQ2

TG effective depth TL TD TB TC D (g6) DD (h9) A AU B BA BB BE J JA JB BC BD BU CA CB F H Size Rotation 20 30 90, 180 90, 180 40 90, 180 16 16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/