Rotary Actuator/Vane Style Series CRB1

CRQ2X MSQX M1 M2 Body (B) MRQ N Body (A) 2 x R A port J E2 H E1 F S A port B port N 2 x R Y Y A1 M1 A2 P 6 x Q X A1 (mm) R () E1 (g6) E2 (h9) F (h9) Model A1 A2 B C D G H J K L M1 M2 N P Q S T U V W X Y Z CRB1BW 5026 18 14 M6 x 1 depth 9 0 0.043 0.006 0.017 0 0.052 R6 1/8 67 70 3 10 13 5 50 60 34 66 46 5.5 6.5 78 19.5 39.5 13.5 11 11.9 12 25 CRB1BW 50-E CRB1BW 6321 18 29 22 15 M8 x 1.25

Vacuum Unit Series ZK2

Note 10) Fixed unit: kPa Note 11) When K, Q, R or S is selected, select K for e Combination of Supply Valve and Release Valve.

Air Slide Table Series MXS

7 q !1 !0 !6 !2 !3 !

Air Preparation Equipment

KT-FGDC KT-FGDE KT-FGDT KT-FGDF Replacement parts A 1 kit for each of each one of seals q to t and gasket.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

When the inlet pressure is shut off and released, the check valve w opens and the pressure in the diaphragm chamber q is released to the inlet side (Figure 2). This lowers the pressure in the diaphragm chamber q and the force generated by the pressure regulator spring e pushes down the diaphragm.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

Y I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6( 5.8) 29 5.5 M3 x

Digital Flow Switches Series PF2A

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

When ordering TUV approved products, add " Q" at the end of the standard part number.

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Water-cooledThermo-chiller

T xV x x C h x 60 x 1000 Q = 20 x 60 x 1.74 x 10 3 x 1.05 x 10 3 Q = T xV x x C h x 860 = 2436W = 2.4 kW 15 x 60 x 1000 = 20 x 0.06 x 1.74 x 10 3 x 0.25 0.25 x 860 Cooling capacity = Considering a safety factor of 20%, 2.9 kW (When the circulating fluid temperature is 50C.) 2.4 x 1.2 = = 2.4 kW (In this case, selected Thermo-chiller model will be the HRW008-H.)

0.5

Red flashes if the CPU is abnormal. q w e r t y u Green lights up when emitters require cleaning.

Suction Guard (Produced upon receipt of order) FHG Series

Port size q Seal order no. r Seal order no. t Seal order no.

Vacuum Filter AFJ Series

q r r w w (y) e (y) t e t Component Parts No.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

When the inlet pressure is shut off and released, the check valve w opens and the pressure in the diaphragm chamber q is released to the inlet side (Figure 2). This lowers the pressure in the diaphragm chamber q and the force generated by the pressure regulator spring e pushes down the diaphragm.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

When the inlet pressure is shut off and released, the check valve w opens and the pressure in the diaphragm chamber q is released to the inlet side (Figure 2). This lowers the pressure in the diaphragm chamber q and the force generated by the pressure regulator spring e pushes down the diaphragm.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

When the inlet pressure is shut off and released, the check valve w opens and the pressure in the diaphragm chamber q is released to the inlet side (Figure 2). This lowers the pressure in the diaphragm chamber q and the force generated by the pressure regulator spring e pushes down the diaphragm.

Low Profile Guide Type

+ Stroke) Q + Stroke CY1F 4 x MM thread depth ML (LL) LA 6 x YA recessed area Note 2) XAH7 PA Adjustment bolt Max. approx.

15

Load Blocking Xb,Xc,Xd zb A za CY3B CY3R Wb X Z CY1S CY1S Wc yc yd CY1L Wa Wd CY1H Y zc,zd Y CY1F CYP Mass and center of gravity of the load Calculation for Overall Center of Gravity Center of gravity mt = mn q Load no.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Disassembly 1) After loosening the screw q, then if the housing r is pulled in the direction of the screw, the connector will be removed from the body of equipment (solenoid, etc.). 2) Pull out the screw q, then remove the gasket or . 3) On the bottom part of the terminal block e, theres a cut-off part (indication of an arrow) .

WRF100

Fixing method for protective covers WRF100-T200 WRF100-S200 WRF100-T240 WRF100-S240 WRF100-T270 WRF-C200 WRF-C240 w WRF-C270 Tightening torque for cover mounting bolts Location Tightening torque (N.m) t r e r y 3.0 to 4.0 5.0 to 7.0 1. q Mount the cover L (q) and cover R (w) on the cylinder body. Mount the cover L (q) on the side where a limit switch is mounted.