Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W (mm) L2 Y (mm) Size CRB2 10 X L1 5 (8 Y) to (Y 1) 3 to 8 Size CRBU2 10 15 5 to 14 9 (14 X) to (X 3) 3 to 9 6 (9 Y) to (Y 1.5) Y= L1 = 15 20 8 to 18 10 (18 X) to (X 4) 3 to 10 7 (10 Y) to (Y 1.5) L2= CRB1 20 30 10 to 20 10 (20 X) to (X 4.5) 5 to 13 8 (13 Y) to (Y 2) X = 30 40 10 to 22 12 (22 X) to (X 5) 7 to 15 9 (15 Y) to (Y 2) MSU Symbol

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W (mm) L2 Y (mm) Size CRB2 10 X L1 5 (8 Y) to (Y 1) 3 to 8 Size CRBU2 10 15 5 to 14 9 (14 X) to (X 3) 3 to 9 6 (9 Y) to (Y 1.5) Y= L1 = 15 20 8 to 18 10 (18 X) to (X 4) 3 to 10 7 (10 Y) to (Y 1.5) L2= CRB1 20 30 10 to 20 10 (20 X) to (X 4.5) 5 to 13 8 (13 Y) to (Y 2) X = 30 40 10 to 22 12 (22 X) to (X 5) 7 to 15 9 (15 Y) to (Y 2) MSU Symbol

Air Cylinder Series MB

, Same surface) 10 15 D-M9 D-M9V 1 10 15 15 + 5 (n 2) 10 + 10 (n 2) CJ1 n D-M9W D-M9WV D-M9AL D-M9AVL 2 (Different surfaces, Same surface) 15 10 CJP 1 15 10 10 + 10 (n 2) 10 + 15 (n 2) 15 + 10 (n 2) n CJ2 2 (Different surfaces, Same surface) 15 25 D-Z7 D-Z80 1 15 25 15 + 15 (n 2) 15 + 20 (n 2) 25 + 15 (n 2) CM2 n 2 (Different surfaces, Same surface) 15 25 D-Y59 /Y69 D-Y7P/Y7PV CG1

15

FJ FF 2 x FA thread depth FB FJ FC Dimensions [mm] Size Motor type FA FB FC FD FE FF FG FH FJ FK M1 M2 PD NZ 2 x M4 x 0.7 7.5 46 30 3.7 11 42 M2.5 x 10 M3 x 8 8 NY 2 x M3 x 0.5 5.5 45 30 5 11 38 M2.5 x 10 M3 x 8 8 NX 2 x M4 x 0.7 7 46 30 3.7 8 42 M2.5 x 10 M3 x 8 8 NM2 3.4 31 28 8.5 7 3.5 42 M2.5 x 10 M3 x 8 6 25 NZ 2 x M5 x 0.8 8.5 70 50 4.6 13 60 M3 x 12 M4 x 12 14 NY 2

Air Fittings & Tubing

Weight (g) a b M2 L d M1 16 17 2 2 4 6 KQ2N04-06 KQ2N06-08 17 18.5 6 8 10 12 16 38 42 47 51 55 2.5 4 6 8 9 8 KQ2N08-10 21 18.5 13.2 10 KQ2N10-12 22 21 18.2 12 KQ2N12-16 25 22 29 Tube cap: KQ2C Tube O.D.

Air Cylinder Series CA2

4, 6, 8, ) Same surface 1 10 75 80 90 20 55 Different surfaces Same surface 2 75 80 90 20 + 35(n 2) (n = 2, 3, 4, ) 75 + 35(n 2) (n = 2, 4, 6, 8, ) 80 + 35(n 2) (n = 2, 4, 6, 8, ) 90 + 35(n 2) (n = 2, 4, 6, 8, ) n Different surfaces D-A44C 55 + 50(n 2) (n = 2, 3, 4, ) 75 + 50(n 2) (n = 2, 4, 6, 8, ) 80 + 50(n 2) (n = 2, 4, 6, 8, ) 90 + 50(n 2) (n = 2, 4, 6, 8, ) Same surface 1 10 75 80 90

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Filter regulator) Blanking plate (Pressure switch) 02 2 stations VP4 10 Note) 10 stations S0700 Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

LEC-OM02704CN

(CN2) () 2. 3. () A21 3 () 1. 2. A24 (U VW) 1. 2. 3. UVW A24 10 6 10 A25 1. () 23 2. 3. 4. 23 10 7 10 A30 1. PA02 2. 3. 1. 2. 3. 4. LECSC2-AC260V LECSC1-AC135V 5. 6. 1. 2. A31 1. 2. 3. 1. 2. 4. (PA06PA07) 5. A32 ((A32) OFF/ON 1. (UVW) 2. (IPMIGBT) ON UVW (A32) (IPMIGBT) 3. (UVW) 2. 4. ) 10 8 10 A33 1. LECSC-DC400V 2.

CRB2/CRBU2/CRB1

Inertial moment . 3.5 x 10-6 kgm2 2 t E = I 2, = 1 2 Rotation time . 0.12s/90 CRB2BW, CRBU2W20 are selected in this case. 2.

Series SV

(M3 x 10, 2 pcs.)

SX

1 U side D side Valve stations Note Stations Symbol 02 2 stations Double wiring specifications(1) 10 10 stations 02 2 stations (2) Manifold base (5 stations) Available up to 20 solenoids.

AC Servo Motor Driver (CC-Link Type ）

4 150/0.08 29.1 (0.75mm2) LE-CSB-SA 2 to 10 or less 1.35 4.7 0.1 (Note 4) HRZFEV-A(CL3) AWG20 2-cores LE-CSB-SB 2 to 10 AWG20 2 21/0.18 34.6 Lock cable LE-CSB-RA 2 to 10 (Note 5) AWG20 2 110/0.08 39.0 or less 1.37 4.5 0.3 RMFES-A(CL3X) AWG20 2-cores LE-CSB-RB 2 to 10 (0.75mm2) Note 1. d is as shown below. d Conductor Insulation sheath 2.

Rotary Actuator/Vane Type

) 7 to 20 10-(20-X) to (X-1.5) 30 10 to 22 12-(22-X) to (X-5) 7 to 22 10-(22-X) to (X-2) 40 7 to 15 9-(15-Y) to (Y-2) [9-(15-Y) to (Y-4.5)] Note) Note) Values inside [ ] are for the CRBU2.

MY1

bracket mounting thread (2-M3 x 0.5 thread depth 5) 2-5 counterbore depth 2 25 24 3.5 1 2-M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110 + Stroke 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) 8-11-21 21 Series MY1B Standard Type/Centralized Piping Type 16, 20 Refer to page 8-11-9 regarding centralized piping

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

JXCx-OMT0023

] CMX CDV = 0 10 S = 0 10 1/n Pb = 10 10-3 10 1/2 10 = 20 1 Hence, set 20 to CMX and 1 to CDV.

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

SQ1000/2000

BS+ BDH BSFG 24V 0V COMM BDL (108.5) Approx. 10 101 68 34 10 4.6 A A B A B A A 2.PUSH 2.PUSH 1.TURN 1.TURN B 28 5.5 35 74.5 ADDRESS No. 13 2-M4 clamp screw EXH outlet Approx. 9 1.5 D side U side Stations 1 2 3 4 5 6 7 8 n Approx. 9 C8: EXH port For top ported C8: SUP port 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 81.5 67 2n-C3, C4, C6, M5 (A, B port) C3:

NCG/CG1

CGIK Basic Style Bore size (mm) Stroke range (mm) A GB GA F B1 D E AL C H KA NA P TA TC ZZ I H1 MM S TB J 20 25 32 40 50 63 10 10 10 10(13) 12(14) 12(14) 12 12 12 13 14 14 2 2 2 2 2 2 Up to 200 Up to 300 Up to 300 12 14 18 25 30 32 18 22 22 30 35 35 15.5 13 17 17 19 27 27 14 9.2 5 6 6 8 11 11 M4 x 0.7 depth 7 24 35 40 40 50 58 58 8 10 10 14 18 18 1/8 1/8 1/8 1/8 1/4 1/4 11 11 11 12 13 13

CJ2

Because the retaining screws extend into the cylinder, this could lead to an air leak. 2 (different surfaces) 15 1 10 2(same surface) 65 D-C73C D-C80C D-H7C ( ) 6 2(different surfaces) 15 10 1 10 2(same surface) 65 16 D-H7LF(1) 2 (different surfaces) 25 1 15 D-A7/A8 D-A7H/A80H D-A73C/A80C 10 2 5 1 D-F7 D-J79 D-F7V D-J79C D-A79W D-F7W D-J79W D-F7BAL D-F7WV D-F79F Rail mounting 2 5 1 5 2 15