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4 P 5 X4 PRR COM1 () X0 6 THR X1 THS2 THS1 CM L X2 OLR N PRS2 PRS3 MC1,2 X3 EDV PE P P THR THS1,2 24V TB1,2 T V V FM1,2 SWL PRR PRS1 PRS2 PRS3 PLC GFCI EDV IDFA100F150F 6 6 6.4 IDX-OM-U022 6.

Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal 10 10 P.42 Non-standard motor 6 6 P.50 Vertical 10 10 P.58 Options P.66 Construction P.67 Mounting P.68 Non-standard Motor Mounting P.69 Deflection Data P.71 Part Number Designations P 1 E F G LTF 6 100 R 2 X10 Motor specification Lead screw lead Series Series 6 Nil

(L) M (M) DC +DIN +-1 2 (G) A C S DIN DIN DIN DIN DIN D 68mm Y 4.57mm T 68mm E 2.32.8mm E, T 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S D,Y R Y Z EZTZDZLZMZ AC24V (+) D C S VF1000 VF1000 VF1000 VF1000 VF3000 VF3000 VF3000 VF3000 VF5000 VF5000 VF5000 VF5000 () P P(SUP) P A B A(CYL2) B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 3(R2)

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Number of needle rotations Bore size (mm) Number of needle rotations Conditions : Supply pressure at 0.5 MPa, No load Primary speed of meter-in type can be controlled as likely as during normal operation.

MPa Model AC20m AC25m, AC30m AC40m AC40m-06 AC50m, AC55m, AC60m Scale plate V V V V V V V V V V c P Note 2) Both MPa and psi pressure unit IS10M-20 IS10M-30 IS10M-40 IS10M-50 IS10M-60 Note 1) Note 2) Set pressure range of 6P(L, Z) is 0.2 to 0.6 MPa (30 to 90 psi).

Hysteresis 0 to variable 7 Withstand pressure 600 kPa Detection nozzle 1.5 4 Current flow 5 L/min or less 12 L/min or less 22 L/min or less Power supply voltage 24 VDC 10%, Ripple(p-p) 10% or less (with power supply polarity protection) Current consumption 25 mA or less Switch output 2 output (NPN or PNP) Max. load current 10 mA Max. applied voltage 26.4 V Residual voltage 1 V or less (at

Byte0 1 Byte1 2 Byte2 3 Byte3 PROFIBUS DP Byte4 ID(14h) Byte5 ID(11h) Byte6 Header Byte7 System diag.1 Byte8 System diag.2 Byte9 System diag.3 Byte10 System diag.4 Byte11 Reserved : : Byte18 Reserved Byte19 Header Byte20 0~7 Byte21 8~9 Byte22 Reserved : : Byte27 Reserved Byte28 A Byte29 A Byte30 A Byte31 B Byte32 B Byte33 B : : Byte61 L Byte62 L Byte63 L -71No.EX-OMN0027CN-D 1 7 6 5

N Nil Rc 3 1 0 14 to 60 l/min 20 to 1500 l/min 36 to 2600 l/min NPT Specifications Water/Non corrosive liquid Copper alloy Fluid Stainless steel 304 Liquid, which do not corrode stainless steel 304. Max. pressure 1 MPa 1.75 MPa Water resistance Insulation resistance 100 M (500 DC by megameter) 1500 VAC for one min.

outlet 2 x Port size SFD LLB AD GD Ball valve Power source code Port size A 460 588 394 484 33 52 70 70 59 60 485 580 428 505 320 333 150 150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 13

Flow Characteristics Air pressure 0.7 MPa (Example) To get pressure drop at 0.3 MPa of air pressure, 2000 l/min (ANR) of air flow, and model HAA22, use P = 0.0007 MPa from the table and convert P1 to 0.3 MPa.

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2-RA Both ends tapped style (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33

Motor output [W] / size [mm] 100 / 40 200 / 60 Type of Motor AC servo motor (100/200VAC) Type of Motor S2,S3 Incremental 17bit encoder (Resolution:131072 p/rev) Type of Motor S6,S7 Absolute 18bit encoder (Resolution:262144 p/rev) specification Encoder Electric Type of Motor T6,T7 [With LECSB-T/LECSS-T]Absolute 22bit encoder (Resolution: 4194304 p/rev) [With LECSC-T]Absolute 18bit encoder

, N2, Ar, CO2 Air, N2 Dry air, N2 Digital Digital Digital Digital Digital 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min 1 to 10 L/min 50 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 0 to 0.5 L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 1 to 1 L/min 3 to 3 L/min 5 to 500 L/min 2 to 200 L/min 5 to 50 L/min 150 to 3000 L/min 10 to 1000 L/min 10 to 100 L/min

Solenoid Specifications Model V114-5LU Fluid Air Ambient and fluid temperature (C) 10 to 50 (No freezing) Response time (DC) (ms) ON: 5 or less OFF: 4 or less Max. operating frequency (Hz) 20 Lubrication Not required Mounting position Unrestricted Impact/Vibration resistance (m/s2) 15030 Enclosure rating Dust proof Model V114-5LU Electrical entry L shaped plug connector(L) Coil rated voltage

Refer to the table for each pressure specification (page 80) Display/set pressure range Display/min. setting unit Power supply voltage 12 to 24 VDC (10%), and ripple (p-p) 10% at max. Electric spec.

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenl '1 '100 vAc ,2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .