RZQ

50 76 118.5 127.5 96.5 6.6 9 67 63 92 130 139 102 9 9 90 CEP1 Bore size (mm) Rear flange style: RZQG FZ L M 4-FD CE1 32 65 18 34 CE2 40 72 18 40 50 90 22 50 ML2B 63 108 28 60 FV M C J G5-S CV M L B + Full stroke FT FZ AH + Full stroke MVGQ CC RB Double clevis style: RZQD Double Style (mm) J CT Cap bolt Bore size (mm) Hole: CD H10 d9 A B CD CL CT CU CW D32 112.5 82.5 10 102.5 5 14 20 -X 40

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-

VXR21/22/23

IN Model/Valve Specifications Connection Max. operating pressure differential (MPa) Flow characteristics Water, Oil Weight (g) Min.operating pressure differential (MPa) Orifice size (mm) Max. system pressure (MPa) Model Thread Water Oil Cv converted Av x 10 -6 (m 2) 1 2 3 4 VXR2150-04 VXR2150-06 VXR2260-10 VXR2270-12 VXR2380-14 VXR2390-20 20 20 25 35 40 50 1250 160 180 290 530 720 1200 6.5

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IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

Copper-free Actuators

, 3) 20-CDQS Standard 2.2-2 20-CDQS Standard long stroke SCQSl 2.2-10 20-CDQSW Double rod 2.2-30 20-CDQSlS Anti-lateral load Air cylinder Series C(D)M2 20-CM2l Standard 1.4-3 20-CM2lA Standard with air cushion SCM2l 1.4-22 20-CM2W Double rod 1.4-50 20-CM2K Non-rotating rod 1.4-66 20-CM2R Direct mounting Air cylinder Series M(D)B 1.7-6 20-M(D)B Standard 20-M(D)BW Double rod SMB-l 1.7-16 20

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

M-8 M-12 SMC Type of 2-Apr-01 SMC Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 The above older MDB1 Direct Body Mount 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) our new part # MHL, Direct Body Mount 10, 16, 20, 25, 32 & 40 Gripper Bore sizes -Y7PSDPC MHQG2 Direct Body Mount 32 & 40 Gripper Bore sizes MHS2/3/

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

stations) L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 23 33 43 53 63 73 83 93 103 113 123 133 143 153 163 173 183 193 203 213 L2 17 27 37 47 57 67 77 87 97 107 117 127 137 147 157 167 177 187 197 207 12 M Type Plug Connector/L Type Plug Connector Series VQ100 VQ110-M-M5 46.3 About 300 (In case of latching) 35.3 Manual override (Lead wire length) About 300 (Lead wire length

Multistage Ejector (N)ZL Series

2.9)m For EE (ZSE4E) Lead wire length 0.5 (2.9)m NPN output Analog output PNP output Rc1/2 G1/2 1/2-14NPT 1/2-14NPTF Nil F N T Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).

Intrinsically Safe Valve

53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)

Modular Type Filter Regulator Series AW

Note 3) The AW30 and AW40 bowl assembly comes with a bowl guard (steel band material). 59 Filter Regulator AW10 to 40 Dimensions AW10, 20 H M T D N Panel fitting dimension J Bracket (option) Y S U W IN OUT B C Z Q P IN OUT V Plate thickness AW10, AW20: Max. 3.5 K Pressure gauge port size Pressure gauge (option) OUT Square embedded type pressure gauge (option) O S Port size Drain E Min. clearance

MHF2

Required griping force = 0.15 kg x 20 x 9.8 m/s2 = Approx. 29.4N or more 10 40 20 0 80 60 30 Holding point L mm Length of gripping point : 30mm Selecting the MHF2-12D The gripping force is obtained from the intersection point of the gripping point distance L=30mm and a pressure of 0.4MPa. Gripping force N=38N A gripping force of 38N satisfies the required gripping force of 29.4N.

Short Stroke Electric Actuator Series LX

) L2 a = 2000 200 a = 3000 100 Mer m 3 0 1 2 Transfer load m (kg) a = 1000 a 2000 a = 2000 Mey L3 (mm) a = 3000 m 1000 L3 3 0 2 1 Transfer load m (kg) Refer to page 304 for deflection data. 210 5 Phase Stepper Motor/Without Motor Brake Series LXF Dimensions/LXFH5BC Scale: 35% (5) 2-M2.5 x 0.45 depth 2 5 Stroke + 113 10.5 2.5 2-M4 x 0.7 thread depth 9 31 G 28 58 5H9 +0.030 0 depth 5 (5.5)

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

-V1 4(A)-M5 1 2 G H 13.1 (Light/surge voltage suppressor) 5 + 13 15.5 3 13 3 (For mounting) 2-2.6 28.5 [35.5] <32.4> 10 G: Approx. 300 H: Approx. 600 (Lead wire length) 1 30.8[33] <33> 25.1 11.4 5.7 5.7 5.7 2 1 7 5 9.5 5 19 (Piping port) M5 x 0.8 L plug connector (L): 10-V1 4(A)-L-M5 1 2 M plug connector (M): 10-V1 4(A)-M-M5 1 2 13.1 (Light/surge voltage suppressor) (Light/surge voltage suppressor

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Note 3) PLC: Programmable Logic Controller Note 1) Lead wire length symbols: 0.5 m M9BW 1 m M Nil M9BWM 3 m L M9BWL 5 m Z M9BWZ Refer to page 889 for the applicable auto switch list.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

H G I J K L A B C D E F M R +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 9 9 16 16 +0.027 0 +0.027 0 +0.027 0 +0.027 0 36 38 55 55 16 18 22 22 9 9 12 15 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 16 30 30 36 44 M4 10 10 13 13 10

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Lateral 0.2 0.1 200 300 500 100 Load point distance mm LJ1H20 LJ1H30 20 10 Lateral load 100% 10 5000 Lateral load 50% 5000 2000 Horizontal load 100% 2000 Horizontal load 50% 1000 Horizontal load 100% 1000 Horizontal load 50% 500 500 Amount of deflection m Amount of deflection m 200 200 100 100 50 50 20 20 10 Lateral load 100% 10 5 Lateral load 50% 5 Horizontal empty weight deflection 2 2

T/TIA

T0425 T0604 T0806 T1075 T1209 TIA01 TIA05 TIA07 TIA11 TIA13 Color KS KX 100 m reel 150 m reel 200 m reel 500 m reel 20 m roll 250 m reel 500 m reel Black, White, Red, Blue, Yellow, Green KM X3 KF Red, Blue, Yellow, Green X4 Black, White X64 M H/DL L/LL Reinforced corrugated cardboard specification: Longer length reel/-X64 Dimensions KC Dimensions KK Model D1 D2 D3 W Weight (kg)

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 Body size Maximum allowable torque [Nm] M5 0.05 1/8 0.07 1/4 0.16 3/8 0.2 1/2 0.4 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

AMH

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35