SMC Corporation of America
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, R2 port 31 31 : 3 position ( ): Rc3/8 1.11-6 Single Unit Series VQ4000 Base Mounted Plug Lead Grommet G H 2 position single: VQ415 l 0 1 155.5 155.5 105.5 42.5 23.5 23.5 50 105.5 42.5 50 11 (B port) 11 (A port) Indicator light (12.5) (12.5) SY 5 3 4 2 SYJ 9 38 48 A B 38 24.6 10.5 48 11 1 A SX 4 2 3 5 1 14 12 13.5 13.5 30 45 25.6 Mounting hole 30 45 VK Manual override 25.6 Mounting hole

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Recommended air flow Tubing size Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Unrestricted 360 piping tube mounting. The connector for the IN side is a universal joint type that enables a tube to be connected in any direction within 360.

Main circuit of switch (OUT1) Black Load 30 V, 80 mA (OUT2) + ZCU White 12 to 24 VDC Load 30 V, 80 mA Covering retainer Core wire crimping area Blue DC () AMJ Core wire Lead wire Socket Misc. Hook Covering ZSE1-18, -19 Pressure setting trimmer 1 Pressure setting trimmer 2 3.

Closed cenler NVFR2300 NVFR2310 VB 0.7 1 8 0 30 or less 0.95 (0,43) V4 Exhausl center NVFR2400 NVFR24 t0 lb 0.7 180 30 or less 0.95 {0.43) th Pressure center NVFR2500 NVFF25t0 !

,oox'o''"n' ar3oro 60 Nole 2) Drain guide is G1i 4 (app cable 10 AF30lo 60) Nore 1) Wlhoul a valve name plate and caulion A F 1 0 1 0 6 0 Port size Symbol Port 1 0 20 30 40 50 60 Symbol Descrlption Applicable M5 a 1 B O AF20 to 60 1t4 a a a 3a a a 1t2 a g4 a a 1 a a auto dlain (N C.)

ble acting Single rod o12, o16/5to30 o20, o2t5 io 50 o32, @40l5lo 1N o50, 063/10 io 1m Double rod 612, E1U5lo 30 amlo @Q/5to50 o50, 0631 0 to 50 Large bor lize Double acting Single rod101o 300 Double rod 10 to 300 Standard Double acting Single @d o12. a16/5 lo 3A o20 p2t510 50 o32, o40l5 to 1 00 o50 to o10cy10 to 100 Double rod 012, 016/510 30 a20. o25/5 lo 5A 632, 64US lo 1OA o50 lo 0100

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

Note) Port size A B D E30003-A 3/8 31.8 30 30 E40004-A 1/2 31.8 36 36 Seal A (Spacer width) Note) in part numbers indicates a pipe thread type. No indication is necessary for Rc; however, indicate N for NPT, and F for G. Separate interfaces are required for modular unit. Part no.

/4 -C01L: Rc1/8 737 Series ZSE80/ISE80 Dimensions With bracket (Rear ported) ZS-24-A A 30 20 1.6 20 43.2 11.5 55 4.5 40 15 4.5 6.5 20 39.7 View A With bracket (Rear ported) ZS-24-D 30 20 1.6 20 43.2 55 4.5 40 11.5 15 4.2 7.2 7.5 22 39.7 With bracket (Bottom ported) 50 40 30 4 x 4.5 49 43 20 30 20 10 60.5 3.5 2 47 25.2 35.5 16.3 40.3 1.5 738 Series ZSE80/ISE80 2-Color Display Digital Pressure

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Rod end thread Female thread 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Rod end thread tolerance JIS class 2 50 to 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 +1.0 0 Stroke length tolerance When stroke exceeds the standard range, refer to page 7-6-121.

Resin Molded 30 3 Series and Coil Type Combinations 4 Grommet / Tape winding Series Faston terminal / Molded Grommet / Molded 10 20 30 243 Series VDW10/20/30 Standard Specifications Direct operated poppet Valve construction Fluid Note 2) Water (except waste water or agricultural water), Air, Low vacuum Valve specifications Coil specifications 2.0 Withstand pressure (MPa) Ambient temperature

Inappropriate specifications Leave an interval of a minimum of 15 ms (recommendation is 30 ms) between input signals and maintain the state of the signal for a minimum of 15 ms (recommendation is 30 ms), because PLC processing delays and controller scanning delays can occur. 8.4 Controller input signal response Move occasionally Signal timing Check the timing of the signal from the PLC to

Nil W 2-5-5 Base Mounted Series VQ4000 Plug-in Type Conduit terminal 2 position single: VQ410 0 1 23.5 23.5 50 158 50 90 108 158 Indicator light 11(12.5) 11(12.5) 5 3 2(B) port 4(A) port 9 4 2 38 48 10.5 1 11 A B 38 24.6 48 4 2 A 13.5 13.5 30 45 2-5.6 Mounting hole 14 5 1 3 12 30 45 2-5.6 Mounting hole 5-Rc 1/4, 3/8 (5(R1), 3(R2) port Rc 1/4) Manual override Bottom ported drawing 27 4(A),

Maintenance for suction cup . 29 8.Precautions . 30 8.1 Air supply . 30 8.2 Vacuum gripper precautions . 30 8.3 Suction cup precautions . 32 9.Troubleshooting . 35 -1No. TQ1230001-OM101-D Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

MADE IN G IDF100150F i-2 i-6 IDX-OM-U021 i i-3 HFC IDF100150F i-3 i-7 IDX-OM-U021 i i-4 / 1 1.5 () IDF100150F i-4 / i-8 IDX-OM-U021 1 1 1-1 i.2.9 1 2 IDF100F-30 C.RV IDF100F-30-CRV1 IDF 100 F 30 C 1 2 G 3 K 100 125 150 ) 100kW 125kW P 150kW ) R V 30 AC200V(50Hz) AC200/220V(60Hz) 1 C 1 G 2 K 3 P R V 1-1 IDF100150F 1 1 IDX-OM-U021 1 1-2 1-2-1 (C) 1-2-2 G 1-2-3 K

Power saving circuit is not : SY100-30-A Without lead wire available in the case of W type.

Dimensions (mm) 1in = 25.4mm Scale: 60% With auto switch: MDSUA7-S 19 25.5 (34.5: Connector type) Angle adjustment bolt 58.5 30 2-M5 x 0.8 (Port position: Side port type only) A port B port 30 25 20.5 (26.5: Connector type) 42 65 Connector type 8 4 34.5 26.5 Connector type 8 Series MSUA Rotary Table High Precision Type These drawings indicate the condition when the B port is pressurized.