KFx-OMV0011 Applicable fluids are air, N2 ,water and steam. Please consult with SMC if using other fluids. (4) When it is used with water, the fittings or tubing may be damaged depending on the surge pressure. (5) Surge pressure must be under the maximum operating pressure.
Applicable Fluids Standard Option (1) Water (Standard, Up to 40C) Air (Standard, dry), Turbine oil Vacuum (Up to 1 Torr) Carbon dioxide (CO2), Nitrogen gas(N2) Freon11, 113, 114 Vacuum (Up to 103 Torr) (V, M) Non-leak (105 atm cc/sec or less) (V, M) Symbol N.C.
NOTE: The Solenoid Valve shown here is N2-DCD. Air actuation requires only 3-way air pilot valves and tubing. There is no explosion, spark, or shock risk and the components are less expensive to buy. NOTE: The Air Piloted Valve shown here is the N2-DP . The 3-Way Pilot Valves are from the MV series. Detented Valves Q: What is a detented valve and how is it used?
NOTE: The Solenoid Valve shown here is N2-DCD. Air actuation requires only 3-way air pilot valves and tubing. There is no explosion, spark, or shock risk and the components are less expensive to buy. NOTE: The Air Piloted Valve shown here is the N2-DP . The 3-Way Pilot Valves are from the MV series. Detented Valves Q: What is a detented valve and how is it used?
Only dry air, N2, CO2 and Ar are applicable. Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.
VFS ~ = ~ = VS4 VQ7 L Dimension EVS n: Stations n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 VFN L2 Body ported (Top ported) Type 21 Manifold Grommet: G DIN terminal: D VV5K3-21Station (P port) (P port) n1 = Number of VK3000 n2
Summary of Product parts Item Default setting Body Flow adjustment valve [FLU] Switch the flow rate [Air] Dry air, N2 [rEF] Setting the units criteria [Std] Standard condition [ L] L/min (L) Lock ring Display [Unit] Measurement unit seitching 1 [F 0] [FLU] [norP] SW output PNP/NPN setting 4 [PnP] PNP output [oUt] SW output Piping port (OUT side) [i_o] SW/external input setting 4 5 [oUt1]
) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4
room Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean blow (With clean gas filter) Line D: For N2
B: Fluid N2 add Specifications: Note 3) add 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved
50(5 ) * , 1015 10 1% 2053 LCD * -7No.PS-OMS0006CN-G N M5 ISE20 3 ISE20 -0.1001.000 MPa Y ZSE20 0.0-101.0 kPa K ZSE20F -100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2
Only dry air, N2, CO2 and Ar are applicable. System error Turn the power off and turn it on again. POWER FLOW Rc (NPT)1/4 12 to 14 Nm Section A Section C Power indicator is red. Nominal size of screws Width across flats of attachment Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.
..) ( n2 2 15 + 45 (n = 2, 4...) ( n 2) 2 15 10 10 60 15 60 + 45(n 2) 6-10-21 22 Series C76 Construction [First angle projection] Single acting, Single rod C7632/40-50S Spring return 50 mm stroke or less !
Fitting size (1/4) Orifice size (3) Application Introducing the full amount of supply pressure (Clean air / N2) all at once when returning the vacuum chamber to the atmosphere will cause particulates to get into the chamber. To prevent this, after slowly introducing the initial air supply and setting the pressure, switch to the main valve circuit to supply the full amount.
Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min 0 to 26.2 L/min 0 to 52 L/min Min. setting/display unit 0.01 L/
C Fluid N2 add 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved
If the error cannot be reset after the above measures are taken, then please contact SMC. -20No.PF-OMJ0016-J Specification Specifications Model PFM510 PFM525 PFM550 PFM511 Applicable fluid Dry air, N2, Ar, CO2 (air quality class to ISO8573-1 1.1.2 to 1.6.2) Dry air, N2, Ar 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min Rated flow range CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1
OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.
Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.
R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 NPT1/8 Symbol Operation manual*1 Calibration certificate*1 Nil Y K T N01 NPT1/8 Piping adapter ZS-46-N2 B Panel mount adapter *1 All texts are in both English and Japanese. Options/Part Nos. ZS-46-B When only optional parts are required, order with the part numbers listed below. Description Part no.