Low-Speed Rotary Actuator

25 Unit used as flange mount 25 Rotating range examples 25 Air supply 26 Setting of rotation time 26 Moment of inertia 27 Calculation formulae for moment of inertia 28 Kinetic energy 29 Auto switch 29 Internal structure and operation principle 29 Mounting of auto switch 30 Auto switch proper mounting position at rotation end 31 Maintenance and Inspection 31 Regular check 31 Replacement procedure

IZx-OMR0035

Air flow SW:1 10 10 Air flow SW:10 5 5 Air flow SW:10 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance mm Installation distance mm 28 Doc.

3 Port Solenoid Valve/

Page 19 * Only port size 3/4" Series Variations Series Category Port size Thread Flow rate characteristics C [dm3/(sbar)] 1R2 (PRA) 5 10 15 20 25 Residual Pressure Release Valve VP542-X536 2 8.9 3/8" Rc, G, NPT Residual Pressure Release Valve VP742-X536 1/2" 15.1 Dual Residual Pressure Release Valve VP544-X538 6.5 3/8" Rc, G, NPT Dual Residual Pressure Release Valve VP744-X538 1/2" 10.3 Dual

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

Allowable moment (Nm) Load weight (kg) m3 40 20 30 20 10 10 0 0 16 25 40 16 25 40 Bore (mm) Bore (mm) MY2C MY1C MY2C MY1C 2 Magnetically Coupled Rodless Cylinder/Low Profile Series CY1F Compact Max. 29% reduction in height (mm) Height Series 10 15 25 CY1F 28 34 46 46 63 CY1H 39.5 CY1H CY1F Short body Max. 31% reduction in overall length Reduction in length is 22% over MY2H cylinder CY1F

VCS

Orifice size Class 3 Class 2 Orifice size (mm) 2 3 4 5 7 10 Class 4 Symbol 2 3 4 5 7 10 Electrical entry G Grommet C Conduit Refer to the below table for orifice and port size combinations.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

EXH/Side Ported Type 42 Manifold Grommet: G DIN terminal: D Manual override (non-locking) Applicable cord O.D. 4 to 6.5 4Rc(PT) 1/8 (ports P, R) 83 71.5 Max .10 2-4.5 (mounting holes) 75.5 Light (DZ type only) 67.5 20.5 59 P R P R 4Rc(PT) 1/8 (ports P, R) Pg.7 11.5 18 39 18 25 31 Approx. 300 (lead wire length) 53.5 P = 19 14 5 L2 L1 8.5 11.5 49.5 11.5 18 39 nRc(PT) 1/8 (port A) 8.5 11.5

MRQB-OM0002

MRQB32,40 18 1 17 2 16 2 34 2 15 1 33 O 1 14 1 32 4 13 2 31 2 12 O 1 30 1 11 2 29 1 10 1 28 S 1 9 1 27 S 1 8 O 2 26 1 7 1 25 2 6 1 24 4 5 1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15

ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.

MHL2

10, 16, 20, 25: 40 mm, Bore size 32, 40: 80 mm.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

with 10% voltage ripple or less Power supply voltage Power supply When used as an IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Current consumption 35 mA or less Protection Polarity protection Accuracy Display accuracy 2% F .S. 1 digit (Ambient temperature of 25 3C) Repeatability 0.5% F .S.

IDX-OM-V020

Option L . 10-1 10.1 SAFETY INSTRUCTIONS FOR USE . 10-1 10.2 SPECIFICATIONS . 10-1 10.3 MOUNT THE HEAVY DUTY AUTO DRAIN . 10-2 10.4 MAINTENANCE . 10-2 Chapter 11 Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR

XL-OMY0003

XLH-16 XLH-25 XLH-40 XLH-50 16 25 40 50 5150 -6 Pa (abs) 110 l/s 1 5 14 45 80 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW SUS316L,FKM Nm 0.1 0.15 0.35 0.5 5 7 10 13 0.23 0.41 1.05 1.62 1) 3-2.

XMA/XYA Series

Specifications Model Note 1 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 Flange (valve) size 16,CF034 25 40,CF070 50 63,CF114 80 Actuating type Normally closed (Pressurize to open , spring seal) Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (High temperature type:5 to 150) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance

Check Valve Series AK 1

Model AKH03-U10/32 AKH03-N01S AKH07-U10/32 AKH07-N01S AKH07-N02S AKH09-N01S AKH09-N02S AKH09-N03S AKH11-N02S AKH11-N03S AKH11-N04S AKH13-N03S AKH13-N04S 8 11.11 10-32 UNF 1/8 10-32 UNF 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 31 31.7 21.2 20.6 22.7 22.9 25 27.7 36 35.5 48.3 40.7 41.2 54 46.5 5 10 10 11 18 16 24 43 47 40 79 87 85 Applicable tubing 5/32 2.8 12.7 2.8 6.5 6.5

Air Pilot Operated

To ehitt spool fully 12 (0.8) 25|n..n r00 (6.7) 12 (0.8) 5 (0.3) 5 (0.3) 10 (0.4 E 11 .71 10(0.7) 3. Maxlmum Permisslble 125 (8.3) 125(8.3) 125 (8.3) iledla: Alr (lubricated or oll-free), any non-flammabls, nontoxic, non-corrosive gasses except oxygen. Leakagq Port to port (intemal) not to exceed 0.030 cubic teet per minute at 100 PSIG (6.7 Kgf/cm').

Air Pilot Operated Series NVSA

To ehitt spool fully 12 (0.8) 25|n..n r00 (6.7) 12 (0.8) 5 (0.3) 5 (0.3) 10 (0.4 E 11 .71 10(0.7) 3. Maxlmum Permisslble 125 (8.3) 125(8.3) 125 (8.3) iledla: Alr (lubricated or oll-free), any non-flammabls, nontoxic, non-corrosive gasses except oxygen. Leakagq Port to port (intemal) not to exceed 0.030 cubic teet per minute at 100 PSIG (6.7 Kgf/cm').

CVRA1-E

Table 15 Parts where grease is to be applied Application of grease Grease Body (inner sliding surface) Piston(Seal groove) Slider(Sliding surface) GR-S-010 Piston seal Tube gasket 23 24 25 O-ring 5 11 1 16 12 7 23 24 12 11 4 25 4 24 25 23 -34- (2) Mount the tube gasket 11 to the left cover 3 to mount to the body 1 . (3) Insert the rack 16 and the piston 4 into the body 1 .

Air Slide Table Series MXP ø 6, ø 8, ø 10, ø 12, ø 16

12 16 Piston area (mm2) 0.2 6 10 16 23 40 MTS 0.7 20 35 55 79 141 0.6 17 30 47 68 121 0.5 14 25 40 57 101 0.4 11 20 32 45 80 0.3 8 15 24 34 60 28 50 79 113 201 With Shock Absorber Mass Standard Stroke (g) (mm) Body mass 80 105 100 160 130 210 210 320 640 830 Standard stroke 5, 10 10, 20 10, 20 15, 25 20, 30 Model MXP6 MXP8 MXP10 MXP12 MXP16 Model MXP6-5 MXP6-10 MXP8-10 MXP8-20 MXP10-10 MXP10

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 1 0-7 All disable Setting value 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 2 8-15 All enable Setting value FF 1 1 1 1 1 1 1 1 Output No. 23 22 21 20 19 18 17 16 3 16-23 All disable Setting value 00 0 0 0 0 0 0 0 0 Output No. 31 30 29 28 27 26 25 24 4 24-31 Output 24-27: Disable Output 28-31: Enable Setting value F0 1 1 1 1 0 0 0 0

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).